Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group
Journal Home About Issues in Progress Current Issue All Issues Early Posting

Dynamic white-light interferometry via multiwavelength tilt iteration and sliding local least squares

Mingliang Duan, Jianxin Li, Shuxian Bi, Yi Zong, Caiyun Yu, and Renhui Guo

Not Accessible

Your library or personal account may give you access

Abstract

The growing interest in microprofile measurements for advanced semiconductor manufacturing and electronic glass screens has stimulated the demand for in situ dynamic white-light interferometry (DWLI). However, it is challenging to perform vibration-insensitive measurements because of the broad-spectrum interference. In this Letter, we report a vertical scanning DWLI using multiwavelength tilt iteration and sliding local least squares. Numerical simulations and comparative experiments were conducted to verify the principle and performance of the proposed method. To the best of our knowledge, this is the first time such a DWLI has been proposed to achieve excellent vibration-resistant performance without using complex photoelectric compensation systems.

© 2021 Optical Society of America

Full Article  |  PDF Article
More Like This
Compressed-sensing fiber-optic white light interferometry

Qiang Liu, Shi-Min Li, Da-Peng Zhou, Zhenguo Jing, and Wei Peng
Opt. Lett. 46(19) 4944-4947 (2021)

A three-step least-squares iterative method for tilt phase-shift interferometry

Qian Liu, Yang Wang, Fang Ji, and Jianguo He
Opt. Express 21(24) 29505-29515 (2013)

Optical phasing method based on scanning white-light interferometry for multi-aperture optical telescopes

Yang Li and Sheng-Qian Wang
Opt. Lett. 46(4) 793-796 (2021)

View More...

Supplementary Material (1)

NameDescription
Visualization 1       The jitter in the fringe patterns of the main channel and assistant channel due to environmental vibrations in the step measurement experiment.

Data availability

Data underlying the results presented in this Letter are not publicly available at this time but may be obtained from the authors upon reasonable request.

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters
Select Topics Cancel
Top
       
© Copyright 2024 | Optica Publishing Group. All rights reserved, including rights for text and data mining and training of artificial technologies or similar technologies.
Privacy | Terms of Use