Abstract

We report on a new technique of silicon surface nanostructuring in liquid with a pair of Gaussian-shaped femtosecond laser pulses. The bubble, generated in liquid near the molten silicon surface by the first pulse, serves as a dynamic microscale obstacle for spatial modulation of the intensity profile of the second pulse following at a certain delay via scattering processes. As a result, the circular ripple patterns with anomalously high surface-relief modulation, undersurface annular nanocavities, and interfacial smoothness are produced at the surface. The possibility of the control over the specific pattern through the laser intensity variation is shown.

© 2020 Optical Society of America

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Supplementary Material (2)

NameDescription
Visualization 1       The video illustrates the dynamics of the bubble generated near the molten silicon surface after single-pulse irradiation at high fluence
Visualization 2       The video illustrates the dynamics of the bubble generated near the molten silicon surface after single-pulse irradiation at low fluence

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