Abstract

Interfacial structure of Mg/SiC multilayers as extreme ultra-violet reflectors was studied along with Mg/Si and Mg/C multilayers by means of x-ray reflectometry, x-ray diffraction, x-ray photoemission spectroscopy, and transmission electron microscopy. The interfacial diffusion in the Mg/SiC multilayer is found asymmetrical as the interlayers formed at SiC-on-Mg interfaces (2.5 nm) are much thicker than those at Mg-on-SiC interfaces (1.0 nm). Contrary asymmetry is found in the Mg/Si and Mg/C multilayers. An explanation of this phenomenon is suggested based on the investigation results. Our findings may result in improved reflectance of Mg/SiC multilayers by inserting diffusion barriers at the more diffused interfaces.

© 2013 OSA

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef] [PubMed]
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    [CrossRef]

2013 (1)

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

2012 (3)

M. Fernández-Perea, R. Soufli, J. C. Robinson, L. R. De Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region,” Opt. Express20(21), 24018–24029 (2012).
[CrossRef] [PubMed]

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

2011 (1)

2010 (4)

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. Le Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

A. Gupta, D. Kumar, and V. Phatak, “Asymmetric diffusion at the interfaces in Fe/Si multilayers,” Phys. Rev. B81(15), 155402 (2010).
[CrossRef]

J. Jiang, D. G. Zeng, H. Ryu, K.-W. Chung, and S. Bae, “Effects of controlling Cu spacer inter-diffusion by diffusion barriers on the magnetic and electrical stability of GMR spin-valve devices,” J. Magn. Magn. Mater.322(13), 1834–1840 (2010).
[CrossRef]

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

2009 (1)

S. Bruijn, R. W. E. van de Kruijs, A. E. Yakshin, and F. Bijkerk, “The effect of Mo crystallinity on diffusion through the Si-on-Mo interface in EUV multilayer systems,” Defect Diffus. Forum283–286, 657–661 (2009).
[CrossRef]

2008 (2)

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett.92(9), 091913 (2008).
[CrossRef]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

2007 (2)

D. Iuşan, M. Alouani, O. Bengone, and O. Eriksson, “Effect of diffusion and alloying on the magnetic and transport properties of Fe/V/Fe trilayers,” Phys. Rev. B75(2), 024412 (2007).
[CrossRef]

P. Vashishta, R. K. Kalia, A. Nakano, and J. P. Rino, “Interaction potential for silicon carbide: A molecular dynamics study of elastic constants and vibrational density of states for crystalline and amorphous silicon carbide,” J. Appl. Phys.101(10), 103515 (2007).
[CrossRef]

2005 (2)

T. Ejima, A. Yamazaki, T. Banse, K. Saito, Y. Kondo, S. Ichimaru, and H. Takenaka, “Aging and thermal stability of Mg/SiC and Mg/Y2O3 reflection multilayers in the 25-35 nm region,” Appl. Opt.44(26), 5446–5453 (2005).
[CrossRef] [PubMed]

V. M. Uzdin and L. Häggström, “Atomic-scale magnetic and chemical structure of Fe/V multilayers using Mössbauer spectroscopy,” Phys. Rev. B72(2), 024407 (2005).
[CrossRef]

2003 (2)

Z.-J. Liu, S. H. Zhou, X. X. Xi, and Z.-K. Liu, “Thermodynamic reactivity of the magnesium vapor with substrate materials during MgB2 deposition,” Physica C397(3-4), 87–94 (2003).
[CrossRef]

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

2002 (2)

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

H. J. Gotsis, D. A. Papaconstantopoulos, and M. J. Mehl, “Tight-binding calculations of the band structure and total energies of the various phases of magnesium,” Phys. Rev. B65(13), 134101 (2002).
[CrossRef]

2001 (1)

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys.90(2), 1017–1025 (2001).
[CrossRef]

1999 (1)

T. Shinjo and W. Keune, “Mössbauer-effect studies of multilayers and interfaces,” J. Magn. Magn. Mater.200(1-3), 598–615 (1999).
[CrossRef]

1995 (1)

M. R. J. van Buuren, F. Voermans, and H. van Kempen, “Bonding in Mg2Si studied with x-ray photoelectron spectroscopy,” J. Phys. Chem.99(23), 9519–9522 (1995).
[CrossRef]

1987 (1)

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

1981 (1)

Alameda, J.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Alouani, M.

