Abstract

A simple dichroic beam splitter capable of separating extreme-ultraviolet (XUV) radiation from high-powered visible and UV laser beams is demonstrated. The device has high XUV reflection efficiency (R ≈ 44%) and high damage resistance to intense laser radiation and is therefore applicable to laser-generated XUV radiation sources, including harmonic generation, sum-frequency mixing, and anti-stokes Raman scattering.

© 1983 Optical Society of America

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References

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  1. R. R. Freeman, T. J. McIlrath, eds., Laser Techniques for Extreme Ultraviolet Spectroscopy (American Institute of Physics, New York, 1982).
  2. S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
    [Crossref]
  3. M. H. R. Hutchinson, C. C. Ling, D. J. Bradley, Opt. Commun. 18, 203 (1976); J. Reintjes, Opt. Lett. 4, 242 (1979); H. Egger, R. T. Hawkins, J. Bokor, H. Pummer, M. Rothschild, C. K. Rhodes, Opt. Lett. 5, 282 (1980).
    [Crossref] [PubMed]
  4. R. R. Freeman, R. H. Jopson, J. Bokor, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).
  5. J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Pied Publications, Lincoln, Nebraska, 1967).
  6. W. R. Hunter, Appl. Opt. 17, 1259 (1978).
    [Crossref] [PubMed]
  7. Complex index of refraction data from W. R. Hunter, U.S. Naval Research Laboratory, Washington, D.C. 20375.
  8. W. R. Hunter, Appl. Opt. 21, 2103 (1982).
    [Crossref] [PubMed]
  9. Supplied by Acton Research Corporation, Acton, Massachusetts.
  10. M. W. Williams, R. A. MacRae, E. T. Arakawa, J. Appl. Phys. 38, 1701 (1967); E. T. Arakawa, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830 (personal communication).
    [Crossref]
  11. See, for example, M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975).
  12. R. Haensel, C. Kunz, B. Sonntag, Phys. Rev. Lett. 20, 262 (1968).
    [Crossref]
  13. G. A. Massey, A. E. Siegman, Appl. Opt. 8, 975 (1969).
    [Crossref] [PubMed]
  14. This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

1982 (1)

1978 (1)

1976 (1)

M. H. R. Hutchinson, C. C. Ling, D. J. Bradley, Opt. Commun. 18, 203 (1976); J. Reintjes, Opt. Lett. 4, 242 (1979); H. Egger, R. T. Hawkins, J. Bokor, H. Pummer, M. Rothschild, C. K. Rhodes, Opt. Lett. 5, 282 (1980).
[Crossref] [PubMed]

1969 (1)

1968 (1)

R. Haensel, C. Kunz, B. Sonntag, Phys. Rev. Lett. 20, 262 (1968).
[Crossref]

1967 (1)

M. W. Williams, R. A. MacRae, E. T. Arakawa, J. Appl. Phys. 38, 1701 (1967); E. T. Arakawa, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830 (personal communication).
[Crossref]

Arakawa, E. T.

M. W. Williams, R. A. MacRae, E. T. Arakawa, J. Appl. Phys. 38, 1701 (1967); E. T. Arakawa, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830 (personal communication).
[Crossref]

Bjorklund, G. C.

S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
[Crossref]

Bloom, D. M.

S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
[Crossref]

Bokor, J.

R. R. Freeman, R. H. Jopson, J. Bokor, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Born, M.

See, for example, M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975).

Bradley, D. J.

M. H. R. Hutchinson, C. C. Ling, D. J. Bradley, Opt. Commun. 18, 203 (1976); J. Reintjes, Opt. Lett. 4, 242 (1979); H. Egger, R. T. Hawkins, J. Bokor, H. Pummer, M. Rothschild, C. K. Rhodes, Opt. Lett. 5, 282 (1980).
[Crossref] [PubMed]

Falcone, R. W.

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Freeman, R. R.

R. R. Freeman, R. H. Jopson, J. Bokor, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Haensel, R.

R. Haensel, C. Kunz, B. Sonntag, Phys. Rev. Lett. 20, 262 (1968).
[Crossref]

Harris, S. E.

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
[Crossref]

Hunter, W. R.

Hutchinson, M. H. R.

M. H. R. Hutchinson, C. C. Ling, D. J. Bradley, Opt. Commun. 18, 203 (1976); J. Reintjes, Opt. Lett. 4, 242 (1979); H. Egger, R. T. Hawkins, J. Bokor, H. Pummer, M. Rothschild, C. K. Rhodes, Opt. Lett. 5, 282 (1980).
[Crossref] [PubMed]

Jopson, R. H.

R. R. Freeman, R. H. Jopson, J. Bokor, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Kung, A. H.

S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
[Crossref]

Kunz, C.

R. Haensel, C. Kunz, B. Sonntag, Phys. Rev. Lett. 20, 262 (1968).
[Crossref]

Ling, C. C.

M. H. R. Hutchinson, C. C. Ling, D. J. Bradley, Opt. Commun. 18, 203 (1976); J. Reintjes, Opt. Lett. 4, 242 (1979); H. Egger, R. T. Hawkins, J. Bokor, H. Pummer, M. Rothschild, C. K. Rhodes, Opt. Lett. 5, 282 (1980).
[Crossref] [PubMed]

MacRae, R. A.

M. W. Williams, R. A. MacRae, E. T. Arakawa, J. Appl. Phys. 38, 1701 (1967); E. T. Arakawa, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830 (personal communication).
[Crossref]

Massey, G. A.

Rothenberg, J. E.

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Samson, J. A. R.

J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Pied Publications, Lincoln, Nebraska, 1967).

Siegman, A. E.

Sonntag, B.

R. Haensel, C. Kunz, B. Sonntag, Phys. Rev. Lett. 20, 262 (1968).
[Crossref]

Wang, J. C.

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Williams, M. W.

M. W. Williams, R. A. MacRae, E. T. Arakawa, J. Appl. Phys. 38, 1701 (1967); E. T. Arakawa, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830 (personal communication).
[Crossref]

Willison, J. R.

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

Wolf, E.

See, for example, M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975).

Young, J. F.

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
[Crossref]

Appl. Opt. (3)

J. Appl. Phys. (1)

M. W. Williams, R. A. MacRae, E. T. Arakawa, J. Appl. Phys. 38, 1701 (1967); E. T. Arakawa, Oak Ridge National Laboratory, Oak Ridge, Tennessee 37830 (personal communication).
[Crossref]

Opt. Commun. (1)

M. H. R. Hutchinson, C. C. Ling, D. J. Bradley, Opt. Commun. 18, 203 (1976); J. Reintjes, Opt. Lett. 4, 242 (1979); H. Egger, R. T. Hawkins, J. Bokor, H. Pummer, M. Rothschild, C. K. Rhodes, Opt. Lett. 5, 282 (1980).
[Crossref] [PubMed]

Phys. Rev. Lett. (1)

R. Haensel, C. Kunz, B. Sonntag, Phys. Rev. Lett. 20, 262 (1968).
[Crossref]

Other (8)

See, for example, M. Born, E. Wolf, Principles of Optics (Pergamon, Oxford, 1975).

This includes both coherent processes and incoherent scattering such as that described by S. E. Harris, J. F. Young, R. W. Falcone, J. E. Rothenberg, J. R. Willison, J. C. Wang, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

R. R. Freeman, R. H. Jopson, J. Bokor, in Laser Techniques for Extreme Ultraviolet Spectroscopy, R. R. Freeman, T. J. McIlrath, eds. (American Institute of Physics, New York, 1982).

J. A. R. Samson, Techniques of Vacuum Ultraviolet Spectroscopy (Pied Publications, Lincoln, Nebraska, 1967).

R. R. Freeman, T. J. McIlrath, eds., Laser Techniques for Extreme Ultraviolet Spectroscopy (American Institute of Physics, New York, 1982).

S. E. Harris, J. F. Young, A. H. Kung, D. M. Bloom, G. C. Bjorklund, in Laser Spectroscopy, R. G. Brewer, A. Mooradian, eds. (Plenum, New York, 1973); J. Reintjes, C-Y. She, R. C. Eckardt, IEEE J. Quantum Electron. QE-14, 581 (1978).
[Crossref]

Supplied by Acton Research Corporation, Acton, Massachusetts.

Complex index of refraction data from W. R. Hunter, U.S. Naval Research Laboratory, Washington, D.C. 20375.

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Figures (4)

Fig. 1
Fig. 1

Configuration of dichroic beam splitter to separate visible wavelength fundamental from XUV wavelength harmonic generated in a nonlinear medium.

Fig. 2
Fig. 2

Reflection of p-polarized radiation from nonabsorbing media with index of refraction n = 1.5 as a function of angle.

Fig. 3
Fig. 3

Reflectivity of quartz in the XUV for s- and p-polarized radiation as a function of angle and wavelength.7

Fig. 4
Fig. 4

Experimental configuration used to separate 933-Å laser from 933-Å harmonic genrated in Hg-vapour cell; 933-Å beam path was in He buffer gas.

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