Fabrication of nanoscale lithium niobate waveguides for second-harmonic generation

Abstract

Nanoscale waveguides are basic building blocks of integrated optical devices. Especially, waveguides made from nonlinear optical materials, such as lithium niobate, allow access to a broad range of applications using second-order nonlinear frequency conversion processes. Based on a lithium niobate on insulator substrate, millimeter-long nanoscale waveguides were fabricated with widths as small as 200 nm. The fabrication was done by means of potassium hydroxide-assisted ion-beam-enhanced etching. The waveguides were optically characterized in the near infrared wavelength range showing phase-matched second-harmonic generation.

© 2015 Optical Society of America

Highly tunable efficient second-harmonic generation in a lithium niobate nanophotonic waveguide

Rui Luo, Yang He, Hanxiao Liang, Mingxiao Li, and Qiang Lin
Optica 5(8) 1006-1011 (2018)

Second harmonic generation in nano-structured thin-film lithium niobate waveguides

Cheng Wang, Xiao Xiong, Nicolas Andrade, Vivek Venkataraman, Xi-Feng Ren, Guang-Can Guo, and Marko Lončar
Opt. Express 25(6) 6963-6973 (2017)

Low-voltage tunable second-harmonic generation in an x-cut periodically poled lithium niobate waveguide

F. Généreux, G. Baldenberger, B. Bourliaguet, and R. Vallée
Opt. Lett. 32(9) 1108-1110 (2007)

Fabrication of ridge waveguides in zinc-substituted lithium niobate by means of ion-beam enhanced etching

Holger Hartung, Ernst-Berhard Kley, Andreas Tünnermann, Thomas Gischkat, Frank Schrempel, and Werner Wesch
Opt. Lett. 33(20) 2320-2322 (2008)

Second harmonic generation in periodically poled lithium niobate waveguides with stitching errors

Maxim Neradovskiy, Elizaveta Neradovskaia, Dmitry Chezganov, Evgeny Vlasov, Vladimir Ya. Shur, Hervé Tronche, Florent Doutre, Getachew Ayenew, Pascal Baldi, Marc De Micheli, and Carlos Montes
J. Opt. Soc. Am. B 35(2) 331-336 (2018)