Abstract

In this Letter, we report a technique to etch giant aspect ratio nanostructures in lithium niobate. An 8 μm long Bragg grating on a Ti:LiNbO3 ridge waveguide was fabricated by combining optical-grade dicing and focused ion beam milling. The reflectivity was evaluated using an optical coherence tomography system: it is measured to be 53% for the TM wave and 47% for the TE wave. We study by 2D-FDTD the modeled behavior of the electromagnetic field when an angle exists between two consecutive sidewalls of the grating in order to understand the difference between ideal Bragg grating and experimental samples. These simulations allow us to optimize the parameters in order to increase the reflection of the grating up to 80%.

© 2014 Optical Society of America

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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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    [CrossRef]
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2012 (3)

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

W. Horn, S. Kroesen, J. Herrmann, J. Imbrock, and C. Denz, Opt. Express 20, 26922 (2012).
[CrossRef]

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

2011 (2)

N. Courjal, J. Dahdah, G. Ulliac, P. Seviallano, B. Guichardaz, and F. Baida, Opt. Express 19, 23008 (2011).
[CrossRef]

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

2010 (1)

2009 (1)

2008 (1)

2007 (1)

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

2005 (1)

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

2002 (1)

B.-E. Benkelfat, R. Ferrière, B. Wacogne, and P. Mollier, IEEE Photon. Technol. Lett. 14, 1430 (2002).
[CrossRef]

2000 (1)

J. Hukriede, D. Kip, and E. Kratzig, J. Opt. A 2, 481 (2000).
[CrossRef]

1999 (1)

H. Feng, R. F. Tavlykaev, and R. V. Ramaswamy, Electron. Lett. 35, 1636 (1999).
[CrossRef]

1974 (1)

I. P. Kaminov, V. Ramaswamy, R. V. Schmidt, and E. H. Turner, Appl. Phys. Lett. 24, 622 (1974).
[CrossRef]

Baida, F.

Baida, F. I.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

Bainier, C.

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

Benkelfat, B.-E.

B.-E. Benkelfat, R. Ferrière, B. Wacogne, and P. Mollier, IEEE Photon. Technol. Lett. 14, 1430 (2002).
[CrossRef]

Bernal, M.-P.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

G. W. Burr, S. Diziain, and M.-P. Bernal, Opt. Express 16, 6302 (2008).
[CrossRef]

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

Burr, G. W.

Courjal, N.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

N. Courjal, J. Dahdah, G. Ulliac, P. Seviallano, B. Guichardaz, and F. Baida, Opt. Express 19, 23008 (2011).
[CrossRef]

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

Dahdah, J.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

N. Courjal, J. Dahdah, G. Ulliac, P. Seviallano, B. Guichardaz, and F. Baida, Opt. Express 19, 23008 (2011).
[CrossRef]

Dell’Innocenti, R.

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

Denz, C.

Diziain, S.

Feng, H.

H. Feng, R. F. Tavlykaev, and R. V. Ramaswamy, Electron. Lett. 35, 1636 (1999).
[CrossRef]

Ferrière, R.

B.-E. Benkelfat, R. Ferrière, B. Wacogne, and P. Mollier, IEEE Photon. Technol. Lett. 14, 1430 (2002).
[CrossRef]

Guarino, A.

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

Guichardaz, B.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

N. Courjal, J. Dahdah, G. Ulliac, P. Seviallano, B. Guichardaz, and F. Baida, Opt. Express 19, 23008 (2011).
[CrossRef]

Günter, P.

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

Herrmann, J.

Horn, W.

Hu, H.

Huang, X.

Hukriede, J.

J. Hukriede, D. Kip, and E. Kratzig, J. Opt. A 2, 481 (2000).
[CrossRef]

Ilichev, I.

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Imbrock, J.

Kaminov, I. P.

I. P. Kaminov, V. Ramaswamy, R. V. Schmidt, and E. H. Turner, Appl. Phys. Lett. 24, 622 (1974).
[CrossRef]

Kip, D.

J. Hukriede, D. Kip, and E. Kratzig, J. Opt. A 2, 481 (2000).
[CrossRef]

Kratzig, E.

