Abstract

Terahertz (THz) polarizers with robust structure and high transmittance are demonstrated using 3D-integrated circuit (IC) technologies. A Cu wire-grid polarizer is sealed and well protected by Si-bonded wafers through a low-temperature eutectic bonding method. Deep reactive-ion etching is used to fabricate the anti-reflection (AR) layers on outward surfaces of bonded wafers. The extinction ratio and transmittance of polarizers are between 20 dB and 33 dB, and 13 dB and 27 dB for 10 μm and 20 μm pitch wire-grids, respectively, and 100% at central frequency, depending on frequency and AR layer thickness. The process of polarizer fabrication is simple from mature semiconductor manufacturing techniques that lead to high yield, low cost, and potential for THz applications.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
1.6:1 bandwidth two-layer antireflection structure for silicon matched to the 190–310  GHz atmospheric window

Fabien Defrance, Cecile Jung-Kubiak, Jack Sayers, Jake Connors, Clare deYoung, Matthew I. Hollister, Hiroshige Yoshida, Goutam Chattopadhyay, Sunil R. Golwala, and Simon J. E. Radford
Appl. Opt. 57(18) 5196-5209 (2018)

Compact electric field sensors based on indirect bonding of lithium niobate to silicon microrings

Li Chen and Ronald M. Reano
Opt. Express 20(4) 4032-4038 (2012)

Direct bonding and beyond

Jan Haisma, Nico Hattu, J. T. C. M. (Dook) Pulles, Esther Steding, and Jan C. G. Vervest
Appl. Opt. 46(27) 6793-6803 (2007)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription