Abstract

The surface integrity of a potassium dihydrogen phosphate (KDP) crystal significantly affects the laser damage threshold of the material. However, the detection of the surface integrity of KDP crystals is difficult due to the material’s special properties including soft, brittle, and sensitive to external environments (e.g., humidity, temperature, and applied stress). This results in conventional characterization methods, such as transmission electron microscopy (TEM) and scanning electron microscope (SEM), which cannot be used to study the mechanisms of surface/subsurface damages of KDP crystals. This paper investigates the ultra-precision fly-cutting effect on the surface integrity of KDP crystals. To explore the fundamentals, nanoindentation was used. The results demonstrated that the elastic-plastic deformation of a KDP crystal occurs more easily on a machined surface than on a cleaved (damage-free) surface. The elastic modulus and hardness of the former surface are lower than that of the latter. Additionally, fly-cutting reduces the anisotropy of the elastic modulus and hardness. To explore the mechanisms behind such variations, a novel method to characterize subsurface damage was proposed by using the grazing incidence X-ray diffraction (GIXD) technique. It was identified that the damages induced by fly-cutting are dislocations and lattice misalignments.

© 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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References

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    [Crossref]
  2. D. Eimerl, “Electro-optic, linear, and nonlinear optical properties of KDP and its isomorphs,” Ferroelectrics 72(1), 95–139 (1987).
    [Crossref]
  3. N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
    [Crossref]
  4. G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
    [Crossref]
  5. G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
    [Crossref]
  6. V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
    [Crossref]
  7. N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
    [Crossref]
  8. G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
    [Crossref]
  9. N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
    [Crossref]
  10. T. Fang and J. C. Lambropoulos, “Microhardness and indentation fracture of potassium dihydrogen phosphate (KDP),” J. Am. Ceram. Soc. 85(1), 174–178 (2004).
    [Crossref]
  11. C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
    [Crossref]
  12. G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
    [Crossref]
  13. S. O. Kucheyev, W. J. Siekhaus, T. A. Land, and S. G. Demos, “Mechanical response of KD2xH2(1-x)PO4 crystals during nanoindentation,” Appl. Phys. Lett. 84(13), 2274–2276 (2004).
    [Crossref]
  14. S. Anbukumar, S. Vasudevan, and P. Ramasamy, “Microhardness studies of ADP type crystals,” J. Mater. Sci. Lett. 5(2), 223–224 (1986).
    [Crossref]
  15. D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on the influence of the KDP crystal anisotropy on scratch characteristics,” IEEJ Trans. PE 132(6), 568–572 (2012).
    [Crossref]
  16. X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).
  17. L. C. G. H. W. Ben, G. D. T. X. K. Renke, and W. U. Dongjiang, “Experimental study of single-tip scratching on potassium dihydrogen phosphate single crystal,” J. Mech. Eng. 46(13), 179 (2010).
    [Crossref]
  18. D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on micro scale mechanics behavior of potassium dihydrogen phosphate crystal,” J. Mech. Eng. 49(07), 148–153 (2013).
    [Crossref]
  19. Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
    [Crossref]
  20. Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
    [Crossref]
  21. Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
    [Crossref]
  22. W. Cai and A. Katrusiak, “Structure of the high-pressure phase IV of KH2PO4 (KDP),” Dalton Trans. 42(4), 863–866 (2013).
    [Crossref]
  23. Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
    [Crossref]
  24. M. Miller, C. Bobko, M. Vandamm, and F. J. Ulm, “Surface roughness criteria for cement paste nanoindentation,” Cem. Concr. Res. 38(4), 467–476 (2008).
    [Crossref]
  25. Y. Zhang, N. Hou, and L. C. Zhang, “Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting,” Adv. Manuf. 7(3), 270–277 (2019).
    [Crossref]
  26. Y. Kobayashi, S. Endo, L. C. Ming, and T. Kikegawa, “Phase transitions and amorphization in KD2PO4 and KH2PO4 under high pressure,” Phys. Rev. B 65(13), 132105 (2002).
    [Crossref]
  27. Y. Zhang, N. Hou, and L. C. Zhang, “Investigation into the room temperature creep-deformation of potassium dihydrogen phosphate crystals using nanoindentation,” Adv. Manuf. 6(4), 376–383 (2018).
    [Crossref]
  28. P. Rajesh, A. Silambarasan, and P. Ramasamy, “Effect of crystal violet dye on the optical, dielectric, thermal and mechanical properties of <001> directed KDP single crystal,” Mater. Res. Bull. 49, 640–644 (2014).
    [Crossref]
  29. N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
    [Crossref]
  30. N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
    [Crossref]
  31. N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
    [Crossref]
  32. C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
    [Crossref]
  33. C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
    [Crossref]
  34. C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
    [Crossref]

2020 (1)

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

2019 (4)

C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
[Crossref]

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Y. Zhang, N. Hou, and L. C. Zhang, “Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting,” Adv. Manuf. 7(3), 270–277 (2019).
[Crossref]

N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
[Crossref]

2018 (2)

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

Y. Zhang, N. Hou, and L. C. Zhang, “Investigation into the room temperature creep-deformation of potassium dihydrogen phosphate crystals using nanoindentation,” Adv. Manuf. 6(4), 376–383 (2018).
[Crossref]

2017 (4)

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

2016 (2)

N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
[Crossref]

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

2015 (1)

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

2014 (1)

P. Rajesh, A. Silambarasan, and P. Ramasamy, “Effect of crystal violet dye on the optical, dielectric, thermal and mechanical properties of <001> directed KDP single crystal,” Mater. Res. Bull. 49, 640–644 (2014).
[Crossref]

2013 (4)

W. Cai and A. Katrusiak, “Structure of the high-pressure phase IV of KH2PO4 (KDP),” Dalton Trans. 42(4), 863–866 (2013).
[Crossref]

G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
[Crossref]

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on micro scale mechanics behavior of potassium dihydrogen phosphate crystal,” J. Mech. Eng. 49(07), 148–153 (2013).
[Crossref]

2012 (1)

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on the influence of the KDP crystal anisotropy on scratch characteristics,” IEEJ Trans. PE 132(6), 568–572 (2012).
[Crossref]

2010 (2)

L. C. G. H. W. Ben, G. D. T. X. K. Renke, and W. U. Dongjiang, “Experimental study of single-tip scratching on potassium dihydrogen phosphate single crystal,” J. Mech. Eng. 46(13), 179 (2010).
[Crossref]

C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
[Crossref]

2008 (2)

X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).

M. Miller, C. Bobko, M. Vandamm, and F. J. Ulm, “Surface roughness criteria for cement paste nanoindentation,” Cem. Concr. Res. 38(4), 467–476 (2008).
[Crossref]

2004 (2)

S. O. Kucheyev, W. J. Siekhaus, T. A. Land, and S. G. Demos, “Mechanical response of KD2xH2(1-x)PO4 crystals during nanoindentation,” Appl. Phys. Lett. 84(13), 2274–2276 (2004).
[Crossref]

T. Fang and J. C. Lambropoulos, “Microhardness and indentation fracture of potassium dihydrogen phosphate (KDP),” J. Am. Ceram. Soc. 85(1), 174–178 (2004).
[Crossref]

2002 (2)

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2PO4 crystals for the world's most power laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

Y. Kobayashi, S. Endo, L. C. Ming, and T. Kikegawa, “Phase transitions and amorphization in KD2PO4 and KH2PO4 under high pressure,” Phys. Rev. B 65(13), 132105 (2002).
[Crossref]

2001 (1)

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

2000 (1)

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

1997 (1)

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

1996 (1)

V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
[Crossref]

1987 (1)

D. Eimerl, “Electro-optic, linear, and nonlinear optical properties of KDP and its isomorphs,” Ferroelectrics 72(1), 95–139 (1987).
[Crossref]

1986 (1)

S. Anbukumar, S. Vasudevan, and P. Ramasamy, “Microhardness studies of ADP type crystals,” J. Mater. Sci. Lett. 5(2), 223–224 (1986).
[Crossref]

An, C.

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

Anbukumar, S.

S. Anbukumar, S. Vasudevan, and P. Ramasamy, “Microhardness studies of ADP type crystals,” J. Mater. Sci. Lett. 5(2), 223–224 (1986).
[Crossref]

Atherton, L. J.

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

Atroschenko, L. V.

V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
[Crossref]

Ben, L. C. G. H. W.

L. C. G. H. W. Ben, G. D. T. X. K. Renke, and W. U. Dongjiang, “Experimental study of single-tip scratching on potassium dihydrogen phosphate single crystal,” J. Mech. Eng. 46(13), 179 (2010).
[Crossref]

Bobko, C.

M. Miller, C. Bobko, M. Vandamm, and F. J. Ulm, “Surface roughness criteria for cement paste nanoindentation,” Cem. Concr. Res. 38(4), 467–476 (2008).
[Crossref]

Burnham, A. K.

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2PO4 crystals for the world's most power laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

Cai, W.

W. Cai and A. Katrusiak, “Structure of the high-pressure phase IV of KH2PO4 (KDP),” Dalton Trans. 42(4), 863–866 (2013).
[Crossref]

Cao, X. S.

X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).

Chen, F.

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

Chen, G.

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

Chen, M.

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

Chen, N.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

Chen, S.

G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
[Crossref]

Chen, W.

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

Dai, Y.

G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
[Crossref]

De Yoreo, J. J.

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2PO4 crystals for the world's most power laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

DeHaven, M. R.

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

Demos, S. G.

S. O. Kucheyev, W. J. Siekhaus, T. A. Land, and S. G. Demos, “Mechanical response of KD2xH2(1-x)PO4 crystals during nanoindentation,” Appl. Phys. Lett. 84(13), 2274–2276 (2004).
[Crossref]

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

Dongjiang, W. U.

L. C. G. H. W. Ben, G. D. T. X. K. Renke, and W. U. Dongjiang, “Experimental study of single-tip scratching on potassium dihydrogen phosphate single crystal,” J. Mech. Eng. 46(13), 179 (2010).
[Crossref]

Dongming, G.

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

Eimerl, D.

D. Eimerl, “Electro-optic, linear, and nonlinear optical properties of KDP and its isomorphs,” Ferroelectrics 72(1), 95–139 (1987).
[Crossref]

Endo, S.

Y. Kobayashi, S. Endo, L. C. Ming, and T. Kikegawa, “Phase transitions and amorphization in KD2PO4 and KH2PO4 under high pressure,” Phys. Rev. B 65(13), 132105 (2002).
[Crossref]

Fang, T.

T. Fang and J. C. Lambropoulos, “Microhardness and indentation fracture of potassium dihydrogen phosphate (KDP),” J. Am. Ceram. Soc. 85(1), 174–178 (2004).
[Crossref]

Feng, P. F.

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on micro scale mechanics behavior of potassium dihydrogen phosphate crystal,” J. Mech. Eng. 49(07), 148–153 (2013).
[Crossref]

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on the influence of the KDP crystal anisotropy on scratch characteristics,” IEEJ Trans. PE 132(6), 568–572 (2012).
[Crossref]

Fu, Y. J.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Gao, H.

C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
[Crossref]

X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).

Gao, Z. S.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Garnov, S. V.

V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
[Crossref]

Guan, C.

G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
[Crossref]

Hang, G.

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

He, N.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Hou, N.

Y. Zhang, N. Hou, and L. C. Zhang, “Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting,” Adv. Manuf. 7(3), 270–277 (2019).
[Crossref]

N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
[Crossref]

Y. Zhang, N. Hou, and L. C. Zhang, “Investigation into the room temperature creep-deformation of potassium dihydrogen phosphate crystals using nanoindentation,” Adv. Manuf. 6(4), 376–383 (2018).
[Crossref]

N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
[Crossref]

Huang, H.

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
[Crossref]

Kang, R. K.

X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).

Katrusiak, A.

W. Cai and A. Katrusiak, “Structure of the high-pressure phase IV of KH2PO4 (KDP),” Dalton Trans. 42(4), 863–866 (2013).
[Crossref]

Khodeyeva, N. V.