J. Hukriede, D. Kip, and E. Kratzig, J. Opt. A 2, 481 (2000).
[CrossRef]

Kroesen, S.

Lacour, F.

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

Lecestre, A.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

Lu, H.-H.

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

Mollier, P.

B.-E. Benkelfat, R. Ferrière, B. Wacogne, and P. Mollier, IEEE Photon. Technol. Lett. 14, 1430 (2002).
[CrossRef]

Poberaj, G.

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

Ramaswamy, R. V.

H. Feng, R. F. Tavlykaev, and R. V. Ramaswamy, Electron. Lett. 35, 1636 (1999).
[CrossRef]

Ramaswamy, V.

I. P. Kaminov, V. Ramaswamy, R. V. Schmidt, and E. H. Turner, Appl. Phys. Lett. 24, 622 (1974).
[CrossRef]

Rao Vanga, R.

Rauch, J.-Y.

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

Rezzonico, D.

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

Ricken, R.

Sabac, A.

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

Sadani, B.

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

Schmidt, R. V.

I. P. Kaminov, V. Ramaswamy, R. V. Schmidt, and E. H. Turner, Appl. Phys. Lett. 24, 622 (1974).
[CrossRef]

Seviallano, P.

Shamray, A.

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Sohler, W.

Soto Ortiz, H.

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Spajer, M.

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

Stepanov, S.

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Tavlykaev, R. F.

H. Feng, R. F. Tavlykaev, and R. V. Ramaswamy, Electron. Lett. 35, 1636 (1999).
[CrossRef]

Toguzov, N.

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Turner, E. H.

I. P. Kaminov, V. Ramaswamy, R. V. Schmidt, and E. H. Turner, Appl. Phys. Lett. 24, 622 (1974).
[CrossRef]

Ulliac, G.

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

N. Courjal, J. Dahdah, G. Ulliac, P. Seviallano, B. Guichardaz, and F. Baida, Opt. Express 19, 23008 (2011).
[CrossRef]

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

Urquidez, D. N.

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Wacogne, B.

B.-E. Benkelfat, R. Ferrière, B. Wacogne, and P. Mollier, IEEE Photon. Technol. Lett. 14, 1430 (2002).
[CrossRef]

Wu, Z.

Zhou, Z.

Appl. Phys. B (1)

D. N. Urquidez, S. Stepanov, H. Soto Ortiz, N. Toguzov, I. Ilichev, and A. Shamray, Appl. Phys. B 106, 51 (2012).
[CrossRef]

Appl. Phys. Lett. (1)

I. P. Kaminov, V. Ramaswamy, R. V. Schmidt, and E. H. Turner, Appl. Phys. Lett. 24, 622 (1974).
[CrossRef]

Electron. Lett. (1)

H. Feng, R. F. Tavlykaev, and R. V. Ramaswamy, Electron. Lett. 35, 1636 (1999).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

B.-E. Benkelfat, R. Ferrière, B. Wacogne, and P. Mollier, IEEE Photon. Technol. Lett. 14, 1430 (2002).
[CrossRef]

J. Opt. A (1)

J. Hukriede, D. Kip, and E. Kratzig, J. Opt. A 2, 481 (2000).
[CrossRef]

J. Opt. Soc. Am. B (1)

J. Phys. D (1)

N. Courjal, B. Guichardaz, G. Ulliac, J.-Y. Rauch, B. Sadani, H.-H. Lu, and M.-P. Bernal, J. Phys. D 44, 305101 (2011).
[CrossRef]

Microelectron. Eng. (1)

G. Ulliac, A. Lecestre, B. Guichardaz, J. Dahdah, F. I. Baida, M.-P. Bernal, and N. Courjal, Microelectron. Eng. 97, 185 (2012).
[CrossRef]

Nat. Photonics (1)

A. Guarino, G. Poberaj, D. Rezzonico, R. Dell’Innocenti, and P. Günter, Nat. Photonics 1, 407 (2007).
[CrossRef]

Opt. Express (4)

Opt. Mater. (1)

F. Lacour, N. Courjal, M.-P. Bernal, A. Sabac, C. Bainier, and M. Spajer, Opt. Mater. 27, 1421 (2005).
[CrossRef]

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