Abstract

This Letter presents a one-channel method of measurements of a grazing incidence reflection coefficient. The idea is to use the quasi-flat field extreme ultraviolet spectrometer to produce direct and reflected from the sample images of the spectral lines simultaneously at the same detector matrix. The analysis of a set of spectral lines in the working spectral range of the spectrometer gives the spectral dependence of the reflection coefficient. The results of the refection coefficient measurements for a plane ruthenium mirror for grazing angles of 6° and 10° in the spectral range 15–40 nm are presented.

© 2019 Optical Society of America

Grazing-incidence Mirror System for Use with a Grating Spectrometer in the Extreme Ultraviolet

C. R. Negus
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