V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
[Crossref]

Kikegawa, T.

Y. Kobayashi, S. Endo, L. C. Ming, and T. Kikegawa, “Phase transitions and amorphization in KD2PO4 and KH2PO4 under high pressure,” Phys. Rev. B 65(13), 132105 (2002).
[Crossref]

Kioussis, N.

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

Kobayashi, Y.

Y. Kobayashi, S. Endo, L. C. Ming, and T. Kikegawa, “Phase transitions and amorphization in KD2PO4 and KH2PO4 under high pressure,” Phys. Rev. B 65(13), 132105 (2002).
[Crossref]

Kucheyev, S. O.

S. O. Kucheyev, W. J. Siekhaus, T. A. Land, and S. G. Demos, “Mechanical response of KD2xH2(1-x)PO4 crystals during nanoindentation,” Appl. Phys. Lett. 84(13), 2274–2276 (2004).
[Crossref]

Lambropoulos, J. C.

T. Fang and J. C. Lambropoulos, “Microhardness and indentation fracture of potassium dihydrogen phosphate (KDP),” J. Am. Ceram. Soc. 85(1), 174–178 (2004).
[Crossref]

Land, T. A.

S. O. Kucheyev, W. J. Siekhaus, T. A. Land, and S. G. Demos, “Mechanical response of KD2xH2(1-x)PO4 crystals during nanoindentation,” Appl. Phys. Lett. 84(13), 2274–2276 (2004).
[Crossref]

Li, C.

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
[Crossref]

C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

Li, L.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Li, X.

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
[Crossref]

Li, Y. P.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Liu, M.

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

Liu, W.

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

Liu, W. D.

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

Lu, C.

C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
[Crossref]

Ma, L.

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

Meng, B.

C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

Miller, M.

M. Miller, C. Bobko, M. Vandamm, and F. J. Ulm, “Surface roughness criteria for cement paste nanoindentation,” Cem. Concr. Res. 38(4), 467–476 (2008).
[Crossref]

Ming, L. C.

Y. Kobayashi, S. Endo, L. C. Ming, and T. Kikegawa, “Phase transitions and amorphization in KD2PO4 and KH2PO4 under high pressure,” Phys. Rev. B 65(13), 132105 (2002).
[Crossref]

Montgomery, K. E.

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

Mylvaganam, K.

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

Pei, X.

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

Qian, J.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

Radousky, H. B.

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

Rajesh, P.

P. Rajesh, A. Silambarasan, and P. Ramasamy, “Effect of crystal violet dye on the optical, dielectric, thermal and mechanical properties of <001> directed KDP single crystal,” Mater. Res. Bull. 49, 640–644 (2014).
[Crossref]

Ramasamy, P.

P. Rajesh, A. Silambarasan, and P. Ramasamy, “Effect of crystal violet dye on the optical, dielectric, thermal and mechanical properties of <001> directed KDP single crystal,” Mater. Res. Bull. 49, 640–644 (2014).
[Crossref]

S. Anbukumar, S. Vasudevan, and P. Ramasamy, “Microhardness studies of ADP type crystals,” J. Mater. Sci. Lett. 5(2), 223–224 (1986).
[Crossref]

Rao, X.

C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

Renke, G. D. T. X. K.

L. C. G. H. W. Ben, G. D. T. X. K. Renke, and W. U. Dongjiang, “Experimental study of single-tip scratching on potassium dihydrogen phosphate single crystal,” J. Mech. Eng. 46(13), 179 (2010).
[Crossref]

Reynaerts, D.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

Richardson, M.

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

Salo, V. I.

V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
[Crossref]

Siekhaus, W. J.

S. O. Kucheyev, W. J. Siekhaus, T. A. Land, and S. G. Demos, “Mechanical response of KD2xH2(1-x)PO4 crystals during nanoindentation,” Appl. Phys. Lett. 84(13), 2274–2276 (2004).
[Crossref]

Silambarasan, A.

P. Rajesh, A. Silambarasan, and P. Ramasamy, “Effect of crystal violet dye on the optical, dielectric, thermal and mechanical properties of <001> directed KDP single crystal,” Mater. Res. Bull. 49, 640–644 (2014).
[Crossref]

Song, B.

G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
[Crossref]

Su, H.

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

Sun, X.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Sun, Y.

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

Sun, Z.

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

Teng, X.

C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
[Crossref]

Tie, G.

G. Tie, Y. Dai, C. Guan, S. Chen, and B. Song, “Research on subsurface defects of potassium dihydrogen phosphate crystals fabricated by single point diamond turning technique,” Opt. Eng. 52(3), 033401 (2013).
[Crossref]

Ulm, F. J.

M. Miller, C. Bobko, M. Vandamm, and F. J. Ulm, “Surface roughness criteria for cement paste nanoindentation,” Cem. Concr. Res. 38(4), 467–476 (2008).
[Crossref]

Vandamm, M.

M. Miller, C. Bobko, M. Vandamm, and F. J. Ulm, “Surface roughness criteria for cement paste nanoindentation,” Cem. Concr. Res. 38(4), 467–476 (2008).
[Crossref]

Vasudevan, S.

S. Anbukumar, S. Vasudevan, and P. Ramasamy, “Microhardness studies of ADP type crystals,” J. Mater. Sci. Lett. 5(2), 223–224 (1986).
[Crossref]

Vital, R. L.

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

Wang, B.

C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
[Crossref]

X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).

Wang, D.

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on micro scale mechanics behavior of potassium dihydrogen phosphate crystal,” J. Mech. Eng. 49(07), 148–153 (2013).
[Crossref]

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on the influence of the KDP crystal anisotropy on scratch characteristics,” IEEJ Trans. PE 132(6), 568–572 (2012).
[Crossref]

Wang, J.

C. Lu, H. Gao, J. Wang, X. Teng, and B. Wang, “Mechanical properties of potassium dihydrogen phosphate single crystal by the nanoindentation technique,” Mater. Manuf. Processes 25(8), 740–748 (2010).
[Crossref]

Wang, J. Y.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Wang, S. L.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Whitman, P. K.

J. J. De Yoreo, A. K. Burnham, and P. K. Whitman, “Developing KH2PO4 and KD2PO4 crystals for the world's most power laser,” Int. Mater. Rev. 47(3), 113–152 (2002).
[Crossref]

Wu, C.

N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
[Crossref]

N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
[Crossref]

Wu, D. J.

X. S. Cao, D. J. Wu, B. Wang, H. Gao, and R. K. Kang, “Analysis on mechanical property of anisotropy of KDP crystal,” J. Synth. Cryst. 37, 704–709 (2008).

Wu, J.

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
[Crossref]

Wu, Y.

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
[Crossref]

Xianzhao, T.

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

Xiaoguang, G.

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

Xiaoji, T.

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

Xiaoji, Z.

G. Xiaoguang, Z. Xiaoji, T. Xianzhao, G. Dongming, G. Hang, and T. Xiaoji, “Nanoindentation on the doubler plane of KDP single crystal,” J. Semicond. 34(3), 034001 (2013).
[Crossref]

Zaitseva, N. P.

N. P. Zaitseva, J. J. De Yoreo, M. R. DeHaven, R. L. Vital, K. E. Montgomery, M. Richardson, and L. J. Atherton, “Rapid growth of large-scale (40–55cm) KH2PO4 crystals,” J. Cryst. Growth 180(2), 255–262 (1997).
[Crossref]

Zeng, H.

Y. J. Fu, Z. S. Gao, X. Sun, S. L. Wang, Y. P. Li, H. Zeng, and J. Y. Wang, “Effects of anions on rapid growth and growth habit of KDP crystals,” Prog. Cryst. Growth Charact. Mater. 40(1-4), 211–220 (2000).
[Crossref]

Zhang, C. L.

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on micro scale mechanics behavior of potassium dihydrogen phosphate crystal,” J. Mech. Eng. 49(07), 148–153 (2013).
[Crossref]

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on the influence of the KDP crystal anisotropy on scratch characteristics,” IEEJ Trans. PE 132(6), 568–572 (2012).
[Crossref]

Zhang, F.

C. Li, Y. Wu, X. Li, L. Ma, F. Zhang, and H. Huang, “Deformation characteristics and surface generation modelling of crack-free grinding of GGG single crystals,” J. Mater. Process. Technol. 279, 116577 (2020).
[Crossref]

N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
[Crossref]

C. Li, X. Li, Y. Wu, F. Zhang, and H. Huang, “Deformation mechanism and force modelling of the grinding of YAG single crystals,” Int. J. Mach. Tool Manu. 143, 23–37 (2019).
[Crossref]

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
[Crossref]

C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
[Crossref]

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

Zhang, F. H.

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

Zhang, J. F.

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on micro scale mechanics behavior of potassium dihydrogen phosphate crystal,” J. Mech. Eng. 49(07), 148–153 (2013).
[Crossref]

D. Wang, P. F. Feng, C. L. Zhang, and J. F. Zhang, “Experimental research on the influence of the KDP crystal anisotropy on scratch characteristics,” IEEJ Trans. PE 132(6), 568–572 (2012).
[Crossref]

Zhang, L.

N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
[Crossref]

N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
[Crossref]

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

Zhang, L. C.

Y. Zhang, N. Hou, and L. C. Zhang, “Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting,” Adv. Manuf. 7(3), 270–277 (2019).
[Crossref]

Y. Zhang, N. Hou, and L. C. Zhang, “Investigation into the room temperature creep-deformation of potassium dihydrogen phosphate crystals using nanoindentation,” Adv. Manuf. 6(4), 376–383 (2018).
[Crossref]

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

Zhang, Q.

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

Zhang, Y.

Y. Zhang, N. Hou, and L. C. Zhang, “Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting,” Adv. Manuf. 7(3), 270–277 (2019).
[Crossref]

N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
[Crossref]

Y. Zhang, N. Hou, and L. C. Zhang, “Investigation into the room temperature creep-deformation of potassium dihydrogen phosphate crystals using nanoindentation,” Adv. Manuf. 6(4), 376–383 (2018).
[Crossref]

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
[Crossref]

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

Zhou, Y.

C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

Adv. Manuf. (2)

Y. Zhang, N. Hou, and L. C. Zhang, “Understanding the formation mechanism of subsurface damage in potassium dihydrogen phosphate crystals during ultra-precision fly cutting,” Adv. Manuf. 7(3), 270–277 (2019).
[Crossref]

Y. Zhang, N. Hou, and L. C. Zhang, “Investigation into the room temperature creep-deformation of potassium dihydrogen phosphate crystals using nanoindentation,” Adv. Manuf. 6(4), 376–383 (2018).
[Crossref]

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N. Hou, L. Zhang, Y. Zhang, and F. Zhang, “On the Ultra-Precision Fabrication of Damage-Free Optical KDP Components: Mechanisms and Problems,” Crit. Rev. Solid State Mater. Sci. 44(4), 283–297 (2019).
[Crossref]

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W. Cai and A. Katrusiak, “Structure of the high-pressure phase IV of KH2PO4 (KDP),” Dalton Trans. 42(4), 863–866 (2013).
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[Crossref]

Int. J. Adv. Manuf. Technol. (1)

G. Chen, Y. Sun, F. Zhang, C. An, W. Chen, and H. Su, “Influence of ultra-precision flycutting spindle error on surface frequency domain error formation,” Int. J. Adv. Manuf. Technol. 88(9-12), 3233–3241 (2017).
[Crossref]

Int. J. Mach. Tool Manu. (1)

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Int. J. Mech. Sci. (2)

N. Chen, L. Li, J. Wu, J. Qian, N. He, and D. Reynaerts, “Research on the ploughing force in micro milling of soft-brittle crystals,” Int. J. Mech. Sci. 155, 315–322 (2019).
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N. Chen, M. Chen, C. Wu, X. Pei, J. Qian, and D. Reynaerts, “Research in minimum undeformed chip thickness and size effect in micro end-milling of potassium dihydrogen phosphate crystal,” Int. J. Mech. Sci. 134, 387–398 (2017).
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[Crossref]

J. Mater. Res. (1)

Y. Zhang, L. C. Zhang, M. Liu, F. H. Zhang, K. Mylvaganam, and W. D. Liu, “Revealing the Mechanical Properties of KDP Crystals by Nanoindentation,” J. Mater. Res. 31(8), 1056–1064 (2016).
[Crossref]

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C. Li, F. Zhang, B. Meng, X. Rao, and Y. Zhou, “Research of material removal and deformation mechanism for single crystal GGG (Gd3Ga5O12) based on varied-depth nanoscratch testing,” Mater. Des. 125, 180–188 (2017).
[Crossref]

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Opt. Eng. (1)

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[Crossref]

Q. Zhang, F. Chen, N. Kioussis, S. G. Demos, and H. B. Radousky, “Ab initio study of the electronic and structural properties of the ferroelectric transition in KH2PO4,” Phys. Rev. B 65(2), 024108 (2001).
[Crossref]

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N. Chen, M. Chen, C. Wu, and X. Pei, “Cutting surface quality analysis in micro ball end-milling of KDP crystal considering size effect and minimum undeformed chip thickness,” Precis. Eng. 50, 410–420 (2017).
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Proc. Inst. Mech. Eng., Part B (1)

G. Chen, Y. Sun, C. An, F. Zhang, Z. Sun, and W. Chen, “Measurement and analysis for frequency domain error of ultra-precision spindle in a flycutting machine tool,” Proc. Inst. Mech. Eng., Part B 232(9), 1501–1507 (2018).
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V. I. Salo, L. V. Atroschenko, S. V. Garnov, and N. V. Khodeyeva, “Structure, impurity composition, and laser damage threshold of the subsurface layers in KDP and KD*P single crystals,” Proc. SPIE 2714, 197–201 (1996).
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Scr. Mater. (1)

N. Hou, Y. Zhang, L. Zhang, and F. Zhang, “Assessing microstructure changes in potassium dihydrogen phosphate crystals induced by mechanical stresses,” Scr. Mater. 113, 48–50 (2016).
[Crossref]

Wear (1)

Y. Zhang, L. Zhang, M. Liu, F. Zhang, K. Mylvaganam, and W. Liu, “Understanding the friction and wear of KDP crystals by nanoscratching,” Wear 332-333, 900–906 (2015).
[Crossref]

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Figures (11)

Fig. 1.
Fig. 1. XRD analysis of a KDP crystal sample.
Fig. 2.
Fig. 2. Schematic of fly-cutting process.
Fig. 3.
Fig. 3. Schematic for measuring the anisotropy of mechanical properties.
Fig. 4.
Fig. 4. Surface morphologies after ultra-precision fly-cutting of KDP crystals. (a) Depth of cut of 3 µm and feed rate of 60 µm/s; (b) Depth of cut of 5 µm and feed rate of 60 µm/s.
Fig. 5.
Fig. 5. Load-displacement curves for machined and cleaved surfaces. (a) Depth of cut of 3 µm and feed rate of 60 µm/s; (b) Depth of cut of 5 µm and feed rate of 60 µm/s.
Fig. 6.
Fig. 6. Size effects of elastic modulus and hardness on machined surfaces under various depths of cut. (a) Elastic modulus; (b) Hardness.
Fig. 7.
Fig. 7. Size effects of elastic modulus and hardness on the machined surfaces under various feed rates. (a) Elastic modulus; (b) Hardness.
Fig. 8.
Fig. 8. Anisotropy of elastic modulus and hardness for machined surfaces under various depths of cut. (a) Elastic modulus; (b) Hardness.
Fig. 9.
Fig. 9. Anisotropy of elastic modulus and hardness for machined surfaces under various feed rates. (a) Elastic modulus; (b) Hardness.
Fig. 10.
Fig. 10. GIXD analyses of the machined surface/subsurfaces of KDP crystals. (a) Depth of cut of 3 µm and feed rate of 60 µm/s; (b) Depth of cut of 5 µm and feed rate of 60 µm/s.
Fig. 11.
Fig. 11. Schematic of subsurface damage of KDP crystals.

Tables (1)

Tables Icon

Table 1. Experimental design.