Abstract

Herein, a vector scanning subtractive manufacturing technology is proposed to rapidly fabricate smooth micro-optical components, which is based on the vector scanning method and wet etching. Compared with the raster scanning method, the vector scanning method increases processing efficiency by nearly two orders and mitigates a buildup of stress around the laser processed region, avoiding the generation of cracks. The Letter demonstrates the fabrication of three-dimensional (3D) micro-structures with various sizes and morphologies. For example, micro-concave lenses with diameters of 20 µm to 140 µm, heights of 10 µm to 70 µm, and surface roughness of 29 nm are flexibly fabricated on sapphire by vector scanning subtractive manufacturing technology. The results indicate that the technology has broad prospects in the field of monolithic integrated 3D all-solid-state micro-optics.

© 2021 Optical Society of America

Full Article  |  PDF Article
More Like This
Fabrication of nanogap structures through spatially shaped femtosecond laser modification with the assistance of wet chemical etching

Shipeng Zhou, Xiaowei Li, Ji Huang, Zhipeng Wang, Yang Liu, Shuai Gao, Zhijie Xu, and Lan Jiang
Opt. Lett. 46(15) 3560-3563 (2021)

Information integrated glass module fabricated by integrated additive and subtractive manufacturing

Qi Zhang, Jincheng Lei, Yizheng Chen, Jianan Tang, Yongji Wu, Liwei Hua, and Hai Xiao
Opt. Lett. 45(7) 1663-1666 (2020)

Rapid fabrication of high-resolution multi-scale microfluidic devices based on the scanning of patterned femtosecond laser

Chenchu Zhang, Jianming Zhang, Renfei Chen, Jiawen Li, Chaowei Wang, Rui Cao, Jingjing Zhang, Hanchang Ye, Hua Zhai, and Koji Sugioka
Opt. Lett. 45(14) 3929-3932 (2020)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Data Availability

Data underlying the results presented in this paper are not publicly available at this time but may be obtained from the authors upon reasonable request.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription