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Critical dimension metrology of a plasmonic photonic crystal based on Mueller matrix ellipsometry and the reduced Rayleigh equation

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Abstract

A computationally efficient algorithm based on the reduced Rayleigh equation, combined with an optimization scheme, is used to accurately retrieve the morphological parameters of a two-dimensional plasmonic photonic crystal from angle-resolved spectroscopic Mueller matrix ellipsometric measurements. The numerical method is successfully tested against experimental data and gives morphological parameters consistent with SEM and AFM measurements.

© 2017 Optical Society of America

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