Abstract

We present the potential realization of multiline optical filters by the integration of different periodic gratings, which are implemented on an HfO2-on-silicon platform. Supporting arms are used to manage the relief of residual stress to obtain freestanding HfO2 gratings. The spectral properties are calculated by the rigorous coupled wave analysis method and measured by angular-resolved microreflectance. Multiple symmetric double resonances occur at the normal incidence, and asymmetric double resonances, which are attributed to the superposition of guided-mode resonances caused by different periodic gratings, are clearly observed under the off-normal incidence. The experimental results indicate that our proposed grating structures are promising for the realization of multiline filters.

© 2014 Optical Society of America

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