Abstract

Regular 0.15- to 0.5-μm-period ripple structures have been seen in laser-photodeposited Cd and Zn films. Electron-microscope observations have established the evolution of these microstructures in the growing films.

© 1982 Optical Society of America

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  1. D. C. Emmony, R. P. Howson, L. J. Willis, Appl. Phys. Lett. 23, 598 (1973).
    [CrossRef]
  2. M. A. Cutter, P. Y. Key, V. I. Little, Appl. Opt. 13, 1399 (1974).
    [CrossRef] [PubMed]
  3. N. R. Isenor, Appl. Phys. Lett. 31, 148 (1977).
    [CrossRef]
  4. H. J. Leamy, G. A. Rozgonyi, T. T. Sheng, Appl. Phys. Lett. 32, 536 (1978).
    [CrossRef]
  5. M. Oron, G. Sorenson, Appl. Phys. Lett. 35, 782 (1979).
    [CrossRef]
  6. R. M. Walser, M. F. Becker, J. G. Ambrose, D. Y. Sheng, in Laser and Electron-Beam Solid Interactions and Materials Processing, J. F. Gibbons, L. D. Hess, T. W. Sigmon, eds. (North-Holland, New York, 1981).
  7. S. J. Thomas, R. F. Harrison, J. F. Figueira, Appl. Phys. Lett. 40, 200 (1982).
    [CrossRef]
  8. P. M. Fauchet, A. E. Siegman, Appl. Phys. Lett. 40, 824 (1982).
    [CrossRef]
  9. J. F. Young, J. E. Sipe, J. S. Preston, H. M. Van Driel, Appl. Phys. Lett. (to be published).
  10. D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, J. Vac. Sci. Tech. 20, 738 (1982).
    [CrossRef]
  11. D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, Appl. Phys. Lett. 38, 946 (1981).
    [CrossRef]
  12. D. J. Ehrlich, R. M. Osgood, Chem. Phys. Lett. 79, 381 (1981).
    [CrossRef]
  13. S. R. J. Brueck, D. J. Ehrlich, Phys. Rev. Lett. 48, 1678 (1982).
    [CrossRef]

1982 (4)

S. J. Thomas, R. F. Harrison, J. F. Figueira, Appl. Phys. Lett. 40, 200 (1982).
[CrossRef]

P. M. Fauchet, A. E. Siegman, Appl. Phys. Lett. 40, 824 (1982).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, J. Vac. Sci. Tech. 20, 738 (1982).
[CrossRef]

S. R. J. Brueck, D. J. Ehrlich, Phys. Rev. Lett. 48, 1678 (1982).
[CrossRef]

1981 (2)

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, Appl. Phys. Lett. 38, 946 (1981).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, Chem. Phys. Lett. 79, 381 (1981).
[CrossRef]

1979 (1)

M. Oron, G. Sorenson, Appl. Phys. Lett. 35, 782 (1979).
[CrossRef]

1978 (1)

H. J. Leamy, G. A. Rozgonyi, T. T. Sheng, Appl. Phys. Lett. 32, 536 (1978).
[CrossRef]

1977 (1)

N. R. Isenor, Appl. Phys. Lett. 31, 148 (1977).
[CrossRef]

1974 (1)

1973 (1)

D. C. Emmony, R. P. Howson, L. J. Willis, Appl. Phys. Lett. 23, 598 (1973).
[CrossRef]

Ambrose, J. G.

R. M. Walser, M. F. Becker, J. G. Ambrose, D. Y. Sheng, in Laser and Electron-Beam Solid Interactions and Materials Processing, J. F. Gibbons, L. D. Hess, T. W. Sigmon, eds. (North-Holland, New York, 1981).

Becker, M. F.

R. M. Walser, M. F. Becker, J. G. Ambrose, D. Y. Sheng, in Laser and Electron-Beam Solid Interactions and Materials Processing, J. F. Gibbons, L. D. Hess, T. W. Sigmon, eds. (North-Holland, New York, 1981).

Brueck, S. R. J.

S. R. J. Brueck, D. J. Ehrlich, Phys. Rev. Lett. 48, 1678 (1982).
[CrossRef]

Cutter, M. A.

Deutsch, T. F.

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, J. Vac. Sci. Tech. 20, 738 (1982).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, Appl. Phys. Lett. 38, 946 (1981).
[CrossRef]

Ehrlich, D. J.

S. R. J. Brueck, D. J. Ehrlich, Phys. Rev. Lett. 48, 1678 (1982).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, J. Vac. Sci. Tech. 20, 738 (1982).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, Appl. Phys. Lett. 38, 946 (1981).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, Chem. Phys. Lett. 79, 381 (1981).
[CrossRef]

Emmony, D. C.

D. C. Emmony, R. P. Howson, L. J. Willis, Appl. Phys. Lett. 23, 598 (1973).
[CrossRef]

Fauchet, P. M.

P. M. Fauchet, A. E. Siegman, Appl. Phys. Lett. 40, 824 (1982).
[CrossRef]

Figueira, J. F.

S. J. Thomas, R. F. Harrison, J. F. Figueira, Appl. Phys. Lett. 40, 200 (1982).
[CrossRef]

Harrison, R. F.

S. J. Thomas, R. F. Harrison, J. F. Figueira, Appl. Phys. Lett. 40, 200 (1982).
[CrossRef]

Howson, R. P.

D. C. Emmony, R. P. Howson, L. J. Willis, Appl. Phys. Lett. 23, 598 (1973).
[CrossRef]

Isenor, N. R.

N. R. Isenor, Appl. Phys. Lett. 31, 148 (1977).
[CrossRef]

Key, P. Y.

Leamy, H. J.

H. J. Leamy, G. A. Rozgonyi, T. T. Sheng, Appl. Phys. Lett. 32, 536 (1978).
[CrossRef]

Little, V. I.

Oron, M.

M. Oron, G. Sorenson, Appl. Phys. Lett. 35, 782 (1979).
[CrossRef]

Osgood, R. M.

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, J. Vac. Sci. Tech. 20, 738 (1982).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, Appl. Phys. Lett. 38, 946 (1981).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, Chem. Phys. Lett. 79, 381 (1981).
[CrossRef]

Preston, J. S.

J. F. Young, J. E. Sipe, J. S. Preston, H. M. Van Driel, Appl. Phys. Lett. (to be published).

Rozgonyi, G. A.

H. J. Leamy, G. A. Rozgonyi, T. T. Sheng, Appl. Phys. Lett. 32, 536 (1978).
[CrossRef]

Sheng, D. Y.

R. M. Walser, M. F. Becker, J. G. Ambrose, D. Y. Sheng, in Laser and Electron-Beam Solid Interactions and Materials Processing, J. F. Gibbons, L. D. Hess, T. W. Sigmon, eds. (North-Holland, New York, 1981).

Sheng, T. T.

H. J. Leamy, G. A. Rozgonyi, T. T. Sheng, Appl. Phys. Lett. 32, 536 (1978).
[CrossRef]

Siegman, A. E.

P. M. Fauchet, A. E. Siegman, Appl. Phys. Lett. 40, 824 (1982).
[CrossRef]

Sipe, J. E.

J. F. Young, J. E. Sipe, J. S. Preston, H. M. Van Driel, Appl. Phys. Lett. (to be published).

Sorenson, G.

M. Oron, G. Sorenson, Appl. Phys. Lett. 35, 782 (1979).
[CrossRef]

Thomas, S. J.

S. J. Thomas, R. F. Harrison, J. F. Figueira, Appl. Phys. Lett. 40, 200 (1982).
[CrossRef]

Van Driel, H. M.

J. F. Young, J. E. Sipe, J. S. Preston, H. M. Van Driel, Appl. Phys. Lett. (to be published).

Walser, R. M.

R. M. Walser, M. F. Becker, J. G. Ambrose, D. Y. Sheng, in Laser and Electron-Beam Solid Interactions and Materials Processing, J. F. Gibbons, L. D. Hess, T. W. Sigmon, eds. (North-Holland, New York, 1981).

Willis, L. J.

D. C. Emmony, R. P. Howson, L. J. Willis, Appl. Phys. Lett. 23, 598 (1973).
[CrossRef]

Young, J. F.

J. F. Young, J. E. Sipe, J. S. Preston, H. M. Van Driel, Appl. Phys. Lett. (to be published).

Appl. Opt. (1)

Appl. Phys. Lett. (7)

N. R. Isenor, Appl. Phys. Lett. 31, 148 (1977).
[CrossRef]

H. J. Leamy, G. A. Rozgonyi, T. T. Sheng, Appl. Phys. Lett. 32, 536 (1978).
[CrossRef]

M. Oron, G. Sorenson, Appl. Phys. Lett. 35, 782 (1979).
[CrossRef]

S. J. Thomas, R. F. Harrison, J. F. Figueira, Appl. Phys. Lett. 40, 200 (1982).
[CrossRef]

P. M. Fauchet, A. E. Siegman, Appl. Phys. Lett. 40, 824 (1982).
[CrossRef]

D. C. Emmony, R. P. Howson, L. J. Willis, Appl. Phys. Lett. 23, 598 (1973).
[CrossRef]

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, Appl. Phys. Lett. 38, 946 (1981).
[CrossRef]

Chem. Phys. Lett. (1)

D. J. Ehrlich, R. M. Osgood, Chem. Phys. Lett. 79, 381 (1981).
[CrossRef]

J. Vac. Sci. Tech. (1)

D. J. Ehrlich, R. M. Osgood, T. F. Deutsch, J. Vac. Sci. Tech. 20, 738 (1982).
[CrossRef]

Phys. Rev. Lett. (1)

S. R. J. Brueck, D. J. Ehrlich, Phys. Rev. Lett. 48, 1678 (1982).
[CrossRef]

Other (2)

J. F. Young, J. E. Sipe, J. S. Preston, H. M. Van Driel, Appl. Phys. Lett. (to be published).

R. M. Walser, M. F. Becker, J. G. Ambrose, D. Y. Sheng, in Laser and Electron-Beam Solid Interactions and Materials Processing, J. F. Gibbons, L. D. Hess, T. W. Sigmon, eds. (North-Holland, New York, 1981).

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Figures (3)

Fig. 1
Fig. 1

SEM micrograph of a thick Cd film deposited photochemically on a Pyrex substrate with a 257.2-nm laser beam using a 1-Torr Cd(CH3)2 ambient. The boxes indicate regions of strong type (i) and type (ii) microstructure (see text). The laser polarization is indicated with an arrow and the scale with a 10-μm horizontal bar at the bottom of the figure.

Fig. 2
Fig. 2

(a) SEM enlargement at 60° viewing angle of a region near box (ii) in Fig. 1. Type (ii) microstructure occurs as reticulation in the vertical direction, transverse to the type (i) structure, which has approximately the same period in the horizontal direction. (b) Normal-incidence view of the same region showing strong type (i) and weak type (iii) structures. A 1-μm scale (horizontal bar) and the laser polarization are indicated.

Fig. 3
Fig. 3

SEM micrograph at a 90° viewing angle showing organized columnar, type (v), structure. A 10-μm scale (horizontal bar) is indicated.

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