Abstract
We report a hybrid thin-film deposition procedure to significantly enhance the reflectivity of La/B-based multilayer structures. This is of relevance for applications of multilayer optics at 6.7-nm wavelength and beyond. Such multilayers showed a reflectance of 64.1% at 6.65 nm measured at 1.5-degrees off-normal incidence at PTB (BESSY-II). This was achieved by a special scheme of La passivation. The La layer was nitridated to avoid formation of the optically unfavorable LaBx compound at the B-on-La interface. To avoid the also undesired BN formation at the La-on-B interface, a time-dosed nitridation at the initial stage was applied. This research revealed a good potential for further increase in the reflectivity of multilayer structures at 6.7 nm.
© 2015 Optical Society of America
Full Article | PDF ArticleMore Like This
Igor A. Makhotkin, Erwin Zoethout, Robbert van de Kruijs, Sergey N. Yakunin, Eric Louis, A. M. Yakunin, V. Banine, S. Müllender, and Fred Bijkerk
Opt. Express 21(24) 29894-29904 (2013)
Philipp Naujok, Sergiy Yulin, Anna Bianco, Nicola Mahne, Norbert Kaiser, and Andreas Tünnermann
Opt. Express 23(4) 4289-4295 (2015)
Igor A. Makhotkin, Erwin Zoethout, Eric Louis, Andrei M. Yakunin, Stephan Müllender, and Fred Bijkerk
Opt. Express 20(11) 11778-11786 (2012)