D. Iuşan, M. Alouani, O. Bengone, and O. Eriksson, “Effect of diffusion and alloying on the magnetic and transport properties of Fe/V/Fe trilayers,” Phys. Rev. B75(2), 024412 (2007).
[CrossRef]

André, J.-M.

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Z. Wang, P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, H. Zhou, and T. Huo, “Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers,” Opt. Express19(22), 21849–21854 (2011).
[CrossRef] [PubMed]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. Le Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Bae, S.

J. Jiang, D. G. Zeng, H. Ryu, K.-W. Chung, and S. Bae, “Effects of controlling Cu spacer inter-diffusion by diffusion barriers on the magnetic and electrical stability of GMR spin-valve devices,” J. Magn. Magn. Mater.322(13), 1834–1840 (2010).
[CrossRef]

Bajt, S.

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys.90(2), 1017–1025 (2001).
[CrossRef]

Baker, S. L.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Banse, T.

Barbee, T. W.

Bengone, O.

D. Iuşan, M. Alouani, O. Bengone, and O. Eriksson, “Effect of diffusion and alloying on the magnetic and transport properties of Fe/V/Fe trilayers,” Phys. Rev. B75(2), 024412 (2007).
[CrossRef]

Bijkerk, F.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

S. Bruijn, R. W. E. van de Kruijs, A. E. Yakshin, and F. Bijkerk, “The effect of Mo crystallinity on diffusion through the Si-on-Mo interface in EUV multilayer systems,” Defect Diffus. Forum283–286, 657–661 (2009).
[CrossRef]

Birch, J.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett.92(9), 091913 (2008).
[CrossRef]

Bridou, F.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Bruijn, S.

S. Bruijn, R. W. E. van de Kruijs, A. E. Yakshin, and F. Bijkerk, “The effect of Mo crystallinity on diffusion through the Si-on-Mo interface in EUV multilayer systems,” Defect Diffus. Forum283–286, 657–661 (2009).
[CrossRef]

Ceglio, N. M.

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Chang, C.-H.

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Chen, H.

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

Chung, K.-W.

J. Jiang, D. G. Zeng, H. Ryu, K.-W. Chung, and S. Bae, “Effects of controlling Cu spacer inter-diffusion by diffusion barriers on the magnetic and electrical stability of GMR spin-valve devices,” J. Magn. Magn. Mater.322(13), 1834–1840 (2010).
[CrossRef]

Corso, A. J.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

De Marcos, L. R.

Delmotte, F.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Dong, J.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Ejima, T.

Eriksson, F.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett.92(9), 091913 (2008).
[CrossRef]

Eriksson, O.

D. Iuşan, M. Alouani, O. Bengone, and O. Eriksson, “Effect of diffusion and alloying on the magnetic and transport properties of Fe/V/Fe trilayers,” Phys. Rev. B75(2), 024412 (2007).
[CrossRef]

Fedorenko, A. I.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Feigl, T.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Fernández-Perea, M.

M. Fernández-Perea, R. Soufli, J. C. Robinson, L. R. De Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region,” Opt. Express20(21), 24018–24029 (2012).
[CrossRef] [PubMed]

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Fineschi, S.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Ghafoor, N.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett.92(9), 091913 (2008).
[CrossRef]

Giglia, A.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Gotsis, H. J.

H. J. Gotsis, D. A. Papaconstantopoulos, and M. J. Mehl, “Tight-binding calculations of the band structure and total energies of the various phases of magnesium,” Phys. Rev. B65(13), 134101 (2002).
[CrossRef]

Gullikson, E.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett.92(9), 091913 (2008).
[CrossRef]

Gullikson, E. M.

Gupta, A.

A. Gupta, D. Kumar, and V. Phatak, “Asymmetric diffusion at the interfaces in Fe/Si multilayers,” Phys. Rev. B81(15), 155402 (2010).
[CrossRef]

Häggström, L.

V. M. Uzdin and L. Häggström, “Atomic-scale magnetic and chemical structure of Fe/V multilayers using Mössbauer spectroscopy,” Phys. Rev. B72(2), 024407 (2005).
[CrossRef]

Hawryluk, A. M.

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Hecquet, C.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Hu, M.-H.

Huang, Q.

Hultman, L.

N. Ghafoor, F. Eriksson, E. Gullikson, L. Hultman, and J. Birch, “Incorporation of nitrogen in Cr/Sc multilayers giving improved soft x-ray reflectivity,” Appl. Phys. Lett.92(9), 091913 (2008).
[CrossRef]

Huo, T.

Ichimaru, S.

Iusan, D.

D. Iuşan, M. Alouani, O. Bengone, and O. Eriksson, “Effect of diffusion and alloying on the magnetic and transport properties of Fe/V/Fe trilayers,” Phys. Rev. B75(2), 024412 (2007).
[CrossRef]

Jiang, J.

J. Jiang, D. G. Zeng, H. Ryu, K.-W. Chung, and S. Bae, “Effects of controlling Cu spacer inter-diffusion by diffusion barriers on the magnetic and electrical stability of GMR spin-valve devices,” J. Magn. Magn. Mater.322(13), 1834–1840 (2010).
[CrossRef]

Jones, J. E.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Jonnard, P.

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Z. Wang, P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, H. Zhou, and T. Huo, “Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers,” Opt. Express19(22), 21849–21854 (2011).
[CrossRef] [PubMed]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. Le Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Kaiser, N.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Kalia, R. K.

P. Vashishta, R. K. Kalia, A. Nakano, and J. P. Rino, “Interaction potential for silicon carbide: A molecular dynamics study of elastic constants and vibrational density of states for crystalline and amorphous silicon carbide,” J. Appl. Phys.101(10), 103515 (2007).
[CrossRef]

Kearney, P. A.

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys.90(2), 1017–1025 (2001).
[CrossRef]

Keune, W.

T. Shinjo and W. Keune, “Mössbauer-effect studies of multilayers and interfaces,” J. Magn. Magn. Mater.200(1-3), 598–615 (1999).
[CrossRef]

Kjornrattanawanich, B.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Kondo, Y.

Kondratenko, V. V.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Kuhlmann, T.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Kumar, D.

A. Gupta, D. Kumar, and V. Phatak, “Asymmetric diffusion at the interfaces in Fe/Si multilayers,” Phys. Rev. B81(15), 155402 (2010).
[CrossRef]

Larruquert, J. I.

Le Guen, K.

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Z. Wang, P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, H. Zhou, and T. Huo, “Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers,” Opt. Express19(22), 21849–21854 (2011).
[CrossRef] [PubMed]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. Le Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Lettieri, J.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Li, H.

Li, Q.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Liu, Z.-J.

Z.-J. Liu, S. H. Zhou, X. X. Xi, and Z.-K. Liu, “Thermodynamic reactivity of the magnesium vapor with substrate materials during MgB2 deposition,” Physica C397(3-4), 87–94 (2003).
[CrossRef]

Liu, Z.-K.

Z.-J. Liu, S. H. Zhou, X. X. Xi, and Z.-K. Liu, “Thermodynamic reactivity of the magnesium vapor with substrate materials during MgB2 deposition,” Physica C397(3-4), 87–94 (2003).
[CrossRef]

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Louis, E.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

Mahne, N.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Maury, H.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Mehl, M. J.

H. J. Gotsis, D. A. Papaconstantopoulos, and M. J. Mehl, “Tight-binding calculations of the band structure and total energies of the various phases of magnesium,” Phys. Rev. B65(13), 134101 (2002).
[CrossRef]

Méndez, J. A.

Nakano, A.

P. Vashishta, R. K. Kalia, A. Nakano, and J. P. Rino, “Interaction potential for silicon carbide: A molecular dynamics study of elastic constants and vibrational density of states for crystalline and amorphous silicon carbide,” J. Appl. Phys.101(10), 103515 (2007).
[CrossRef]

Nannarone, S.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Nicolosi, P.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Nutt, S. R.

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Papaconstantopoulos, D. A.

