Abstract

Blazed gratings with a theoretical blaze angle of 35°16′ are etched into (110) GaAs surfaces by preferential chemical etching, using a photoresist mask. A maximum total diffraction efficiency of 15% was measured at 6328 Å from a blazed grating with a 2.23-μm period, and the diffracted light was concentrated in a single order. To demonstrate the applicability of such gratings in integrated optics, gratings with periods in a 3000- to 5000-Å range were made, and epitaxial growth on (110) GaAs substrates was carried out using a method of growth that deposits high-quality, nearly defect-free layers on such substrates.

© 1979 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High-efficiency multilayer-coated ion-beam-etched blazed grating in the extreme-ultraviolet wavelength region

Hui Lin, Lichao Zhang, Lifeng Li, Chunshui Jin, Hongjun Zhou, and Tonglin Huo
Opt. Lett. 33(5) 485-487 (2008)

Vacuum-ultraviolet blazed silicon grating anisotropically etched by native-oxide mask

Bin Sheng, Xiangdong Xu, Ying Liu, Yilin Hong, Hongjun Zhou, Tonglin Huo, and Shaojun Fu
Opt. Lett. 34(8) 1147-1149 (2009)

Generation of periodic surface corrugations

L. F. Johnson, G. W. Kammlott, and K. A. Ingersoll
Appl. Opt. 17(8) 1165-1181 (1978)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (3)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription