Abstract

We present the design, fabrication, and characterization of a temperature insensitive lower-index-mode photonic crystal (PhC) nanobeam (NB) cavity by overlaying SU-8 cladding. The lower-index-mode is utilized to control the amount of light confined in the SU-8 cladding to compensate for the thermo-optic effect of silicon. The temperature sensitivity of the PhC NB cavity can be tuned by changing the radius of the air holes. The temperature dependence of the PhC NB cavity with SU-8 cladding is demonstrated to be 5.1pm/°C over 50°C temperature range. The measured quality factor of the temperature insensitive lower-index-mode PhC NB cavity is 1×104.

© 2015 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High sensitivity temperature sensor based on cascaded silicon photonic crystal nanobeam cavities

Yuguang Zhang, Penghao Liu, Senlin Zhang, Weixi Liu, Jingye Chen, and Yaocheng Shi
Opt. Express 24(20) 23037-23043 (2016)

Post-trimming of photonic crystal nanobeam cavities by controlled electron beam exposure

Yuguang Zhang and Yaocheng Shi
Opt. Express 24(12) 12542-12548 (2016)

Post-fabrication trimming of photonic crystal nanobeam cavities by electron beam irradiation

Shoubao Han and Yaocheng Shi
Opt. Express 26(12) 15908-15913 (2018)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription