Abstract
A novel, to the best of our knowledge, mid-infrared chalcogenide (ChG) on magnesium fluoride (${{\rm MgF} _{2}}$) waveguide gas sensor was fabricated by using the lift-off method. ${{\rm MgF} _{2}}$ was used as a lower cladding layer to increase the external confinement factor for enhancing light–gas interaction. Wavelength modulation spectroscopy (WMS) was used in carbon dioxide (${{\rm CO} _{2}}$) detection at the wavelength of 4319 nm (${2315.2}\;{{\rm cm}^{- 1}}$). The limit of detection for the 1-cm-long sensing waveguide based on WMS is ${\sim} {0.3}\%$, which is ${\gt} {8}$ times lower than the same sensor using direct absorption spectroscopy (DAS). The combination of WMS with the waveguide gas sensor provides a new measurement scheme for the performance improvement of on-chip gas detection.
© 2021 Optical Society of America
Full Article | PDF ArticleCorrections
Mingquan Pi, Chuantao Zheng, Huan Zhao, Zihang Peng, Jiaming Lang, Jialin Ji, Lei Liang, Yu Zhang, Yiding Wang, and Frank K. Tittel, "Mid-infrared ChG-on-MgF2 waveguide gas sensor based on wavelength modulation spectroscopy: publisher’s note," Opt. Lett. 46, 5376-5376 (2021)https://opg.optica.org/ol/abstract.cfm?uri=ol-46-21-5376
8 October 2021: A typographical correction was made to the funding section.
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