Abstract

A 16-element optical phased array integrated on chip is presented for achieving two-dimensional (2D) optical beam steering. The device is fabricated on the silicon-on-insulator platform with a 250 nm silicon device layer. Steering is achieved via a combination of wavelength tuning and thermo-optic phase shifting with a switching power of Pπ=20  mW per channel. Using a silicon waveguide grating with a polycrystalline silicon overlay enables narrow far field beam widths while mitigating the precise etching needed for conventional shallow etch gratings. Using this system, 2D steering across a 20°×15° field of view is achieved with a sidelobe level better than 10 dB and with beam widths of 1.2°×0.5°.

© 2014 Optical Society of America

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2013 (1)

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

2012 (3)

2011 (3)

2010 (1)

2009 (3)

2006 (1)

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[CrossRef]

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[CrossRef]

Bovington, J. T.

Bowers, J.

Cheben, P.

Chen, R. T.

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, Opt. Express 20, 21722 (2012).
[CrossRef]

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, Appl. Phys. Lett. 99, 051104 (2011).
[CrossRef]

Chen, X.

Cheng, Z.

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Covey, J.

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, Opt. Express 20, 21722 (2012).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
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Dimitropoulos, D.

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Fathpour, S.

B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, and O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).
[CrossRef]

Fung, C. K.

Halir, R.

Heck, M.

Heikenfeld, J.

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Hosseini, A.

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, Opt. Express 20, 21722 (2012).
[CrossRef]

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, Appl. Phys. Lett. 99, 051104 (2011).
[CrossRef]

Hosseini, E. S.

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

Houdré, R.

Jágerská, J.

Jalali, B.

B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, and O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).
[CrossRef]

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Kwong, D.

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, Opt. Express 20, 21722 (2012).
[CrossRef]

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, Appl. Phys. Lett. 99, 051104 (2011).
[CrossRef]

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Le Thomas, N.

Ma, R.

McManamon, P. F.

P. F. McManamon, P. J. Bos, M. J. Escuti, J. Heikenfeld, S. Serati, H. Xie, and E. A. Watson, Proc. IEEE 97, 1078 (2009).
[CrossRef]

Molina-Fernández, Í.

Peters, J. D.

Raghunathan, V.

B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, and O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).
[CrossRef]

Schmid, J.

Serati, S.

P. F. McManamon, P. J. Bos, M. J. Escuti, J. Heikenfeld, S. Serati, H. Xie, and E. A. Watson, Proc. IEEE 97, 1078 (2009).
[CrossRef]

Shori, R.

B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, and O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).
[CrossRef]

Stafsudd, O.

B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, and O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).
[CrossRef]

Subbaraman, H.

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Sun, J.

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

Timurdogan, E.

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

Tsang, H. K.

Van Acoleyen, K.

Wangüemert-Pérez, J. G.

Watson, E. A.

P. F. McManamon, P. J. Bos, M. J. Escuti, J. Heikenfeld, S. Serati, H. Xie, and E. A. Watson, Proc. IEEE 97, 1078 (2009).
[CrossRef]

Watts, M. R.

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

Xie, H.

P. F. McManamon, P. J. Bos, M. J. Escuti, J. Heikenfeld, S. Serati, H. Xie, and E. A. Watson, Proc. IEEE 97, 1078 (2009).
[CrossRef]

Xu, D.-X.

Xu, K.

Xu, X.

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, Opt. Express 20, 21722 (2012).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Yaacobi, A.

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

Zhang, Y.

D. Kwong, J. Covey, A. Hosseini, Y. Zhang, X. Xu, and R. T. Chen, Opt. Express 20, 21722 (2012).
[CrossRef]

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, Appl. Phys. Lett. 99, 051104 (2011).
[CrossRef]

Appl. Phys. Lett. (2)

D. Kwong, A. Hosseini, Y. Zhang, and R. T. Chen, Appl. Phys. Lett. 99, 051104 (2011).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

B. Jalali, V. Raghunathan, R. Shori, S. Fathpour, D. Dimitropoulos, and O. Stafsudd, IEEE J. Sel. Top. Quantum Electron. 12, 1618 (2006).
[CrossRef]

Nature (1)

J. Sun, E. Timurdogan, A. Yaacobi, E. S. Hosseini, and M. R. Watts, Nature 493, 195 (2013).
[CrossRef]

Opt. Express (2)

Opt. Lett. (5)

Proc. IEEE (1)

P. F. McManamon, P. J. Bos, M. J. Escuti, J. Heikenfeld, S. Serati, H. Xie, and E. A. Watson, Proc. IEEE 97, 1078 (2009).
[CrossRef]

Other (1)

P. Cheben, S. Janz, B. Lamontagne, and D.-X. Xu, “Optical off-chip interconnects in multichannel planar waveguide devices,” U.S. patent application2005/0141808 A1 (December21, 2004).

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