Abstract

The feasibility of two types of all-telluride integrated optics devices being able to single-mode guiding of light in the spectral ranges [6-11 µm] and [10-20 µm], respectively, has been demonstrated. The so-called “rib” waveguides show a several micron thick Te82Ge18 film deposited onto a Te75Ge15Ga10 bulk glass substrate by thermal co-evaporation and further etched by reactive ion etching in CHF3/O2/Ar atmosphere. The obtained structures were proved to behave as channel waveguides with a satisfactory confinement of light in the whole spectral ranges. These results allowed validation of our technological solution for the fabrication of micro-components for spatial interferometry.

© 2011 OSA

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. C. Fridlund, “Darwin and TPF: technology and prospects,” Proc. SPIE 5491, 227–235 (2004).
    [CrossRef]
  2. B. Mennesson, M. Ollivier, and C. Ruilier, “Use of single-mode waveguides to correct the optical defects of a nulling interferometer,” J. Opt. Soc. Am. A 19(3), 596–602 (2002).
    [CrossRef] [PubMed]
  3. V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
    [CrossRef]
  4. L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
    [CrossRef]
  5. C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
    [CrossRef]
  6. Y. Ruan, W. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, “Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching,” Opt. Express 12(21), 5140–5145 (2004).
    [CrossRef] [PubMed]
  7. N. Hô, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier., “Single-mode low-loss chalcogenide glass waveguides for the mid-infrared,” Opt. Lett. 31(12), 1860–1862 (2006).
    [CrossRef] [PubMed]
  8. Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
    [CrossRef] [PubMed]
  9. G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
    [CrossRef]
  10. S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
    [CrossRef]
  11. P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).
  12. Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995).
    [CrossRef]
  13. E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).
  14. J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).
  15. S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
    [CrossRef]
  16. S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
    [CrossRef]
  17. A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
    [CrossRef]
  18. E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
    [CrossRef]
  19. C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
    [CrossRef]

2011 (1)

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

2010 (3)

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
[CrossRef]

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

2009 (3)

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

Z. G. Lian, W. Pan, D. Furniss, T. M. Benson, A. B. Seddon, T. Kohoutek, J. Orava, and T. Wagner, “Embossing of chalcogenide glasses: monomode rib optical waveguides in evaporated thin films,” Opt. Lett. 34(8), 1234–1236 (2009).
[CrossRef] [PubMed]

2008 (1)

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

2007 (2)

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

2006 (3)

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

N. Hô, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier., “Single-mode low-loss chalcogenide glass waveguides for the mid-infrared,” Opt. Lett. 31(12), 1860–1862 (2006).
[CrossRef] [PubMed]

2004 (3)

Y. Ruan, W. Li, R. Jarvis, N. Madsen, A. Rode, and B. Luther-Davies, “Fabrication and characterization of low loss rib chalcogenide waveguides made by dry etching,” Opt. Express 12(21), 5140–5145 (2004).
[CrossRef] [PubMed]

M. C. Fridlund, “Darwin and TPF: technology and prospects,” Proc. SPIE 5491, 227–235 (2004).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

2003 (1)

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

2002 (1)

1995 (1)

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995).
[CrossRef]

Albert, S.

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

Allen, P. J.

Anheier, N. C.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

N. Hô, M. C. Phillips, H. Qiao, P. J. Allen, K. Krishnaswami, B. J. Riley, T. L. Myers, and N. C. Anheier., “Single-mode low-loss chalcogenide glass waveguides for the mid-infrared,” Opt. Lett. 31(12), 1860–1862 (2006).
[CrossRef] [PubMed]

Arezki, B.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

Barillot, M.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Barthélémy, E.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
[CrossRef]

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).

Benson, T. M.

Bernacki, B.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Bonhomme, E.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

Boussard, C.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Boussard-Pledel, C.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

Broquin, J.-E.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

Bureau, B.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Caballero-Calero, O.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Calvez, L.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Danto, S.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

De Sousa, S.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

Foucan, V.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

Frayret, J.

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

Fridlund, M. C.

M. C. Fridlund, “Darwin and TPF: technology and prospects,” Proc. SPIE 5491, 227–235 (2004).
[CrossRef]

Furniss, D.

Grille, R.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Haguenauer, P.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Hô, N.

Houizot, P.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

Ilchev, P.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

Jarvis, R.

Katzir, A.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Kern, P.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Kirschner, V.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Kohoutek, T.

Krbal, M.

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

Krishnaswami, K.

Labadie, L.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

Labeye, P.

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Lewi, T.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Li, W.

Lian, Z. G.

Lucas, J.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

Luther-Davies, B.

Madsen, N.

Malhotra, L. K.

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995).
[CrossRef]

Martin, G.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Mennesson, B.

Myers, T. L.

Ollivier, M.

Orava, J.

Pan, W.

Parent, G.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Petkov, P.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

Petkova, T.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

Phillips, M. C.

Piarristeguy, A. A.

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

Pradel, A.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
[CrossRef]

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).

Pujol, L.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Qiao, H.

Qiao, H. A.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Reddy, G. B.

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995).
[CrossRef]

Riley, B. J.

Rode, A.

Rodriguez Vazquez de Aldana, J.

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

Ruan, Y.

Ruilier, C.

Schanen, I.

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

Schanen-Duport, I.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Seddon, A. B.

Smektala, F.

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

Sodnik, Z.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Sripathi, Y.

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995).
[CrossRef]

Vigreux, C.

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
[CrossRef]

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

Vigreux-Bercovici, C.

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).

Wagner, T.

Weber, V.

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

Wuttig, M.

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

Yot, P.

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).

Zhang, S.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Zhang, X.

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

Adv. Funct. Mater. (1)

S. Danto, P. Houizot, C. Boussard-Pledel, X. Zhang, F. Smektala, and J. Lucas, “A new family of far infrared transmitting glasses in the Ga-Ge-Te system for space application,” Adv. Funct. Mater. 16(14), 1847–1852 (2006).
[CrossRef]

Appl. Phys. Lett. (1)

C. Vigreux-Bercovici, E. Bonhomme, A. Pradel, J.-E. Broquin, L. Labadie, and P. Kern, “Transmission measurement at 10.6 µm of Te2As3Se5 rib-waveguides on As2S3 substrate,” Appl. Phys. Lett. 90(1), 011110 (2007).
[CrossRef]

Astron. Astrophys. (1)

L. Labadie, P. Labeye, P. Kern, I. Schanen, B. Arezki, and J.-E. Broquin, “Modal filtering for nulling interferometry,” Astron. Astrophys. 450(3), 1265–1266 (2006).
[CrossRef]

J. Non-Cryst. Solids (2)

A. A. Piarristeguy, E. Barthélémy, M. Krbal, J. Frayret, C. Vigreux, and A. Pradel, “Glass formation in the GexTe100−x binary system: Synthesis by twin roller quenching and co-thermal evaporation techniques,” J. Non-Cryst. Solids 355(37-42), 2088–2091 (2009).
[CrossRef]

E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Effect of composition on the properties of Te-Ge thick films deposited by co-thermal evaporation,” J. Non-Cryst. Solids 356(41-42), 2175–2180 (2010).
[CrossRef]

J. Opt. Soc. Am. A (1)

J. Optoelectron. Adv. Mater. (1)

P. Petkov, M. Wuttig, P. Ilchev, and T. Petkova, “Optical band gap of gallium containing telluride thin films,” J. Optoelectron. Adv. Mater. 5(5), 1101–1106 (2003).

Microelectron. Eng. (1)

C. Vigreux, S. De Sousa, V. Foucan, E. Barthélémy, and A. Pradel, “Deep reactive ion etching of thermally co-evaporated Te–Ge films for IR integrated optics components,” Microelectron. Eng. 88(3), 222–227 (2011).
[CrossRef]

Opt. Express (1)

Opt. Lett. (2)

Opt. Mater. (1)

S. Zhang, X. Zhang, M. Barillot, L. Calvez, C. Boussard, B. Bureau, J. Lucas, V. Kirschner, and G. Parent, “Purification of Te75Ga10Ge15 glass for far infrared transmitting optics for space application,” Opt. Mater. 32(9), 1055–1059 (2010).
[CrossRef]

Optoelectron. Adv. Mater.: Rapid Comm. (2)

E. Barthélémy, C. Vigreux-Bercovici, P. Yot, and A. Pradel, “Co-thermal evaporation: a new method to deposit telluride films,” Optoelectron. Adv. Mater.: Rapid Comm. 1(10), 487–490 (2007).

J. Frayret, E. Barthélémy, S. Albert, C. Vigreux, and A. Pradel, “Te-Ge-Ga thin films deposited by co-thermal evaporation,” Optoelectron. Adv. Mater.: Rapid Comm. 3(3), 260–264 (2009).

Proc. SPIE (4)

V. Weber, M. Barillot, P. Haguenauer, P. Kern, I. Schanen-Duport, P. Labeye, L. Pujol, and Z. Sodnik, “Nulling interferometer based on an integrated optic beam combiner,” Proc. SPIE 5491, 842–850 (2004).
[CrossRef]

S. Albert, E. Barthélémy, C. Vigreux, A. Pradel, and M. Barillot, “Fabrication of far infrared rib waveguides based on Te-Ge-Ga films deposited by co-thermal evaporation,” Proc. SPIE 7101, 71011N (2008).
[CrossRef]

G. Martin, L. Labadie, O. Caballero-Calero, R. Grille, B. Arezki, P. Kern, N. C. Anheier, H. A. Qiao, B. Bernacki, T. Lewi, A. Katzir, and J. Rodriguez Vazquez de Aldana, “Single-mode mid-infrared waveguides for spectro-interferometry applications,” Proc. SPIE 7734, 77343R (2010).
[CrossRef]

M. C. Fridlund, “Darwin and TPF: technology and prospects,” Proc. SPIE 5491, 227–235 (2004).
[CrossRef]

Thin Solid Films (1)

Y. Sripathi, L. K. Malhotra, and G. B. Reddy, “GaGeTe films as phase-change optical recording media,” Thin Solid Films 270(1-2), 60–64 (1995).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1
Fig. 1

Designs of RIB waveguiding structures for both the [6-11 µm] and [10-20 µm] bands.

Fig. 2
Fig. 2

a) Coupling efficiencies of the RIB waveguiding structures for the [10-20 µm] spectral band when dimensions are those given in Fig. 1b and when nc = 3.44, nc = 3.44 + 0.02 and nc = 3.44 – 0.02. b) Coupling efficiencies of the RIB waveguiding structures for the [6-11 µm] spectral band when dimensions are those given in Fig. 1a and when nc = 3.44, nc = 3.44 + 0.02 and nc = 3.44 – 0.02. c) Same tendencies but obtained with different RIB widths.

Fig. 3
Fig. 3

3D profiles in a) thickness and b) composition of a film whose thickness and composition in the centre are 13.2 µm and Te82.5Ge17.5, respectively.

Fig. 4
Fig. 4

SIMS analysis of a film whose thickness and composition in the centre are 13.2 µm and Te82.5Ge17.5, respectively.

Fig. 5
Fig. 5

SEM pictures of RIB waveguides of different widths for: a) the [6 – 11 µm] and b) the [10 – 20 µm] spectral ranges.

Fig. 6
Fig. 6

a) Measured transmission spectrum of a rib waveguide of the [10-20 µm] type. b) Near field image obtained when the injection spot (at λ = 10.6 µm) was located into a RIB waveguide of type [6 – 11 µm]. The observation of a luminous spot proved the good bi-dimensional confinement of the light.

Metrics