H. J. Gotsis, D. A. Papaconstantopoulos, and M. J. Mehl, “Tight-binding calculations of the band structure and total energies of the various phases of magnesium,” Phys. Rev. B65(13), 134101 (2002).
[CrossRef]

Pelizzo, M. G.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Petford-Long, A. K.

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Phatak, V.

A. Gupta, D. Kumar, and V. Phatak, “Asymmetric diffusion at the interfaces in Fe/Si multilayers,” Phys. Rev. B81(15), 155402 (2010).
[CrossRef]

Pogrebnyakov, A. V.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Poltseva, O. V.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Redwing, J. M.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Rino, J. P.

P. Vashishta, R. K. Kalia, A. Nakano, and J. P. Rino, “Interaction potential for silicon carbide: A molecular dynamics study of elastic constants and vibrational density of states for crystalline and amorphous silicon carbide,” J. Appl. Phys.101(10), 103515 (2007).
[CrossRef]

Robinson, J. C.

M. Fernández-Perea, R. Soufli, J. C. Robinson, L. R. De Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region,” Opt. Express20(21), 24018–24029 (2012).
[CrossRef] [PubMed]

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Ryu, H.

J. Jiang, D. G. Zeng, H. Ryu, K.-W. Chung, and S. Bae, “Effects of controlling Cu spacer inter-diffusion by diffusion barriers on the magnetic and electrical stability of GMR spin-valve devices,” J. Magn. Magn. Mater.322(13), 1834–1840 (2010).
[CrossRef]

Saito, K.

Schlom, D. G.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Schubert, J.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Seely, J.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Sevryukova, V. A.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Shinjo, T.

T. Shinjo and W. Keune, “Mössbauer-effect studies of multilayers and interfaces,” J. Magn. Magn. Mater.200(1-3), 598–615 (1999).
[CrossRef]

Soufli, R.

M. Fernández-Perea, R. Soufli, J. C. Robinson, L. R. De Marcos, J. A. Méndez, J. I. Larruquert, and E. M. Gullikson, “Triple-wavelength, narrowband Mg/SiC multilayers with corrosion barriers and high peak reflectance in the 25-80 nm wavelength region,” Opt. Express20(21), 24018–24029 (2012).
[CrossRef] [PubMed]

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Stearns, D. G.

S. Bajt, D. G. Stearns, and P. A. Kearney, “Investigation of the amorphous-to-crystalline transition in Mo/Si multilayers,” J. Appl. Phys.90(2), 1017–1025 (2001).
[CrossRef]

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Stearns, M. B.

A. K. Petford-Long, M. B. Stearns, C.-H. Chang, S. R. Nutt, D. G. Stearns, N. M. Ceglio, and A. M. Hawryluk, “High-resolution electron microscopy study of x-ray multilayer structures,” J. Appl. Phys.61(4), 1422–1428 (1987).
[CrossRef]

Takenaka, H.

Trithaveesak, O.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Tsarfati, T.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

Underwood, J. H.

Uzdin, V. M.

V. M. Uzdin and L. Häggström, “Atomic-scale magnetic and chemical structure of Fe/V multilayers using Mössbauer spectroscopy,” Phys. Rev. B72(2), 024407 (2005).
[CrossRef]

Vaithyanathan, V.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

van Buuren, M. R. J.

M. R. J. van Buuren, F. Voermans, and H. van Kempen, “Bonding in Mg2Si studied with x-ray photoelectron spectroscopy,” J. Phys. Chem.99(23), 9519–9522 (1995).
[CrossRef]

van de Kruijs, R. W. E.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

S. Bruijn, R. W. E. van de Kruijs, A. E. Yakshin, and F. Bijkerk, “The effect of Mo crystallinity on diffusion through the Si-on-Mo interface in EUV multilayer systems,” Defect Diffus. Forum283–286, 657–661 (2009).
[CrossRef]

van Kempen, H.

M. R. J. van Buuren, F. Voermans, and H. van Kempen, “Bonding in Mg2Si studied with x-ray photoelectron spectroscopy,” J. Phys. Chem.99(23), 9519–9522 (1995).
[CrossRef]

Vashishta, P.

