Abstract

We demonstrate a highly tolerant and highly reflective broadband a-Si distributed Bragg reflector fabricated by oblique angle deposition. By tuning the refractive index of an a-Si film, a high index contrast material system was achieved. The highly tolerant and broadband reflective characteristics of the a-Si distributed Bragg reflector were investigated by calculation and fabrication. A broad stop band (Δλ/λ = 33.7%, R>99%) with only a five-pair a-Si distributed Bragg reflector was achieved experimentally. The size-, feature- and substrate-independent method for highly reflective Bragg reflectors was realized by simple oblique angle evaporation.

© 2011 OSA

PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
    [CrossRef]
  2. L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
    [CrossRef]
  3. M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
    [CrossRef] [PubMed]
  4. S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
    [CrossRef] [PubMed]
  5. J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
    [CrossRef]
  6. D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
    [CrossRef]
  7. E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
    [CrossRef]
  8. Y. H. Lin, C. L. Wu, Y. H. Pai, and G. R. Lin, “A 533-nm self-luminescent Si-rich SiNx/SiOx distributed Bragg reflector,” Opt. Express 19(7), 6563–6570 (2011).
    [CrossRef] [PubMed]
  9. G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
    [CrossRef]
  10. C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995).
    [CrossRef]
  11. M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008).
    [CrossRef] [PubMed]
  12. J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).
  13. J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
    [CrossRef]
  14. M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
    [CrossRef]
  15. M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006).
    [CrossRef]
  16. Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
    [CrossRef]
  17. K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997).
    [CrossRef]
  18. S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010).
    [CrossRef]
  19. O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000).
    [CrossRef]
  20. J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
    [CrossRef]
  21. Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
    [CrossRef] [PubMed]
  22. S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
    [CrossRef]
  23. J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
    [CrossRef]
  24. S. J. Jang, Y. M. Song, J. S. Yu, C. I. Yeo, and Y. T. Lee, “Antireflective properties of porous Si nanocolumnar structures with graded refractive index layers,” Opt. Lett. 36(2), 253–255 (2011).
    [CrossRef] [PubMed]
  25. S. J. Jang, Y. M. Song, C. I. Yeo, C. Y. Park, J. S. Yu, and Y. T. Lee, “Antireflective property of thin film a-Si solar cell structures with graded refractive index structure,” Opt. Express 19(S2Suppl 2), A108–A117 (2011).
    [CrossRef] [PubMed]
  26. C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
    [CrossRef]
  27. L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
    [CrossRef]
  28. O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
    [CrossRef]

2011 (3)

2010 (2)

Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
[CrossRef] [PubMed]

S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010).
[CrossRef]

2008 (5)

S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
[CrossRef]

J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
[CrossRef]

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008).
[CrossRef] [PubMed]

2007 (3)

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
[CrossRef]

2006 (4)

M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006).
[CrossRef]

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

2005 (1)

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

2004 (2)

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
[CrossRef] [PubMed]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

2002 (1)

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

2000 (1)

O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000).
[CrossRef]

1999 (1)

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

1997 (1)

K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997).
[CrossRef]

1995 (2)

C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995).
[CrossRef]

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

1993 (2)

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
[CrossRef]

Alamariu, B. A.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Bermel, P.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Bisi, O.

O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000).
[CrossRef]

Blum, O.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Bonnet-Gamard, J.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Boucart, J.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Bouche, N.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Brett, M. J.

M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008).
[CrossRef] [PubMed]

M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006).
[CrossRef]

K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997).
[CrossRef]

Brillouet, F.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Broderick, K. A.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Carpentier, D.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Chang-hasnain, C. J.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Chen, L.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Chen, M.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Chhajed, S.

S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
[CrossRef]

Cho, J.

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Choi, H. J.

S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010).
[CrossRef]

Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Design of highly transparent glasses with broadband antireflective subwavelength structures,” Opt. Express 18(12), 13063–13071 (2010).
[CrossRef] [PubMed]

Collins, A.

J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
[CrossRef]

Dawson, L. R.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Derouin, E.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Drummond, T. J.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Duan, X.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Erchak, A. A.

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Fan, J.

J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
[CrossRef]

Feng, N.

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Fortin, C.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Fritz, I. J.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Fu, J.

J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
[CrossRef]

Gaborit, F.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Gessmann, T.

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Goldstein, L.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Gopinath, J. T.

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
[CrossRef] [PubMed]

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Harris, T. D.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Hawkeye, M. M.

M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008).
[CrossRef] [PubMed]

M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006).
[CrossRef]

Headley, T. J.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Hong, C.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Howard, A. J.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Huang, M. C. Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Hunt, N. E. J.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Hwangbo, C. K.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Ippen, E. P.

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
[CrossRef] [PubMed]

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Jacobson, D. C.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Jacquet, J.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Jang, S. J.

Joannopoulos, J.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

Jones, R. J.

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

Karabacak, T.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Kartner, F. X.

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Kärtner, F. X.

Kim, C. M.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Kim, E. H.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Kim, J. K.

S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
[CrossRef]

M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
[CrossRef]

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Kim, T. G.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Kimerling, L. C.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Klem, J. F.

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

Kolodziejski, L. A.

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
[CrossRef] [PubMed]

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Lee, B. G.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Lee, Y. P.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Lee, Y. T.

Lin, G. R.

Lin, S. Y.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Lin, Y. H.

Liu, D.-L.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Liu, J.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Liu, W.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Lu, T.-M.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Luo, H.

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Mateus, C. F. R.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Mazzoleni, C.

C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995).
[CrossRef]

Moll, K. D.

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

Ossicini, S.

O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000).
[CrossRef]

Pai, Y. H.

Park, C. Y.

Park, Y.

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Park, Y. J.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Pavesi, L.

O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000).
[CrossRef]

C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995).
[CrossRef]

Petrich, G. S.

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
[CrossRef] [PubMed]

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Picu, C.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Piel, J. P.

G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
[CrossRef]

Plais, A.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Poate, J. M.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Remy, J. C.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Ripin, D. J.

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Robbie, K.

K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997).
[CrossRef]

Safdi, B.

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

Salet, P.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Schubert, E. F.

S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
[CrossRef]

M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
[CrossRef]

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Schubert, M. F.

S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
[CrossRef]

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
[CrossRef]

Shen, H. M.

S. N. Tandon, J. T. Gopinath, H. M. Shen, G. S. Petrich, L. A. Kolodziejski, F. X. Kärtner, and E. P. Ippen, “Large-area broadband saturable Bragg reflectors by use of oxidized AlAs,” Opt. Lett. 29(21), 2551–2553 (2004).
[CrossRef] [PubMed]

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Shin, Y. C.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Singh, J. P.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Smart, J. A.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Sobahan, K. M. A.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Sone, C.

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Song, Y. M.

Starck, C.

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

Stehle, J. L.

G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
[CrossRef]

Suzuki, Y.

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

Tandon, S. N.

Thomas, O.

G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
[CrossRef]

Thorpe, M. J.

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

Vredenberg, A. M.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Wang, G.-C.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Wong, Y. H.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Wu, C. L.

Xi, J. Q.

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
[CrossRef]

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

Ye, D.-X.

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Ye, J.

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

Yeo, C. I.

Yi, Y.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Yu, J. S.

Zalczer, G.

G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
[CrossRef]

Zeng, L.

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

Zhao, Y.

J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
[CrossRef]

Zhong, Y.

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

Zhou, Y.

M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

Zydzik, G. J.

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

Appl. Phys. Lett. (8)

L. Zeng, P. Bermel, Y. Yi, B. A. Alamariu, K. A. Broderick, J. Liu, C. Hong, X. Duan, J. Joannopoulos, and L. C. Kimerling, “Demonstration of enhanced absorption in thin film Si solar cells with textured photonic crystal back reflector,” Appl. Phys. Lett. 93(22), 221105 (2008).
[CrossRef]

E. F. Schubert, N. E. J. Hunt, A. M. Vredenberg, T. D. Harris, J. M. Poate, D. C. Jacobson, Y. H. Wong, and G. J. Zydzik, “Enhanced photoluminescence by resonant absorption in Er-doped SiO2/Si microcavities,” Appl. Phys. Lett. 63(19), 2603–2605 (1993).
[CrossRef]

C. Mazzoleni and L. Pavesi, “Application to optical components of dielectric porous silicon multilayers,” Appl. Phys. Lett. 67(20), 2983–2985 (1995).
[CrossRef]

J. K. Kim, T. Gessmann, E. F. Schubert, J. Q. Xi, H. Luo, J. Cho, C. Sone, and Y. Park, “GaInN light-emitting diode with conductive omnidirectional reflector having a low-refractive-index indium-tin oxide layer,” Appl. Phys. Lett. 88(1), 013501 (2006).
[CrossRef]

M. F. Schubert, J. Q. Xi, J. K. Kim, and E. F. Schubert, “Distributed Bragg reflector consisting of high- and low-refractive-index thin film layers made of the same material,” Appl. Phys. Lett. 90(14), 141115 (2007).
[CrossRef]

S. Chhajed, M. F. Schubert, J. K. Kim, and E. F. Schubert, “Nanostructured multilayer graded-index antireflection coating for Si solar cells with broadband and omnidirectional characteristics,” Appl. Phys. Lett. 93(25), 251108 (2008).
[CrossRef]

L. Zeng, Y. Yi, C. Hong, J. Liu, N. Feng, X. Duan, L. C. Kimerling, and B. A. Alamariu, “Efficiency enhancement in Si solar cells by textured photonic crystal back reflector,” Appl. Phys. Lett. 89(11), 111111 (2006).
[CrossRef]

