Abstract

We demonstrate ultrasound detection with 500-μm-diameter photonic-crystal slab (PCS) sensors fabricated from CMOS-compatible technology. An ultrasound signal impinging a PCS sensor causes a local modulation of the refractive index (RI) of the medium (water) in which the PCS is immersed, resulting in a periodic spectral shift of the optical resonance of the PCS. The acoustic sensitivity is found to scale with the index sensitivity S and quality factor Q. A noise equivalent pressure (NEP) of 650 Pa with averaging (7.4Pa/Hz) and relative wavelength shifts of up to 4.3×105MPa1 are measured. The frequency response of the sensors is observed to be flat from 1 to 20 MHz, with the range limited only by our measurement apparatus.

© 2019 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Wide bandwidth dual-frequency ultrasound measurements based on fiber laser sensing technology

Chengang Lyu, Ying Liu, and Chuang Wu
Appl. Opt. 55(19) 5057-5062 (2016)

Sensitivity characteristics of broadband fiber-laser-based ultrasound sensors for photoacoustic microscopy

Xue Bai, Yizhi Liang, Huojiao Sun, Long Jin, Jun Ma, Bai-Ou Guan, and Lidai Wang
Opt. Express 25(15) 17616-17626 (2017)

Optical Fano resonance sensing of bilayer asymmetric photonic crystal slabs as biosensors

Daohan Ge, Jianpei Shi, Ahmed Rezk, Yuan Zhang, Jinxiu Wei, Liqiang Zhang, and Shining Zhu
Appl. Opt. 58(12) 3187-3192 (2019)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription