SiN<sub>x</sub>–Si interlayer coupler using a gradient index metamaterial

Pengfei Xu; Yanfeng Zhang; Shuailong Zhang; Yujie Chen; Siyuan Yu

doi:10.1364/OL.44.001230

Optics Letters
Vol. 44,
Issue 5,
pp. 1230-1233
(2019)
•https://doi.org/10.1364/OL.44.001230

SiN_x–Si interlayer coupler using a gradient index metamaterial

Pengfei Xu, Yanfeng Zhang, Shuailong Zhang, Yujie Chen, and Siyuan Yu

Not Accessible

Your library or personal account may give you access

Get PDF
Email
Share
Get Citation
Copy Citation Text
Pengfei Xu, Yanfeng Zhang, Shuailong Zhang, Yujie Chen, and Siyuan Yu, "SiN_x–Si interlayer coupler using a gradient index metamaterial," Opt. Lett. 44, 1230-1233 (2019)

Export Citation
- BibTex
- Endnote (RIS)
- HTML
- Plain Text
Citation alert
Save article

Check for updates

Abstract

In this work, we demonstrate a metamaterial (MM)-based ${SiN}_{x} - Si$ interlayer coupler. A gradient index (GRIN) MM was employed to achieve refractive index matching, balancing the large difference in the refractive index between Si ( $\sim 3.42$ ) and ${SiN}_{x}$ ( $\sim 2$ ). In addition, a two-layer ${SiN}_{x}$ interlayer coupler was proposed to further minimize the coupling loss and interlayer crosstalk. Finally, we demonstrated a three-dimensional (3D) ${SiN}_{x} - Si$ interlayer coupler with the $- 0.6 dB$ insertion loss per layer propagation, with the 40 nm 1-dB-bandwidth (1530–1570 nm) and $< - 45 dB$ interlayer crosstalk. These promising results demonstrate the great potential of a GRIN MM-based ${SiN}_{x} - Si$ interlayer coupler in 3D photonic integration.

Full Article | PDF Article

More Like This

Low-loss 3-dimensional waveguide crossing with a parabolic taper interlayer coupler based on a SiN-SiN-Si three-layer platform

Xiaoyan Liu, Lin Han, Xiaoke Ruan, and Tao Chu
Opt. Lett. 48(13) 3487-3490 (2023)

High-efficiency wideband SiN_x-on-SOI grating coupler with low fabrication complexity

Pengfei Xu, Yanfeng Zhang, Zengkai Shao, Lin Liu, Lidan Zhou, Chunchuan Yang, Yujie Chen, and Siyuan Yu
Opt. Lett. 42(17) 3391-3394 (2017)

Ultra-compact low-loss 1 × 4 optical power splitter with splitting ratio of 1∶2∶4∶8 based on two-stage cascaded MMI couplers

Zezheng Li, Yang Liu, Huan Guan, Weihua Han, and Zhiyong Li
Opt. Lett. 44(22) 5622-5625 (2019)

Previous Article Next Article

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Coupler Length	Layer Spacing	Crossing Loss	Transition Loss	Crosstalk	Ref.
$> 50 μm$	410 nm	1 dB	$\sim 0.5 dB$	$< - 49 dB$	[12]
190 μm	850 nm	negligible	$< 0.15 dB$	$< - 56 dB$	[13]
20 μm	720 nm	negligible	$\sim 0.6 dB$	$< - 45 dB$	This work

R1	R2	R3	R4	R5a	R5b	R6a	R6b	R7a	t6	t7	t8	g1	g2	g3	g4	g5	x1
80	90	95	110	120	110	120	110	120	275	325	325	85	85	80	80	80	500
R7b	R8	R9	R10	t1	t2	t3	t4	t5	x2	x3	Λ	$h_{{SiN}_{x}}$	h1	h2	$w_{Si}$	$w_{{SiN}_{x}}$	$L_{{SiN}_{x}}$
110	85	100	100	80	80	80	120	200	5350	8300	300	420	50	260	5450	5250	16250

Coupler Length	Layer Spacing	Crossing Loss	Transition Loss	Crosstalk	Ref.
$> 50 μm$	410 nm	1 dB	$\sim 0.5 dB$	$< - 49 dB$	[12]
190 μm	850 nm	negligible	$< 0.15 dB$	$< - 56 dB$	[13]
20 μm	720 nm	negligible	$\sim 0.6 dB$	$< - 45 dB$	This work

R1	R2	R3	R4	R5a	R5b	R6a	R6b	R7a	t6	t7	t8	g1	g2	g3	g4	g5	x1
80	90	95	110	120	110	120	110	120	275	325	325	85	85	80	80	80	500
R7b	R8	R9	R10	t1	t2	t3	t4	t5	x2	x3	Λ	$h_{{SiN}_{x}}$	h1	h2	$w_{Si}$	$w_{{SiN}_{x}}$	$L_{{SiN}_{x}}$
110	85	100	100	80	80	80	120	200	5350	8300	300	420	50	260	5450	5250	16250

Abstract

Cited By

Figures (6)

Tables (2)

Optics Letters