Abstract

We report the fabrication and characterization of high index contrast (Δn0.9) GeTe4 channel waveguides on ZnSe substrate for evanescent-field-based biosensing applications in the mid-IR spectral region. GeTe4 films were deposited by RF sputtering and characterized for their structure, composition, transparency, and dispersion. The lift-off technique was used to pattern the waveguide channels. Waveguiding from 2.5–3.7 and 6.4–7.5 μm was demonstrated, and mode intensity profile and estimated propagation losses are given for the 3.5 μm wavelength.

© 2015 Optical Society of America

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