Abstract

A planar broadband metamaterial absorber with high absorptivity working at terahertz frequencies was designed and fabricated in this work. Two nested back-to-back split-ring resonators (BSRRs) constitute a single resonator, which achieves three strong resonances, with two of them merged into a broadband peak. Cobalt silicide and parylene-C were innovatively applied as ground plane and dielectric spacer. The nested BSRR absorber experimentally realizes a bandwidth of 0.66 THz with the absorptivity above 0.8, and the highest absorptivity reaches 0.97. Taking the central frequency at 2.74 THz, the measured FWHM is 47% and the Q factor is 2.13.

© 2014 Optical Society of America

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2013 (3)

2012 (5)

F. B. P. Niesler, J. K. Gansel, S. Fischbach, and M. Wegener, Appl. Phys. Lett. 100, 203508 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S. N. Luo, A. J. Taylor, and H. T. Chen, Opt. Lett. 37, 154 (2012).
[CrossRef]

F. Alves, B. Kearney, D. Grbovic, and G. Karunasiri, Opt. Express 20, 21025 (2012).
[CrossRef]

2011 (2)

2010 (1)

2008 (3)

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

H. Tao, N. I. Landy, C. M. Bingham, Z. Xin, R. D. Averitt, and W. J. Padilla, Opt. Express 16, 7181 (2008).
[CrossRef]

2007 (2)

V. M. Shalaev, Nat. Photonics 1, 41 (2007).
[CrossRef]

M. Tonouchi, Nat. Photonics 1, 97 (2007).
[CrossRef]

2006 (2)

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

D. Schurig, J. J. Mock, and D. R. Smith, Appl. Phys. Lett. 88, 041109 (2006).
[CrossRef]

2005 (1)

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

2001 (1)

R. A. Shelby, Science 292, 77 (2001).
[CrossRef]

Alves, F.

Averitt, R.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Averitt, R. D.

Azad, A. K.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

Bingham, C.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Bingham, C. M.

Brueck, S.

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Chen, H. T.

Chen, H.-T.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

Chen, L. Y.

Cheng, D.

Choi, E. H.

Chowdhury, D. R.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S. N. Luo, A. J. Taylor, and H. T. Chen, Opt. Lett. 37, 154 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

Cummer, S. A.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

Cumming, D. R. S.

Deng, L.

Dong, G.

Fan, K.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Fan, W.

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Fischbach, S.

F. B. P. Niesler, J. K. Gansel, S. Fischbach, and M. Wegener, Appl. Phys. Lett. 100, 203508 (2012).
[CrossRef]

Gansel, J. K.

F. B. P. Niesler, J. K. Gansel, S. Fischbach, and M. Wegener, Appl. Phys. Lett. 100, 203508 (2012).
[CrossRef]

Grant, J.

Grbovic, D.

Gu, J.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Han, J.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Huang, L.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S. N. Luo, A. J. Taylor, and H. T. Chen, Opt. Lett. 37, 154 (2012).
[CrossRef]

Jang, W. H.

Jun Cui, T.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Justice, B. J.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

Karunasiri, G.

Kearney, B.

Khalid, A.

Kim, K. W.

Landy, N.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

Landy, N. I.

Lavrik, N. V.

Lee, Y.

Lei, Y.

Y. Lei, “Research on parylene-C filling in micro/nano gaps and nanoparticle crystal,” Ph.D. thesis (Peking University, 2011).

Liu, L.

Luo, S. N.

Luo, S.-N.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

Ma, Y.

Malloy, K.

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Mock, J.

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

Mock, J. J.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

D. Schurig, J. J. Mock, and D. R. Smith, Appl. Phys. Lett. 88, 041109 (2006).
[CrossRef]

Niesler, F. B. P.

F. B. P. Niesler, J. K. Gansel, S. Fischbach, and M. Wegener, Appl. Phys. Lett. 100, 203508 (2012).
[CrossRef]

Osgood, R.

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Padilla, W.

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Padilla, W. J.

Panoiu, N.

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Park, J. W.

Pendry, J. B.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

Pilon, D.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Qian, Y. Yu.

Ramani, S.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S. N. Luo, A. J. Taylor, and H. T. Chen, Opt. Lett. 37, 154 (2012).
[CrossRef]

Reiten, M. T.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S. N. Luo, A. J. Taylor, and H. T. Chen, Opt. Lett. 37, 154 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

Rhee, J. Y.

Saha, S.

Sailing, H.

Sajuyigbe, S.

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

Schurig, D.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

D. Schurig, J. J. Mock, and D. R. Smith, Appl. Phys. Lett. 88, 041109 (2006).
[CrossRef]

Shalaev, V. M.

V. M. Shalaev, Nat. Photonics 1, 41 (2007).
[CrossRef]

Shelby, R. A.

R. A. Shelby, Science 292, 77 (2001).
[CrossRef]

Shen, X.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Shrekenhamer, D.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Smith, D.

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

Smith, D. R.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

D. Schurig, J. J. Mock, and D. R. Smith, Appl. Phys. Lett. 88, 041109 (2006).
[CrossRef]

Starr, A. F.

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

Strikwerda, A.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Sun, J.

Tao, H.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

H. Tao, N. I. Landy, C. M. Bingham, Z. Xin, R. D. Averitt, and W. J. Padilla, Opt. Express 16, 7181 (2008).
[CrossRef]

Taylor, A. J.

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S. N. Luo, A. J. Taylor, and H. T. Chen, Opt. Lett. 37, 154 (2012).
[CrossRef]

Tonouchi, M.

M. Tonouchi, Nat. Photonics 1, 97 (2007).
[CrossRef]

Tuong, P. V.

Wegener, M.

F. B. P. Niesler, J. K. Gansel, S. Fischbach, and M. Wegener, Appl. Phys. Lett. 100, 203508 (2012).
[CrossRef]

Weng, X.

Xie, J.

Xin, Z.

Yang, Y.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Yi, J.

Zang, Y.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Zhang, N.

Zhang, S.

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Zhang, W.

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

Zhang, X.

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Zhou, J.

Zhou, P.

Appl. Phys. Lett. (4)

F. B. P. Niesler, J. K. Gansel, S. Fischbach, and M. Wegener, Appl. Phys. Lett. 100, 203508 (2012).
[CrossRef]

L. Huang, D. R. Chowdhury, S. Ramani, M. T. Reiten, S.-N. Luo, A. K. Azad, A. J. Taylor, and H.-T. Chen, Appl. Phys. Lett. 101, 101102 (2012).
[CrossRef]

X. Shen, Y. Yang, Y. Zang, J. Gu, J. Han, W. Zhang, and T. Jun Cui, Appl. Phys. Lett. 101, 154102 (2012).
[CrossRef]

D. Schurig, J. J. Mock, and D. R. Smith, Appl. Phys. Lett. 88, 041109 (2006).
[CrossRef]

J. Opt. Soc. Am. B (1)

Nat. Photonics (2)

V. M. Shalaev, Nat. Photonics 1, 41 (2007).
[CrossRef]

M. Tonouchi, Nat. Photonics 1, 97 (2007).
[CrossRef]

Opt. Express (5)

Opt. Lett. (3)

Phys. Rev. B (1)

H. Tao, C. Bingham, A. Strikwerda, D. Pilon, D. Shrekenhamer, N. Landy, K. Fan, X. Zhang, W. Padilla, and R. Averitt, Phys. Rev. B 78, 241103(R) (2008).

Phys. Rev. Lett. (2)

N. Landy, S. Sajuyigbe, J. Mock, D. Smith, and W. Padilla, Phys. Rev. Lett. 100, 207402 (2008).
[CrossRef]

S. Zhang, W. Fan, N. Panoiu, K. Malloy, R. Osgood, and S. Brueck, Phys. Rev. Lett. 95, 137404 (2005).
[CrossRef]

Science (2)

R. A. Shelby, Science 292, 77 (2001).
[CrossRef]

D. Schurig, J. J. Mock, B. J. Justice, S. A. Cummer, J. B. Pendry, A. F. Starr, and D. R. Smith, Science 314, 977 (2006).
[CrossRef]

Other (1)

Y. Lei, “Research on parylene-C filling in micro/nano gaps and nanoparticle crystal,” Ph.D. thesis (Peking University, 2011).

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Figures (7)

Fig. 1.
Fig. 1.

Schematic diagram of (a) perspective view and (b) top view of the unit cell.

Fig. 2.
Fig. 2.

Simulated transmission spectrum of the nested BSRR MAs, and absorption spectra of the nested and single BSRR MAs.

Fig. 3.
Fig. 3.

Simulated surface currents distributions at (a) 0.89 THz, (b) 2.45 THz, and (c) 2.87 THz. (d) Current loops and directions at the three resonance frequencies.

Fig. 4.
Fig. 4.

Simulated absorption spectra of the nested BSRR MAs with 4.0, 5.9, and 9.3 μm thick dielectric layers.

Fig. 5.
Fig. 5.

Microscope images of the fabricated (a) nested BSRR and (b) single BSRR MAs.

Fig. 6.
Fig. 6.

Measured transmission spectrum of the nested BSRR MAs and absorption spectra of the nested and single BSRR MAs.

Fig. 7.
Fig. 7.

Measured absorption spectra of the MAs with 5.9 and 9.3 μm thick dielectric layer.

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