Abstract

Transmission electron diffraction patterns related to the cross section of layered synthetic microstructures (LSM's) are obtained. By depositing the multilayers onto (111) orientation silicon single-crystal substrates, it is possible to obtain on the same plate both the LSM diffraction pattern and a calibrated one and thus to measure the LSM mean period accurately. Results concerning tungsten–carbon LSM's are presented.

© 1984 Optical Society of America

Characterization of layered synthetic microstructures using transmission electron microscopy

Yves Lepetre, Georges Rasigni, René Rivoira, Roger Philip, and Jean-Jacques Metois
J. Opt. Soc. Am. A 2(8) 1356-1362 (1985)

Determination of the x-ray anomalous dispersion of titanium made with a titanium–carbon layered synthetic microstructure

Troy W. Barbee, William K. Warburton, and James H. Underwood
J. Opt. Soc. Am. B 1(5) 691-698 (1984)

Layered synthetic microstructure technology considerations for the extreme ultraviolet

Ritva A. M. Keski-Kuha
Appl. Opt. 23(20) 3534-3537 (1984)

Computer processing of electron microscope cross sections of multilayer mirrors

M. O. Flaissier, C. Guichet, M. Rasigni, and G. Rasigni
Appl. Opt. 36(25) 6491-6497 (1997)

Layered synthetic microstructures as Bragg diffractors for X rays and extreme ultraviolet: theory and predicted performance

J. H. Underwood and T. W. Barbee
Appl. Opt. 20(17) 3027-3034 (1981)