Abstract

We demonstrate, to the best of our knowledge, the first thermally reconfigurable high-Q silicon carbide (SiC) microring resonators with integrated microheaters on a 3C-SiC-on-insulator platform. We extract a thermo-optic coefficient of around 2.67×105/K for 3C-SiC from wavelength shift of a resonator heated by a hot plate. Finally, we fabricate a 40-μm-radius microring resonator with intrinsic Q of 139,000 at infrared wavelengths (1550nm) after integration with a NiCr microheater. By applying current through the microheater, a resonance shift of 30 pm/mW is achieved in the microring, corresponding to 50mW per π phase shift. This platform offers an easy and reliable way for integration with electronic devices as well as great potential for diverse integrated optics applications.

© 2019 Optical Society of America

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