Abstract

We report for the first time on-chip integration of III-nitride voltage-controlled light emitters with visible and ultraviolet (UV) photodiodes (PDs). InGaN/GaN and AlGaN/GaN heterostructures were grown in specific regions by selective-area epitaxy, allowing monolithic integration of versatile devices including visible light emitting diodes (LEDs), visible-light PDs, AlGaN/GaN high electron mobility transistors (HEMTs), and UV-light Schottky barrier (SB) PDs. A serial connection between the LED and HEMT through the epitaxial layers enables a three-terminal voltage-controlled light emitter (HEMT-LED), efficiently converting voltage-controlled signals into visible-light signals that can be coupled into an adjacent visible-light PD generating electrical signals. While the integrated blue HEMT-LED and PD transmits signals carried by visible light, the visible-blind SB-PD on a chip receives external UV light control signals with negligible interference from the on-chip visible-light source. This integration scheme can be extended to open an avenue for developing a variety of applications, such as smart lighting, on-chip optical interconnect, optical wireless communication, and opto-isolators.

© 2018 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Monolithic integration of nitride light emitting diodes and photodetectors for bi-directional optical communication

Zhenyu Jiang, Mahmoud R. M. Atalla, Guanjun You, Li Wang, Xiaoyun Li, Jie Liu, Asim M. Elahi, Lai Wei, and Jian Xu
Opt. Lett. 39(19) 5657-5660 (2014)

Monolithic III-nitride photonic integration toward multifunctional devices

Xumin Gao, Zheng Shi, Yan Jiang, Shuai Zhang, Chuan Qin, Jialei Yuan, Yuhuai Liu, Peter Grünberg, and Yongjin Wang
Opt. Lett. 42(23) 4853-4856 (2017)

Monolithic integration of GaN-based light-emitting diodes and metal-oxide-semiconductor field-effect transistors

Ya-Ju Lee, Zu-Po Yang, Pin-Guang Chen, Yung-An Hsieh, Yung-Chi Yao, Ming-Han Liao, Min-Hung Lee, Mei-Tan Wang, and Jung-Min Hwang
Opt. Express 22(S6) A1589-A1595 (2014)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription