Abstract

A high-power argon excimer laser has been developed with an output power exceeding 2 MW in the VUV region at 126 nm. As an alternative to a conventional Al/MgF2-coated mirror, which was susceptible to damage, an uncoated quartz plate was successfully used as a reflector for reproducible high-power operation of the argon excimer laser without any mirror damage. Observation of the temporal behavior of the laser pulse in relation to that of the gain coefficient is discussed.

© 1984 Optical Society of America

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References

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  1. W. H. Hughes, J. Shannon, R. Hunter, Appl. Phys. Lett. 24, 488 (1974).
    [Crossref]
  2. W.-G. Wrobel, Rep. IPP 1/186, Max Planck Institut für Plasmaphysik, Euratom Association,D-8046 Garching, Federal Republic of Germany (1981, unpublished).
  3. K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
    [PubMed]
  4. T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).
  5. J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
    [Crossref]
  6. C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
    [Crossref]
  7. J. B. Gerardo, A. W. Johnson, Appl. Phys. Lett. 26, 582 (1975).
    [Crossref]

1977 (1)

C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
[Crossref]

1976 (1)

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

1975 (1)

J. B. Gerardo, A. W. Johnson, Appl. Phys. Lett. 26, 582 (1975).
[Crossref]

1974 (1)

W. H. Hughes, J. Shannon, R. Hunter, Appl. Phys. Lett. 24, 488 (1974).
[Crossref]

1965 (1)

T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).

Bonifield, T. D.

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

Fujita, J.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Fujiwara, E.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Fukutani, H.

T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).

George, E. G.

C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
[Crossref]

Gerardo, J. B.

J. B. Gerardo, A. W. Johnson, Appl. Phys. Lett. 26, 582 (1975).
[Crossref]

Gleason, R. E.

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

Hoff, P. W.

C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
[Crossref]

Hughes, W. H.

W. H. Hughes, J. Shannon, R. Hunter, Appl. Phys. Lett. 24, 488 (1974).
[Crossref]

Hunter, R.

W. H. Hughes, J. Shannon, R. Hunter, Appl. Phys. Lett. 24, 488 (1974).
[Crossref]

Ishigro, K.

T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).

Izumitani, T.

T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).

Johnson, A. W.

J. B. Gerardo, A. W. Johnson, Appl. Phys. Lett. 26, 582 (1975).
[Crossref]

Kadota, K.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Kato, Y.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Kawatoh, E.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Keto, J. W.

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

Rhodes, C. K.

C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
[Crossref]

Sasaki, T.

T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).

Sasaki, W.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Shannon, J.

W. H. Hughes, J. Shannon, R. Hunter, Appl. Phys. Lett. 24, 488 (1974).
[Crossref]

Soley, F. K.

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

Tsuchida, K.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Uehara, Y.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Walters, G. K.

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

Werner, C. W.

C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
[Crossref]

Wrobel, W.-G.

W.-G. Wrobel, Rep. IPP 1/186, Max Planck Institut für Plasmaphysik, Euratom Association,D-8046 Garching, Federal Republic of Germany (1981, unpublished).

Yamanaka, M.

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

Appl. Phys. Lett. (2)

W. H. Hughes, J. Shannon, R. Hunter, Appl. Phys. Lett. 24, 488 (1974).
[Crossref]

J. B. Gerardo, A. W. Johnson, Appl. Phys. Lett. 26, 582 (1975).
[Crossref]

Chem. Phys. Lett. (1)

J. W. Keto, R. E. Gleason, T. D. Bonifield, G. K. Walters, F. K. Soley, Chem. Phys. Lett. 42, 125 (1976).
[Crossref]

IEEE J. Quantum Electron. (1)

C. W. Werner, E. G. George, P. W. Hoff, C. K. Rhodes, IEEE J. Quantum Electron. QE-9,769 (1977).
[Crossref]

Jpn. J. Appl. Phys. (1)

T. Sasaki, H. Fukutani, K. Ishigro, T. Izumitani, Jpn. J. Appl. Phys. 40 (Suppl. 1),529 (1965).

Other (2)

W.-G. Wrobel, Rep. IPP 1/186, Max Planck Institut für Plasmaphysik, Euratom Association,D-8046 Garching, Federal Republic of Germany (1981, unpublished).

K. Tsuchida, Y. Uehara, W. Sasaki, E. Kawatoh, E. Fujiwara, Y. Kato, M. Yamanaka, K. Kadota, J. Fujita, presented at Sixth International Conference on Plasma Surface Interactions in Controlled Fusion Devices, Nagoya, Japan, 1984;J. Nucl. Mater, (to be published).
[PubMed]

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Figures (4)

Fig. 1
Fig. 1

Schematic of laser.

Fig. 2
Fig. 2

Schematic of experimental apparatus. In measuring the spectrum, the diffuser is removed.

Fig. 3
Fig. 3

Pressure dependence of laser output.

Fig. 4
Fig. 4

Waveforms of (a) diode voltage and (b) beam current. Time histories of small-signal gains and laser pulses at (c) 2.5 MPa and at (d) 3.9 MPa with MgF2 plate and quartz plate cavity.

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