Abstract

We present a systematic study of a stress coefficient of dielectric materials (SiO2, Nb2O5, and HfO2). In particular, we show a thickness dependence of the stress coefficient on layer thickness, which shows that the determination of this coefficient is complex and requires careful analysis. We then apply the different models of the stress coefficient to multilayer structures and show that stress-induced deformation can be precisely predicted in final components with a few percent accuracy.

© 2017 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Postdeposition treatment of IBS coatings for UV applications with optimized thin-film stress properties

Martin Bischoff, Tobias Nowitzki, Oliver Voß, Steffen Wilbrandt, and Olaf Stenzel
Appl. Opt. 53(4) A212-A220 (2014)

Mechanical stress and thermal-elastic properties of oxide coatings for use in the deep-ultraviolet spectral region

Roland Thielsch, Alexandre Gatto, and Norbert Kaiser
Appl. Opt. 41(16) 3211-3217 (2002)

Control of thermal deformation in dielectric mirrors using mechanical design and atomic layer deposition

Nicholas T. Gabriel, Sangho S. Kim, and Joseph J. Talghader
Opt. Lett. 34(13) 1958-1960 (2009)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (2)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription