Abstract
We report low-loss channel waveguides in a single-crystal thin film achieved using the annealed proton exchange process. The simulation indicated that the mode size of the phase channel waveguide could be as small as . Waveguides with several different widths were fabricated, and the 4 μm-wide channel waveguide exhibited a mode size of . Its propagation loss was accurately evaluated to be as low as 0.6 dB/cm at 1.55 μm. The single-crystal lattice structure in the thin film was preserved by a moderate annealed proton exchange process (5 min of proton exchange at 200°C, followed by 3 h annealing at 350°C), as revealed by measuring the extraordinary refractive index change and x ray rocking curve. A longer proton exchange time followed by stronger annealing would destroy the crystal structure and induce a high loss in the channel waveguides.
© 2015 Optical Society of America
Full Article | PDF ArticleMore Like This
Lutong Cai, Shuang Li Huangpu Han, and Hui Hu
Opt. Express 23(2) 1240-1248 (2015)
Lutong Cai, Ruirui Kong, Yiwen Wang, and Hui Hu
Opt. Express 23(22) 29211-29221 (2015)
Huangpu Han, Lutong Cai, Bingxi Xiang, Yunpeng Jiang, and Hui Hu
Opt. Mater. Express 5(11) 2634-2641 (2015)