Monolithically integrated, ultrahigh-frequency cavity nano-optoelectromechanical system with on-chip germanium waveguide photodetector

Abstract

We report the first demonstration of a cavity optoelectromechanical system integrated monolithically with a high-efficiency germanium photodetector on a CMOS-compatible platform. Mechanical resonances are recorded from 0.177 to 2.003 GHz with quality factor up to 4810. These monolithically integrated devices have paved the way for a new category of on-chip optoelectronic components that take the advantage of the resonant properties of the mechanical element and enables new applications such as ultracompact microwave oscillators, optomechanical sensors, and phase shifters.

© 2014 Optical Society of America

Monolithic integration of germanium-on-insulator p-i-n photodetector on silicon

Ju Hyung Nam, Farzaneh Afshinmanesh, Donguk Nam, Woo Shik Jung, Theodore I. Kamins, Mark L. Brongersma, and Krishna C. Saraswat
Opt. Express 23(12) 15816-15823 (2015)

A chip-scale integrated cavity-electro-optomechanics platform

M. Winger, T. D. Blasius, T. P. Mayer Alegre, A. H. Safavi-Naeini, S. Meenehan, J. Cohen, S. Stobbe, and O. Painter
Opt. Express 19(25) 24905-24921 (2011)

Monolithic integration and synchronous operation of germanium photodetectors and silicon variable optical attenuators

Sungbong Park, Tai Tsuchizawa, Toshifumi Watanabe, Hiroyuki Shinojima, Hidetaka Nishi, Koji Yamada, Yasuhiko Ishikawa, Kazumi Wada, and Seiichi Itabashi
Opt. Express 18(8) 8412-8421 (2010)

Three-dimensional (3D) monolithically integrated photodetector and WDM receiver based on bulk silicon wafer

Junfeng Song, Xianshu Luo, Xiaoguang Tu, Lianxi Jia, Qing Fang, Tsung-Yang Liow, Mingbin Yu, and Guo-Qiang Lo
Opt. Express 22(16) 19546-19554 (2014)

Novel evanescent-coupled germanium electro-absorption modulator featuring monolithic integration with germanium p-i-n photodetector

Andy Eu-Jin Lim, Tsung-Yang Liow, Fang Qing, Ning Duan, Liang Ding, Mingbin Yu, Guo-Qiang Lo, and Dim-Lee Kwong
Opt. Express 19(6) 5040-5046 (2011)