Abstract

Metasurface optics is a promising candidate for realizing the next generation of miniaturized optical components. Unlike refractive optics, these devices modify light over a wavelength-scale thickness, changing the phase, amplitude, and polarization. This review details recent developments and state-of-the-art metasurfaces realized using silicon nitride. We emphasize this material as to date it has the lowest refractive index with which metasurfaces have been experimentally demonstrated. The wide band gap of silicon nitride enables reduced absorption over a broad wavelength range relative to its higher index counterparts, providing a CMOS-compatible platform for producing a variety of high efficiency metasurface elements and systems.

© 2018 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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2018 (7)

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

S. Wang, P. C. Wu, V.-C. Su, Y.-C. Lai, M.-K. Chen, H. Y. Kuo, B. H. Chen, Y. H. Chen, T.-T. Huang, J.-H. Wang, R.-M. Lin, C.-H. Kuan, T. Li, Z. Wang, S. Zhu, and D. P. Tsai, “A broadband achromatic metalens in the visible,” Nat. Nanotechnol. 13(3), 227–232 (2018).
[Crossref] [PubMed]

J. Flannery, R. Al Maruf, T. Yoon, and M. Bajcsy, “Fabry-Pérot Cavity Formed with Dielectric Metasurfaces in a Hollow-Core Fiber,” ACS Photonics 5(2), 337–341 (2018).
[Crossref]

S. Colburn, A. Zhan, and A. Majumdar, “Metasurface optics for full-color computational imaging,” Sci. Adv. 4, eaar 2114 (2018).

Z. Lin, B. Groever, F. Capasso, A. W. Rodriguez, and M. Lončar, “Topology-Optimized Multilayered Metaoptics,” Phys. Rev. Appl. 9(4), 044030 (2018).
[Crossref]

A. Zhan, T. K. Fryett, S. Colburn, and A. Majumdar, “Inverse design of optical elements based on arrays of dielectric spheres,” Appl. Opt. 57(6), 1437–1446 (2018).
[Crossref] [PubMed]

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

2017 (9)

A. Egel, L. Pattelli, G. Mazzamuto, D. S. Wiersma, and U. Lemmer, “CELES: CUDA-accelerated simulation of electromagnetic scattering by large ensembles of spheres,” J. Quant. Spectrosc. Radiat. Transf. 199, 103–110 (2017).
[Crossref]

A. Boniface, M. Mounaix, B. Blochet, R. Piestun, and S. Gigan, “Transmission-matrix-based point-spread-function engineering through a complex medium,” Optica 4(1), 54–59 (2017).
[Crossref]

H. Yu, K. Lee, J. Park, and Y. Park, “Ultrahigh-definition dynamic 3D holographic display by active control of volume speckle fields,” Nat. Photonics 11(3), 186–192 (2017).
[Crossref]

A. Zhan, S. Colburn, C. M. Dodson, and A. Majumdar, “Metasurface Freeform Nanophotonics,” Sci. Rep. 7(1), 1673 (2017).
[Crossref] [PubMed]

C. Hong, S. Colburn, and A. Majumdar, “Flat metaform near-eye visor,” Appl. Opt. 56(31), 8822–8827 (2017).
[Crossref] [PubMed]

B. H. Chen, P. C. Wu, V.-C. Su, Y.-C. Lai, C. H. Chu, I. C. Lee, J.-W. Chen, Y. H. Chen, Y.-C. Lan, C.-H. Kuan, and D. P. Tsai, “GaN Metalens for Pixel-Level Full-Color Routing at Visible Light,” Nano Lett. 17(10), 6345–6352 (2017).
[Crossref] [PubMed]

J. Yang and J. A. Fan, “Analysis of material selection on dielectric metasurface performance,” Opt. Express 25(20), 23899–23909 (2017).
[Crossref] [PubMed]

D. Lin, M. Melli, E. Poliakov, P. S. Hilaire, S. Dhuey, C. Peroz, S. Cabrini, M. Brongersma, and M. Klug, “Optical metasurfaces for high angle steering at visible wavelengths,” Sci. Rep. 7(1), 2286 (2017).
[Crossref] [PubMed]

M. Khorasaninejad, Z. Shi, A. Y. Zhu, W. T. Chen, V. Sanjeev, A. Zaidi, and F. Capasso, “Achromatic Metalens over 60 nm Bandwidth in the Visible and Metalens with Reverse Chromatic Dispersion,” Nano Lett. 17(3), 1819–1824 (2017).
[Crossref] [PubMed]

2016 (7)

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-Insensitive Metalenses at Visible Wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

Y.-W. Huang, H. W. H. Lee, R. Sokhoyan, R. A. Pala, K. Thyagarajan, S. Han, D. P. Tsai, and H. A. Atwater, “Gate-Tunable Conducting Oxide Metasurfaces,” Nano Lett. 16(9), 5319–5325 (2016).
[Crossref] [PubMed]

A. Zhan, S. Colburn, R. Trivedi, T. K. Fryett, C. M. Dodson, and A. Majumdar, “Low-Contrast Dielectric Metasurface Optics,” ACS Photonics 3(2), 209–214 (2016).
[Crossref]

D. D. Battista, D. Ancora, H. Zhang, K. Lemonaki, E. Marakis, E. Liapis, S. Tzortzakis, and G. Zacharakis, “Tailored light sheets through opaque cylindrical lenses,” Optica 3(11), 1237–1240 (2016).
[Crossref]

A. D. Dupuy, Y. Kodera, and J. E. Garay, “Unprecedented Electro-Optic Performance in Lead-Free Transparent Ceramics,” Adv. Mater. 28(36), 7970–7977 (2016).
[Crossref] [PubMed]

J. Ryu, M. Jang, T. J. Eom, C. Yang, and E. Chung, “Optical phase conjugation assisted scattering lens: variable focusing and 3D patterning,” Sci. Rep. 6(1), 23494 (2016).
[Crossref] [PubMed]

2015 (10)

M. Kim, W. Choi, Y. Choi, C. Yoon, and W. Choi, “Transmission matrix of a scattering medium and its applications in biophotonics,” Opt. Express 23(10), 12648–12668 (2015).
[Crossref] [PubMed]

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

G. Zheng, H. Mühlenbernd, M. Kenney, G. Li, T. Zentgraf, and S. Zhang, “Metasurface holograms reaching 80% efficiency,” Nat. Nanotechnol. 10(4), 308–312 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

M. I. Shalaev, J. Sun, A. Tsukernik, A. Pandey, K. Nikolskiy, and N. M. Litchinitser, “High-Efficiency All-Dielectric Metasurfaces for Ultracompact Beam Manipulation in Transmission Mode,” Nano Lett. 15(9), 6261–6266 (2015).
[Crossref] [PubMed]

F. Ding, Z. Wang, S. He, V. M. Shalaev, and A. V. Kildishev, “Broadband high-efficiency half-wave plate: a supercell-based plasmonic metasurface approach,” ACS Nano 9(4), 4111–4119 (2015).
[Crossref] [PubMed]

Z. H. Jiang, L. Lin, D. Ma, S. Yun, D. H. Werner, Z. Liu, and T. S. Mayer, “Broadband and wide field-of-view plasmonic metasurface-enabled waveplates,” Sci. Rep. 4(1), 7511 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, ncomms8069 (2015).
[Crossref]

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-Independent Silicon Metadevices for Efficient Optical Wavefront Control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Y. F. Yu, A. Y. Zhu, R. Paniagua-Domínguez, Y. H. Fu, B. Luk’yanchuk, and A. I. Kuznetsov, “High-transmission dielectric metasurface with 2π phase control at visible wavelengths,” Laser Photonics Rev. 9(4), 412–418 (2015).
[Crossref]

2014 (7)

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

C. Wu, N. Arju, G. Kelp, J. A. Fan, J. Dominguez, E. Gonzales, E. Tutuc, I. Brener, and G. Shvets, “Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances,” Nat. Commun. 5(1), 3892 (2014).
[Crossref] [PubMed]

E. Karimi, S. A. Schulz, I. De Leon, H. Qassim, J. Upham, and R. W. Boyd, “Generating optical orbital angular momentum at visible wavelengths using a plasmonic metasurface,” Light Sci. Appl. 3(5), e167 (2014).
[Crossref]

P. R. West, J. L. Stewart, A. V. Kildishev, V. M. Shalaev, V. V. Shkunov, F. Strohkendl, Y. A. Zakharenkov, R. K. Dodds, and R. Byren, “All-dielectric subwavelength metasurface focusing lens,” Opt. Express 22(21), 26212–26221 (2014).
[Crossref] [PubMed]

S. Vo, D. Fattal, W. V. Sorin, Z. Peng, T. Tran, M. Fiorentino, and R. G. Beausoleil, “Sub-Wavelength Grating Lenses With a Twist,” IEEE Photonics Technol. Lett. 26(13), 1375–1378 (2014).
[Crossref]

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

2013 (7)

X. Ni, A. V. Kildishev, and V. M. Shalaev, “Metasurface holograms for visible light,” Nat. Commun. Lond. 4(1), 2807 (2013).
[Crossref]

G. Li, M. Kang, S. Chen, S. Zhang, E. Y.-B. Pun, K. W. Cheah, and J. Li, “Spin-Enabled Plasmonic Metasurfaces for Manipulating Orbital Angular Momentum of Light,” Nano Lett. 13(9), 4148–4151 (2013).
[Crossref] [PubMed]

J. H. Park, C. Park, H. Yu, J. Park, S. Han, J. Shin, S. H. Ko, K. T. Nam, Y. H. Cho, and Y. Park, “Subwavelength light focusing using random nanoparticles,” Nat. Photonics 7(6), 454–458 (2013).
[Crossref]

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K. W. Cheah, C. W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4(1), 2808 (2013).
[Crossref]

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

D. Fattal, Z. Peng, T. Tran, S. Vo, M. Fiorentino, J. Brug, and R. G. Beausoleil, “A multi-directional backlight for a wide-angle, glasses-free three-dimensional display,” Nature 495(7441), 348–351 (2013).
[Crossref] [PubMed]

X. Ni, S. Ishii, A. V. Kildishev, and V. M. Shalaev, “Ultra-thin, planar, Babinet-inverted plasmonic metalenses,” Light Sci. Appl. 2(4), e72 (2013).
[Crossref]

2012 (4)

C. J. Chang-Hasnain and W. Yang, “High-contrast gratings for integrated optoelectronics,” Adv. Opt. Photonics 4(3), 379–440 (2012).
[Crossref]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

V. Liu and S. Fan, “S4 : A free electromagnetic solver for layered periodic structures,” Comput. Phys. Commun. 183(10), 2233–2244 (2012).
[Crossref]

2011 (4)

E. G. van Putten, D. Akbulut, J. Bertolotti, W. L. Vos, A. Lagendijk, and A. P. Mosk, “Scattering lens resolves sub-100 nm structures with visible light,” Phys. Rev. Lett. 106(19), 193905 (2011).
[Crossref] [PubMed]

Y. Choi, T. D. Yang, C. Fang-Yen, P. Kang, K. J. Lee, R. R. Dasari, M. S. Feld, and W. Choi, “Overcoming the Diffraction Limit Using Multiple Light Scattering in a Highly Disordered Medium,” Phys. Rev. Lett. 107(2), 023902 (2011).
[Crossref] [PubMed]

S. M. Popoff, G. Lerosey, M. Fink, A. C. Boccara, and S. Gigan, “Controlling light through optical disordered media: transmission matrix approach,” New J. Phys. 13(12), 123021 (2011).
[Crossref]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

2010 (6)

D. Fattal, J. Li, Z. Peng, M. Fiorentino, and R. G. Beausoleil, “Flat dielectric grating reflectors with focusing abilities,” Nat. Photonics 4(7), 466–470 (2010).
[Crossref]

S. M. Popoff, G. Lerosey, R. Carminati, M. Fink, A. C. Boccara, and S. Gigan, “Measuring the transmission matrix in optics: an approach to the study and control of light propagation in disordered media,” Phys. Rev. Lett. 104(10), 100601 (2010).
[Crossref] [PubMed]

T. D. Gerke and R. Piestun, “Aperiodic volume optics,” Nat. Photonics 4(3), 188–193 (2010).
[Crossref]

I. M. Vellekoop, A. Lagendijk, and A. P. Mosk, “Exploiting disorder for perfect focusing,” Nat. Photonics 4(5), 320–322 (2010).
[Crossref]

I. M. Vellekoop and C. M. Aegerter, “Scattered light fluorescence microscopy: imaging through turbid layers,” Opt. Lett. 35(8), 1245–1247 (2010).
[Crossref] [PubMed]

F. Lu, F. G. Sedgwick, V. Karagodsky, C. Chase, and C. J. Chang-Hasnain, “Planar high-numerical-aperture low-loss focusing reflectors and lenses using subwavelength high contrast gratings,” Opt. Express 18(12), 12606–12614 (2010).
[Crossref] [PubMed]

2004 (1)

2002 (2)

1999 (1)

P. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, “Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff,” JOSA A 16(5), 1143–1156 (1999).
[Crossref]

1998 (2)

1996 (1)

D. W. Mackowski and M. I. Mishchenko, “Calculation of the T matrix and the scattering matrix for ensembles of spheres,” JOSA A 13(11), 2266–2278 (1996).
[Crossref]

1995 (2)

Y. L. Xu, “Electromagnetic scattering by an aggregate of spheres,” Appl. Opt. 34(21), 4573–4588 (1995).
[Crossref] [PubMed]

R. R. Reddy and Y. Nazeer Ahammed, “A study on the Moss relation,” Infrared Phys. Technol. 36(5), 825–830 (1995).
[Crossref]

1994 (1)

Aegerter, C. M.

Aieta, F.

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
[Crossref] [PubMed]

Akbulut, D.

E. G. van Putten, D. Akbulut, J. Bertolotti, W. L. Vos, A. Lagendijk, and A. P. Mosk, “Scattering lens resolves sub-100 nm structures with visible light,” Phys. Rev. Lett. 106(19), 193905 (2011).
[Crossref] [PubMed]

Al Maruf, R.

J. Flannery, R. Al Maruf, T. Yoon, and M. Bajcsy, “Fabry-Pérot Cavity Formed with Dielectric Metasurfaces in a Hollow-Core Fiber,” ACS Photonics 5(2), 337–341 (2018).
[Crossref]

Ancora, D.

Arbabi, A.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, ncomms8069 (2015).
[Crossref]

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

Arju, N.

C. Wu, N. Arju, G. Kelp, J. A. Fan, J. Dominguez, E. Gonzales, E. Tutuc, I. Brener, and G. Shvets, “Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances,” Nat. Commun. 5(1), 3892 (2014).
[Crossref] [PubMed]

Astilean, S.

P. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, “Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff,” JOSA A 16(5), 1143–1156 (1999).
[Crossref]

S. Astilean, P. Lalanne, P. Chavel, E. Cambril, and H. Launois, “High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm,” Opt. Lett. 23(7), 552–554 (1998).
[Crossref] [PubMed]

Atwater, H. A.

Y.-W. Huang, H. W. H. Lee, R. Sokhoyan, R. A. Pala, K. Thyagarajan, S. Han, D. P. Tsai, and H. A. Atwater, “Gate-Tunable Conducting Oxide Metasurfaces,” Nano Lett. 16(9), 5319–5325 (2016).
[Crossref] [PubMed]

Bagheri, M.

A. Arbabi, Y. Horie, M. Bagheri, and A. Faraon, “Dielectric metasurfaces for complete control of phase and polarization with subwavelength spatial resolution and high transmission,” Nat. Nanotechnol. 10(11), 937–943 (2015).
[Crossref] [PubMed]

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, ncomms8069 (2015).
[Crossref]

A. Arbabi, R. M. Briggs, Y. Horie, M. Bagheri, and A. Faraon, “Efficient dielectric metasurface collimating lenses for mid-infrared quantum cascade lasers,” Opt. Express 23(26), 33310–33317 (2015).
[Crossref] [PubMed]

Bai, B.

L. Huang, X. Chen, H. Mühlenbernd, H. Zhang, S. Chen, B. Bai, Q. Tan, G. Jin, K. W. Cheah, C. W. Qiu, J. Li, T. Zentgraf, and S. Zhang, “Three-dimensional optical holography using a plasmonic metasurface,” Nat. Commun. 4(1), 2808 (2013).
[Crossref]

Bajcsy, M.

J. Flannery, R. Al Maruf, T. Yoon, and M. Bajcsy, “Fabry-Pérot Cavity Formed with Dielectric Metasurfaces in a Hollow-Core Fiber,” ACS Photonics 5(2), 337–341 (2018).
[Crossref]

Ball, A. J.

A. Arbabi, Y. Horie, A. J. Ball, M. Bagheri, and A. Faraon, “Subwavelength-thick lenses with high numerical apertures and large efficiency based on high-contrast transmitarrays,” Nat. Commun. 6, ncomms8069 (2015).
[Crossref]

Battista, D. D.

Beausoleil, R. G.

S. Vo, D. Fattal, W. V. Sorin, Z. Peng, T. Tran, M. Fiorentino, and R. G. Beausoleil, “Sub-Wavelength Grating Lenses With a Twist,” IEEE Photonics Technol. Lett. 26(13), 1375–1378 (2014).
[Crossref]

D. Fattal, Z. Peng, T. Tran, S. Vo, M. Fiorentino, J. Brug, and R. G. Beausoleil, “A multi-directional backlight for a wide-angle, glasses-free three-dimensional display,” Nature 495(7441), 348–351 (2013).
[Crossref] [PubMed]

D. Fattal, J. Li, Z. Peng, M. Fiorentino, and R. G. Beausoleil, “Flat dielectric grating reflectors with focusing abilities,” Nat. Photonics 4(7), 466–470 (2010).
[Crossref]

Bertolotti, J.

E. G. van Putten, D. Akbulut, J. Bertolotti, W. L. Vos, A. Lagendijk, and A. P. Mosk, “Scattering lens resolves sub-100 nm structures with visible light,” Phys. Rev. Lett. 106(19), 193905 (2011).
[Crossref] [PubMed]

Biener, G.

Blanchard, R.

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

Blochet, B.

Boccara, A. C.

S. M. Popoff, G. Lerosey, M. Fink, A. C. Boccara, and S. Gigan, “Controlling light through optical disordered media: transmission matrix approach,” New J. Phys. 13(12), 123021 (2011).
[Crossref]

S. M. Popoff, G. Lerosey, R. Carminati, M. Fink, A. C. Boccara, and S. Gigan, “Measuring the transmission matrix in optics: an approach to the study and control of light propagation in disordered media,” Phys. Rev. Lett. 104(10), 100601 (2010).
[Crossref] [PubMed]

Boltasseva, A.

A. V. Kildishev, A. Boltasseva, and V. M. Shalaev, “Planar photonics with metasurfaces,” Science 339(6125), 1232009 (2013).
[Crossref] [PubMed]

Bomzon, Z.

Boniface, A.

Boyd, R. W.

E. Karimi, S. A. Schulz, I. De Leon, H. Qassim, J. Upham, and R. W. Boyd, “Generating optical orbital angular momentum at visible wavelengths using a plasmonic metasurface,” Light Sci. Appl. 3(5), e167 (2014).
[Crossref]

Brake, J.

M. Jang, Y. Horie, A. Shibukawa, J. Brake, Y. Liu, S. M. Kamali, A. Arbabi, H. Ruan, A. Faraon, and C. Yang, “Wavefront shaping with disorder-engineered metasurfaces,” Nat. Photonics 12(2), 84–90 (2018).
[Crossref] [PubMed]

Brener, I.

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-Independent Silicon Metadevices for Efficient Optical Wavefront Control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

C. Wu, N. Arju, G. Kelp, J. A. Fan, J. Dominguez, E. Gonzales, E. Tutuc, I. Brener, and G. Shvets, “Spectrally selective chiral silicon metasurfaces based on infrared Fano resonances,” Nat. Commun. 5(1), 3892 (2014).
[Crossref] [PubMed]

Briggs, D. P.

Y. Yang, W. Wang, P. Moitra, I. I. Kravchenko, D. P. Briggs, and J. Valentine, “Dielectric Meta-Reflectarray for Broadband Linear Polarization Conversion and Optical Vortex Generation,” Nano Lett. 14(3), 1394–1399 (2014).
[Crossref] [PubMed]

Briggs, R. M.

Brongersma, M.

D. Lin, M. Melli, E. Poliakov, P. S. Hilaire, S. Dhuey, C. Peroz, S. Cabrini, M. Brongersma, and M. Klug, “Optical metasurfaces for high angle steering at visible wavelengths,” Sci. Rep. 7(1), 2286 (2017).
[Crossref] [PubMed]

Brongersma, M. L.

