Abstract

We propose a novel fiber-optic Fabry–Perot interferometric (FFPI) temperature sensor based on differential pressure resulting from thermal expansion of sealed air. A thin silicon diaphragm is sandwiched between two micro-circular cavity-structured Pyrex plates to construct a FP and an air cavity. The thermal expansion of sealed air induces differential pressure variation between cavities and thus the deformation of thin diaphragm, which transfers temperature change into cavity length shift of FP interferometer. Theory analysis results indicate that the temperature-sensitivity can be designed flexibly by choosing the parameters of radius and thickness of silicon diaphragm, and the differential pressure between two cavities. Experimental results demonstrate that the temperature sensitivity of 6.07 nm/°C is achieved with the resolution of 0.10°C under the range of 50°C to 100°C, and the response time is around 1.3 s with temperature change from 28°C to 100°C.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Fiber-optic Fabry–Perot pressure sensor based on low-temperature co-fired ceramic technology for high-temperature applications

Jia Liu, Pinggang Jia, Huixin Zhang, Xiaodan Tian, Hao Liang, Yingping Hong, Ting Liang, Wenyi Liu, and Jijun Xiong
Appl. Opt. 57(15) 4211-4215 (2018)

Fiber-optic Fabry–Perot pressure sensor based on sapphire direct bonding for high-temperature applications

Wangwang Li, Ting Liang, Pinggang Jia, Cheng Lei, Yingping Hong, Yongwei Li, Zong Yao, Wenyi Liu, and Jijun Xiong
Appl. Opt. 58(7) 1662-1666 (2019)

Batch-producible MEMS fiber-optic Fabry–Perot pressure sensor for high-temperature application

Pinggang Jia, Hao Liang, Guocheng Fang, Jiang Qian, Fei Feng, Ting Liang, and Jijun Xiong
Appl. Opt. 57(23) 6687-6692 (2018)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription