Abstract

We report on micromilling cavities into fused silica by a 1030 nm femtosecond laser using 2.17 GHz bursts. The milled cavities show an increased depth per layer for a higher number of pulses per burst while the ablation efficiency is also increased. The maximum ablation efficiency for the optimum fluence achieved in our experiments is $3.05\;{{\rm mm}^3}/{\rm min}/{\rm W}$ for a burst number of 10, which is 7.4 times higher than for the non-burst condition ($0.41\;{{\rm mm}^3}/{\rm min}/{\rm W}$). Furthermore, the ablation threshold for each sub-pulse is significantly reduced from $0.64 \; {\rm J}/{{\rm cm}^2}$ for the non-burst condition to $0.15\; {\rm J}/{{\rm cm}^2}$ for 10 bursts. Beside the ablation efficiency, the surface roughness is also increased with the increasing burst number, while two ablation behaviors can be distinguished, namely, a gentle ablation regime for lower burst numbers and a coarse ablation regime, dominated by breaking out the surface rather than ablating it.

© 2021 Optical Society of America

High-quality high-throughput silicon laser milling using a 1 kW sub-picosecond laser

Daniel Holder, Rudolf Weber, Christoph Röcker, Gerhard Kunz, David Bruneel, Martin Delaigue, Thomas Graf, and Marwan Abdou Ahmed
Opt. Lett. 46(2) 384-387 (2021)

High-efficiency femtosecond ablation of silicon with GHz repetition rate laser source

Konstantin Mishchik, Guillaume Bonamis, Jie Qiao, John Lopez, Eric Audouard, Eric Mottay, Clemens Hönninger, and Inka Manek-Hönninger
Opt. Lett. 44(9) 2193-2196 (2019)

Systematic study of laser ablation with GHz bursts of femtosecond pulses

Guillaume Bonamis, Eric Audouard, Clemens Hönninger, John Lopez, Konstantin Mishchik, Eric Mottay, and Inka Manek-Hönninger
Opt. Express 28(19) 27702-27714 (2020)

Femtosecond laser ablation by bibursts in the MHz and GHz pulse repetition rates

Andrius Žemaitis, Mantas Gaidys, Paulius Gečys, Martynas Barkauskas, and Mindaugas Gedvilas
Opt. Express 29(5) 7641-7653 (2021)

High-power Yb-based all-fiber laser delivering 300 fs pulses for high-speed ablation-cooled material removal

Parviz Elahi, Önder Akçaalan, Cansu Ertek, Koray Eken, F. Ömer Ilday, and Hamit Kalaycoğlu
Opt. Lett. 43(3) 535-538 (2018)