Abstract

Previous research on making low-stray-light gratings is mainly focused on process steps after the photoresist mask has been made. We propose to improve the quality of the photoresist mask directly in exposure. We present a broad-beam scanning exposure method along the grating vector (i.e., in the direction perpendicular to the grating grooves), utilizing a reference grating clamped below the substrate on the translation stage for phase and attitude locking. Scanning-exposed gratings with a size of 40mm×40mm are successfully made, which have straighter grooves and smoother surfaces, and their stray light levels around the first and second diffraction orders are decreased significantly.

© 2015 Optical Society of America

Full Article  |  PDF Article
More Like This
Low-stray-light concave holographic gratings processed by combining the methods of photoresist hot-melting and oxygen-ion ashing

Hui-Kang Chen, Zheng-Ji Ni, Yuan-Shen Huang, Bang-Lian Xu, and Da-Wei Zhang
Appl. Opt. 59(13) 3942-3950 (2020)

Reducing Rowland ghosts in diffraction gratings by dynamic exposure near-field holography

Dakui Lin, Huoyao Chen, Zhengkun Liu, Kay Dietrich, Stefanie Kroker, Thomas Kaesebier, Ying Liu, Ernst-Bernhard Kley, and Yilin Hong
Opt. Lett. 43(4) 811-814 (2018)

Strong enhancement of nano-sized circularly polarized light using an aperture antenna with V-groove structures

Yongfu Cai, Soushi Ikeda, Katsuji Nakagawa, Hiroshi Kikuchi, Naoki Shimidzu, and Takayuki Ishibashi
Opt. Lett. 40(7) 1298-1301 (2015)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription