Development of a differential interference contrast (DIC) stimulated Raman scattering (SRS) microscope is presented. In the apparatus, a coherent SRS signal generated from the sample is overlapped with a reference beam that is also focused on the same sample. The signal intensity correlates with the height difference between the point generating the SRS signal and the focal point of the reference beam. We applied the developed apparatus for imaging of Si surfaces with structures with heights of 50–350 nm. We also obtained the DIC-SRS image of the Si surface buried by liquid crystal. The structures of the interface between Si and liquid crystal were well observed when both the SRS signals due to Si and liquid crystal were utilized. It was also revealed that DIC-SRS microscopy is an effective tool to obtain molecular-selective images of structured interfaces with a height of less than several tens of nanometers buried by optically transparent media.
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