Abstract

Digital manufacturing technology meets the needs of today’s technological development. However, the post-processing is essential for some digital fabrication methods, such as annealing and ultraviolet (UV) exposure. Femtosecond laser direct writing (FsLDW) has gained considerable attention, because it is a non-photolithographic, non-vacuum, and no heat fabrication method. The photodetectors based on a semiconductor microwire were fabricated via FsLDW. Finally, the responsivity of the fabricated photodetectors based on zinc oxide (ZnO), titanium dioxide (${\rm TiO}_2$), and tin oxide (${\rm SnO}_2$) can reach 14.27, 1.3, and 81 A/W, respectively. The enhanced performance is attributed to the rough and porous surface of ZnO, ${\rm TiO}_2$, and ${\rm SnO}_2$ microwires. The whole preparation process is realized by the programmed control femtosecond laser scanning path. This Letter demonstrates that the fabrication method has potential in the digital manufacturing of high-performance UV photodetectors.

© 2021 Optical Society of America

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