O. Blum, I. J. Fritz, L. R. Dawson, A. J. Howard, T. J. Headley, J. F. Klem, and T. J. Drummond, “Highly reflective, long wavelength AlAsSb/GaAsSb distributed Bragg reflector grown by molecular beam epitaxy on InP substrate,” Appl. Phys. Lett. 66(3), 329–331 (1995).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

J. Boucart, C. Starck, F. Gaborit, A. Plais, N. Bouche, E. Derouin, J. C. Remy, J. Bonnet-Gamard, L. Goldstein, C. Fortin, D. Carpentier, P. Salet, F. Brillouet, and J. Jacquet, “Metamorphic DBR and tunnel-junction injection: A CW RT monolithic long-wavelength VCSEL,” IEEE J. Sel. Top. Quantum Electron. 5(3), 520–529 (1999).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

C. F. R. Mateus, M. C. Y. Huang, L. Chen, C. J. Chang-Hasnain, and Y. Suzuki, “Broad-band mirror (1.12-1.62 µm) using a subwavelength grating,” IEEE Photon. Technol. Lett. 16(7), 1676–1678 (2004).
[CrossRef]

J. Appl. Phys. (1)

M. M. Hawkeye and M. J. Brett, “Narrow bandpass optical filters fabricated with one-dimensionally periodic inhomogeneous thin films,” J. Appl. Phys. 100(4), 044322 (2006).
[CrossRef]

J. Mater. Res. (1)

Y. Zhong, Y. C. Shin, C. M. Kim, B. G. Lee, E. H. Kim, Y. J. Park, K. M. A. Sobahan, C. K. Hwangbo, Y. P. Lee, and T. G. Kim, “Optical and electrical properties of indium tin oxide thin films with tilted and spiral microstructures prepared by oblique angle deposition,” J. Mater. Res. 23(09), 2500–2505 (2008).
[CrossRef]

J. Vac. Sci. Technol. A (1)

K. Robbie and M. J. Brett, “Sculptured thin films and glancing angle deposition: Growth mechanics and applications,” J. Vac. Sci. Technol. A 15(3), 1460–1465 (1997).
[CrossRef]

J. Vac. Sci. Technol. B (1)

J. P. Singh, T. Karabacak, D.-X. Ye, D.-L. Liu, C. Picu, T.-M. Lu, and G.-C. Wang, “Physical properties of nanostructures grown by oblique angle deposition,” J. Vac. Sci. Technol. B 23(5), 2114–2121 (2005).
[CrossRef]

Nanotechnology (1)

J. Fan, J. Fu, A. Collins, and Y. Zhao, “The effect of the shape of nanorod arrays on the nanocarpet effect,” Nanotechnology 19(4), 045713–045721 (2008).
[CrossRef]

Nat. Photonics (2)

M. C. Y. Huang, Y. Zhou, and C. J. Chang-hasnain, “A surface-emitting laser incorporating a high-index-contrast subwavelength grating,” Nat. Photonics 1(2), 119–122 (2007).
[CrossRef]

J. Q. Xi, M. F. Schubert, J. K. Kim, E. F. Schubert, M. Chen, S. Y. Lin, W. Liu, and J. A. Smart, “Optical thin-film materials with low refractive index for broadband elimination of Fresnel reflection,” Nat. Photonics 1, 176–179 (2007).

Opt. Commun. (1)

D. J. Ripin, J. T. Gopinath, H. M. Shen, A. A. Erchak, G. S. Petrich, L. A. Kolodziejski, F. X. Kartner, and E. P. Ippen, “Oxidized GaAs/AlAs mirror with a quantum-well saturable absorber for ultrashort-pulse Cr4+:YAG laser,” Opt. Commun. 214(1-6), 285–289 (2002).
[CrossRef]

Opt. Express (3)

Opt. Lett. (2)

Science (2)

M. J. Thorpe, K. D. Moll, R. J. Jones, B. Safdi, and J. Ye, “Broadband cavity ringdown spectroscopy for sensitive and rapid molecular detection,” Science 311(5767), 1595–1599 (2006).
[CrossRef] [PubMed]

M. J. Brett and M. M. Hawkeye, “Materials science. New materials at a glance,” Science 319(5867), 1192–1193 (2008).
[CrossRef] [PubMed]

Surf. Coat. Tech. (1)

S. J. Jang, Y. M. Song, H. J. Choi, J. S. Yu, and Y. T. Lee, “Structural and optical properties of silicon by tilted angle evaporation,” Surf. Coat. Tech. 205, S447–S450 (2010).
[CrossRef]

Surf. Sci. Rep. (1)

O. Bisi, S. Ossicini, and L. Pavesi, “Porous silicon: a quantum sponge structure for silicon based optoelectronics,” Surf. Sci. Rep. 38(1-3), 1–126 (2000).
[CrossRef]

Thin Solid Films (1)

G. Zalczer, O. Thomas, J. P. Piel, and J. L. Stehle, “IR spectroscopic ellipsometry: instrumentation and applications in semiconductors,” Thin Solid Films 234(1-2), 356–362 (1993).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Metrics