D. Lin, P. Fan, E. Hasman, and M. L. Brongersma, “Dielectric gradient metasurface optical elements,” Science 345(6194), 298–302 (2014).
[Crossref] [PubMed]

Brug, J.

D. Fattal, Z. Peng, T. Tran, S. Vo, M. Fiorentino, J. Brug, and R. G. Beausoleil, “A multi-directional backlight for a wide-angle, glasses-free three-dimensional display,” Nature 495(7441), 348–351 (2013).
[Crossref] [PubMed]

Byren, R.

Cabrini, S.

D. Lin, M. Melli, E. Poliakov, P. S. Hilaire, S. Dhuey, C. Peroz, S. Cabrini, M. Brongersma, and M. Klug, “Optical metasurfaces for high angle steering at visible wavelengths,” Sci. Rep. 7(1), 2286 (2017).
[Crossref] [PubMed]

Cambril, E.

P. Lalanne, S. Astilean, P. Chavel, E. Cambril, and H. Launois, “Design and fabrication of blazed binary diffractive elements with sampling periods smaller than the structural cutoff,” JOSA A 16(5), 1143–1156 (1999).
[Crossref]

S. Astilean, P. Lalanne, P. Chavel, E. Cambril, and H. Launois, “High-efficiency subwavelength diffractive element patterned in a high-refractive-index material for 633 nm,” Opt. Lett. 23(7), 552–554 (1998).
[Crossref] [PubMed]

Campione, S.

K. E. Chong, I. Staude, A. James, J. Dominguez, S. Liu, S. Campione, G. S. Subramania, T. S. Luk, M. Decker, D. N. Neshev, I. Brener, and Y. S. Kivshar, “Polarization-Independent Silicon Metadevices for Efficient Optical Wavefront Control,” Nano Lett. 15(8), 5369–5374 (2015).
[Crossref] [PubMed]

Capasso, F.

W. T. Chen, A. Y. Zhu, V. Sanjeev, M. Khorasaninejad, Z. Shi, E. Lee, and F. Capasso, “A broadband achromatic metalens for focusing and imaging in the visible,” Nat. Nanotechnol. 13(3), 220–226 (2018).
[Crossref] [PubMed]

Z. Lin, B. Groever, F. Capasso, A. W. Rodriguez, and M. Lončar, “Topology-Optimized Multilayered Metaoptics,” Phys. Rev. Appl. 9(4), 044030 (2018).
[Crossref]

M. Khorasaninejad, Z. Shi, A. Y. Zhu, W. T. Chen, V. Sanjeev, A. Zaidi, and F. Capasso, “Achromatic Metalens over 60 nm Bandwidth in the Visible and Metalens with Reverse Chromatic Dispersion,” Nano Lett. 17(3), 1819–1824 (2017).
[Crossref] [PubMed]

M. Khorasaninejad, A. Y. Zhu, C. Roques-Carmes, W. T. Chen, J. Oh, I. Mishra, R. C. Devlin, and F. Capasso, “Polarization-Insensitive Metalenses at Visible Wavelengths,” Nano Lett. 16(11), 7229–7234 (2016).
[Crossref] [PubMed]

M. Khorasaninejad, W. T. Chen, R. C. Devlin, J. Oh, A. Y. Zhu, and F. Capasso, “Metalenses at visible wavelengths: Diffraction-limited focusing and subwavelength resolution imaging,” Science 352(6290), 1190–1194 (2016).
[Crossref] [PubMed]

N. Yu and F. Capasso, “Flat optics with designer metasurfaces,” Nat. Mater. 13(2), 139–150 (2014).
[Crossref] [PubMed]

F. Aieta, P. Genevet, M. A. Kats, N. Yu, R. Blanchard, Z. Gaburro, and F. Capasso, “Aberration-free ultrathin flat lenses and axicons at telecom wavelengths based on plasmonic metasurfaces,” Nano Lett. 12(9), 4932–4936 (2012).
[Crossref] [PubMed]

N. Yu, F. Aieta, P. Genevet, M. A. Kats, Z. Gaburro, and F. Capasso, “A broadband, background-free quarter-wave plate based on plasmonic metasurfaces,” Nano Lett. 12(12), 6328–6333 (2012).
[Crossref] [PubMed]

N. Yu, P. Genevet, M. A. Kats, F. Aieta, J.-P. Tetienne, F. Capasso, and Z. Gaburro, “Light propagation with phase discontinuities: generalized laws of reflection and refraction,” Science 334(6054), 333–337 (2011).
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Figures (7)

Fig. 1
Fig. 1 Existing metasurface platforms employing materials with refractive indices less than that of silicon. Titanium oxide nanopillars [14] (a) and nanofins [15] (b) used for visible wavelength metasurfaces. Scale bar, 300 nm in (b). (c)-(e) Au-based 1D phase gratings with electrical control using index modulation of ITO for tunable beam deflection [32]. Adapted with permission from [32]. Copyright (2016) American Chemical Society. (f) Gallium nitride-based scatterers used in a broadband achromatic lens design with a scale bar of 10 μm [20]. SiN nanoposts used in a vortex beam [21] (g) and as part of a lens [23] (h).
Fig. 2
Fig. 2 Metasurface design methodologies. (a) An example transmission amplitude (blue) and phase (red) in units of 2π simulation using rigorous coupled-wave analysis for a forward design of a SiN nanopost metasurface [21]. Adapted with permission from [21]. Copyright (2017) American Chemical Society. (b) An inverse-designed multi-layer metasurface via topology optimization to produce aberration-corrected focusing at four different incidence angles made of silicon (black) and alumina (gray) [53]. (c) Schematic representation of a periodic metasurface beam deflector designed using rigorous coupled-wave analysis and topology optimization [34]. Adapted with permission from [34]. Copyright (2017) American Chemical Society. (d) A sample lens generated via the sphere-based GMMT inverse method for 50 μm focal length at 1550 nm [54].
Fig. 3
Fig. 3 Outputs from basic SiN metasurface elements. Field profiles captured with a microscope at the focal plane of a metasurface lens (a) and vortex beam generator with l = 2 (b) [21]. Adapted with permission from [21]. Copyright (2017) American Chemical Society. (c) Far-field intensity profile of a Mona Lisa pattern generated by a SiN metasurface hologram design. (d) Image captured of a university logo pattern using a SiN metasurface lens [23].
Fig. 4
Fig. 4 Freeform SiN metasurfaces. (a) Highly depth-invariant point spread functions measured for a cubic phase metasurface generating an Airy beam at 633 nm wavelength. Scale bar, 18 μm [22]. (b) Measured focal length as a function of displacement for a 150 μm wide metasurface Alvarez lens designed at 633 nm using SiN [22]. (c) Varifocal zoom imaging of both an Air Force test chart and a printed Mona Lisa pattern using a 1 cm wide Alvarez lens at 633 nm using SiN. Scale bar, 1.2 mm [58].
Fig. 5
Fig. 5 Hollow core fiber metasurface mirror cavity [25]. Schematic representation (left) and a scanning electron micrograph (right) of the metasurface-based cavity design. The inset shows the measured spectrum and fit. Adapted with permission from [25]. Copyright (2018) American Chemical Society.
Fig. 6
Fig. 6 Metasurface-based computational imaging for full-color imaging [26]. Modulation transfer functions for a singlet metalens (a) and for an extended depth of focus (EDOF) design (b). The colors correspond to the illumination color when measuring the point spread function. (c) Experimentally measured images under white light illumination for a singlet metalens, the EDOF metalens without deconvolution, and the EDOF metalens image after deconvolution. Scale bar, 20 μm.
Fig. 7
Fig. 7 Disorder-engineered SiN metasurface system used for wavefront shaping [60]. The designed system comprised a spatial light modulator (a) with reconfigurable pixels (e) and a disorder-engineered metasurface made of square nanoposts of SiN on a quartz substrate (b). By accessing a broader real and wavevector space, the system enabled high-NA focusing over a wide FOV (c). The thinness of the element provided a wide memory effect range and its static nature after fabrication made for a highly stable disordered medium.

Equations (2)

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φ= 2π λ ( f x 2 + y 2 + f 2 )
φ= 2π λ ( f x 2 + y 2 + f 2 )+