P. Vashishta, R. K. Kalia, A. Nakano, and J. P. Rino, “Interaction potential for silicon carbide: A molecular dynamics study of elastic constants and vibrational density of states for crystalline and amorphous silicon carbide,” J. Appl. Phys.101(10), 103515 (2007).
[CrossRef]

Voermans, F.

M. R. J. van Buuren, F. Voermans, and H. van Kempen, “Bonding in Mg2Si studied with x-ray photoelectron spectroscopy,” J. Phys. Chem.99(23), 9519–9522 (1995).
[CrossRef]

Walton, C. C.

R. Soufli, M. Fernández-Perea, S. L. Baker, J. C. Robinson, J. Alameda, and C. C. Walton, “Spontaneously intermixed Al-Mg barriers enable corrosion-resistant Mg/SiC multilayer coatings,” Appl. Phys. Lett.101(4), 043111 (2012).
[CrossRef]

Wang, Z.

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

J. Zhu, S. Zhou, H. Li, Z. Wang, P. Jonnard, K. Le Guen, M.-H. Hu, J.-M. André, H. Zhou, and T. Huo, “Thermal stability of Mg/Co multilayer with B4C, Mo or Zr diffusion barrier layers,” Opt. Express19(22), 21849–21854 (2011).
[CrossRef] [PubMed]

J. Zhu, S. Zhou, H. Li, Q. Huang, Z. Wang, K. Le Guen, M.-H. Hu, J.-M. André, and P. Jonnard, “Comparison of Mg-based multilayers for solar He II radiation at 30.4 nm wavelength,” Appl. Opt.49(20), 3922–3925 (2010).
[CrossRef] [PubMed]

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Wertz, E.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Windt, D. L.

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Xi, X. X.

Z.-J. Liu, S. H. Zhou, X. X. Xi, and Z.-K. Liu, “Thermodynamic reactivity of the magnesium vapor with substrate materials during MgB2 deposition,” Physica C397(3-4), 87–94 (2003).
[CrossRef]

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Xu, S. Y.

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Yakshin, A. E.

S. Bruijn, R. W. E. van de Kruijs, A. E. Yakshin, and F. Bijkerk, “The effect of Mo crystallinity on diffusion through the Si-on-Mo interface in EUV multilayer systems,” Defect Diffus. Forum283–286, 657–661 (2009).
[CrossRef]

Yamazaki, A.

Yulin, S.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

Zeng, D. G.

J. Jiang, D. G. Zeng, H. Ryu, K.-W. Chung, and S. Bae, “Effects of controlling Cu spacer inter-diffusion by diffusion barriers on the magnetic and electrical stability of GMR spin-valve devices,” J. Magn. Magn. Mater.322(13), 1834–1840 (2010).
[CrossRef]

Zeng, X. H.

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Zhang, Z.

H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
[CrossRef]

Zhou, H.

Zhou, S.

Zhou, S. H.

Z.-J. Liu, S. H. Zhou, X. X. Xi, and Z.-K. Liu, “Thermodynamic reactivity of the magnesium vapor with substrate materials during MgB2 deposition,” Physica C397(3-4), 87–94 (2003).
[CrossRef]

Zhu, J.

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
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[CrossRef]

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X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Zoethout, E.

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

Zolotaryov, A. Yu.

S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
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S. Yulin, T. Feigl, T. Kuhlmann, N. Kaiser, A. I. Fedorenko, V. V. Kondratenko, O. V. Poltseva, V. A. Sevryukova, A. Yu. Zolotaryov, and E. N. Zubarev, “Interlayer transition zones in Mo/Si superlattices,” J. Appl. Phys.92(3), 1216–1220 (2002).
[CrossRef]

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M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Appl. Opt. (3)

Appl. Phys. Lett. (4)

H. Li, J. Zhu, S. Zhou, Z. Wang, H. Chen, P. Jonnard, K. Le Guen, and J.-M. André, “Zr/Mg multilayer mirror for extreme ultraviolet application and its thermal stability,” Appl. Phys. Lett.102(11), 111103 (2013).
[CrossRef]

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[CrossRef]

X. H. Zeng, A. V. Pogrebnyakov, M. H. Zhu, J. E. Jones, X. X. Xi, S. Y. Xu, E. Wertz, Q. Li, J. M. Redwing, J. Lettieri, V. Vaithyanathan, D. G. Schlom, Z.-K. Liu, O. Trithaveesak, and J. Schubert, “Superconducting MgB2 thin films on silicon carbide substrates by hybrid physical–chemical vapor deposition,” Appl. Phys. Lett.82(13), 2097–2099 (2003).
[CrossRef]

Defect Diffus. Forum (1)

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H. Maury, P. Jonnard, K. Le Guen, J.-M. André, Z. Wang, J. Zhu, J. Dong, Z. Zhang, F. Bridou, F. Delmotte, C. Hecquet, N. Mahne, A. Giglia, and S. Nannarone, “Thermal cycles, interface chemistry and optical performance of Mg/SiC multilayers,” Eur. Phys. J. B64(2), 193–199 (2008).
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Opt. Eng. (1)

M. G. Pelizzo, S. Fineschi, A. J. Corso, P. Zuppella, P. Nicolosi, J. Seely, B. Kjornrattanawanich, and D. L. Windt, “Long-term stability of Mg/SiC multilayers,” Opt. Eng.51(2), 023801 (2012).
[CrossRef]

Opt. Express (2)

Phys. Rev. B (4)

H. J. Gotsis, D. A. Papaconstantopoulos, and M. J. Mehl, “Tight-binding calculations of the band structure and total energies of the various phases of magnesium,” Phys. Rev. B65(13), 134101 (2002).
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A. Gupta, D. Kumar, and V. Phatak, “Asymmetric diffusion at the interfaces in Fe/Si multilayers,” Phys. Rev. B81(15), 155402 (2010).
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Physica C (1)

Z.-J. Liu, S. H. Zhou, X. X. Xi, and Z.-K. Liu, “Thermodynamic reactivity of the magnesium vapor with substrate materials during MgB2 deposition,” Physica C397(3-4), 87–94 (2003).
[CrossRef]

Thin Solid Films (1)

T. Tsarfati, R. W. E. van de Kruijs, E. Zoethout, E. Louis, and F. Bijkerk, “Nitridation and contrast of B4C/La interfaces and X-ray multilayer optics,” Thin Solid Films518(24), 7249–7252 (2010).
[CrossRef]

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Figures (6)

Fig. 1
Fig. 1

XRR curves of various [X1/Mg/X2]×5 multilayers. Black thick lines are for the measured curves and red thin lines are for the fitted curves.

Fig. 2
Fig. 2

Cross-section TEM microphotographs of [X/Mg/X] multilayers: (a), (d), and (g) are bright field images of [SiC/Mg/SiC], [Si/Mg/Si], and [C/Mg/C], respectively; (b), (e), and (h) are high resolution images of [SiC/Mg/SiC], [Si/Mg/Si], and [C/Mg/C], respectively; (c), (f), and (i) are dark field images and SAED patterns (insets) of [SiC/Mg/SiC], [Si/Mg/Si], and [C/Mg/C], respectively.

Fig. 3
Fig. 3

XRD spectra of the [X1/Mg/X2] multilayers. Black thick lines are for the measured curve, blue dashed lines are for the fitted background, and red thin lines are for the fitted overall profile.

Fig. 4
Fig. 4

Depth profile of atomic concentration in: (a) [SiC/Mg/SiC], (b) [Si/Mg/Si], and (c) [C/Mg/C] multilayers.

Fig. 5
Fig. 5

XPS narrow scans of (a) Mg 1s spectra, (b) Si 2p spectra, and (c) C 1s spectra. The measured data (subtracted by Shirley type background) are shown as open symbols. The fitted spectra are shown as solid lines. The dashed lines are the peaks used to fit the data if more-than-one peaks are involved.

Fig. 6
Fig. 6

Illustration of interlayer formation at: (a) Mg-on-Si, (b) Mg-on-SiC, (C) Mg-on-C, (d) Si-on-Mg, (e) SiC-on-Mg, and (f) C-on-Mg interfaces.

Tables (1)

Tables Icon

Table 1 Interlayer Thicknesses of Mg/SiC, Mg/Si, and Mg/C Interfaces Deduced from XRR, TEM and XRD

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