Abstract

A high-power argon excimer laser has been developed with an output power exceeding 2 MW in the VUV region at 126 nm. As an alternative to a conventional Al/MgF2-coated mirror, which was susceptible to damage, an uncoated quartz plate was successfully used as a reflector for reproducible high-power operation of the argon excimer laser without any mirror damage. Observation of the temporal behavior of the laser pulse in relation to that of the gain coefficient is discussed.

© 1984 Optical Society of America

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