Abstract

We experimentally show that the generation and erasure of femtosecond laser-induced periodic surface structures on nanoparticle-covered silicon inducted by irradiation with a single laser pulse (800 nm, 120 fs, linear polarization) depend on the pulse fluence. We propose that this is due to competition between periodic surface structuring originating from the interference of incident light with surface plasmon polaritons and surface smoothing associated with surface melting. Experimental results are supported by theoretical analysis of transient surface modifications based on combining the two-temperature model and the Drude model.

© 2014 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. Hamdorf, M. Olson, C. Lin, L. Jiang, J. Zhou, H. Xiao, and H. Tsai, Opt. Lett. 36, 3353 (2011).
    [CrossRef]
  2. A. Vorobyev and C. Guo, Opt. Express 19, A1031 (2011).
    [CrossRef]
  3. T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
    [CrossRef]
  4. J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
    [CrossRef]
  5. M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
    [CrossRef]
  6. B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
    [CrossRef]
  7. A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
    [CrossRef]
  8. J. Bonse, A. Rosenfeld, and J. Kruger, J. Appl. Phys. 106, 104910 (2009).
    [CrossRef]
  9. G. Obara, N. Maeda, T. Miyanishi, M. Terakawa, N. Nedyalkov, and M. Obara, Opt. Express 19, 19093 (2011).
    [CrossRef]
  10. J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
    [CrossRef]
  11. J. Reif, O. Varlamova, and F. Costache, Appl. Phys. A 92, 1019 (2008).
    [CrossRef]
  12. M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
    [CrossRef]
  13. S. Sundaram and E. Mazur, Nat. Mater. 1, 217 (2002).
    [CrossRef]
  14. K. Sokolowski-Tinten and D. Von der Linde, Phys. Rev. B 61, 2643 (2000).
    [CrossRef]
  15. J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
    [CrossRef]
  16. J. Bonse and J. Kruger, J. Appl. Phys. 108, 034903 (2010).
    [CrossRef]
  17. T. Choi and C. Grigoropoulos, J. Appl. Phys. 92, 4918 (2002).
    [CrossRef]
  18. D. Bäuerle, Laser Processing and Chemistry (Springer, 2011).
  19. H. S. Sim, S. H. Lee, and K. G. Kang, Microsyst. Technol. 14, 1439 (2008).
    [CrossRef]
  20. S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
    [CrossRef]
  21. J. K. Chen, D. Y. Tzou, and J. E. Beraun, Int. J. Heat Mass Transf. 48, 501 (2005).
    [CrossRef]
  22. G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
    [CrossRef]
  23. D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
    [CrossRef]
  24. J. Bonse, S. M. Wiggins, and J. Solis, J. Appl. Phys. 96, 2352 (2004).
    [CrossRef]

2013 (1)

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

2012 (1)

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

2011 (5)

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

A. Hamdorf, M. Olson, C. Lin, L. Jiang, J. Zhou, H. Xiao, and H. Tsai, Opt. Lett. 36, 3353 (2011).
[CrossRef]

A. Vorobyev and C. Guo, Opt. Express 19, A1031 (2011).
[CrossRef]

G. Obara, N. Maeda, T. Miyanishi, M. Terakawa, N. Nedyalkov, and M. Obara, Opt. Express 19, 19093 (2011).
[CrossRef]

J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
[CrossRef]

2010 (1)

J. Bonse and J. Kruger, J. Appl. Phys. 108, 034903 (2010).
[CrossRef]

2009 (2)

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

J. Bonse, A. Rosenfeld, and J. Kruger, J. Appl. Phys. 106, 104910 (2009).
[CrossRef]

2008 (2)

J. Reif, O. Varlamova, and F. Costache, Appl. Phys. A 92, 1019 (2008).
[CrossRef]

H. S. Sim, S. H. Lee, and K. G. Kang, Microsyst. Technol. 14, 1439 (2008).
[CrossRef]

2007 (1)

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

2005 (1)

J. K. Chen, D. Y. Tzou, and J. E. Beraun, Int. J. Heat Mass Transf. 48, 501 (2005).
[CrossRef]

2004 (1)

J. Bonse, S. M. Wiggins, and J. Solis, J. Appl. Phys. 96, 2352 (2004).
[CrossRef]

2003 (1)

S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
[CrossRef]

2002 (4)

T. Choi and C. Grigoropoulos, J. Appl. Phys. 92, 4918 (2002).
[CrossRef]

S. Sundaram and E. Mazur, Nat. Mater. 1, 217 (2002).
[CrossRef]

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
[CrossRef]

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

2000 (1)

K. Sokolowski-Tinten and D. Von der Linde, Phys. Rev. B 61, 2643 (2000).
[CrossRef]

1992 (1)

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

1978 (1)

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Auston, D. H.

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Barberoglou, M.

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

Baudach, S.

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Bäuerle, D.

D. Bäuerle, Laser Processing and Chemistry (Springer, 2011).

Beraun, J. E.

J. K. Chen, D. Y. Tzou, and J. E. Beraun, Int. J. Heat Mass Transf. 48, 501 (2005).
[CrossRef]

Bestehorn, M.

J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
[CrossRef]

Bonch-Bruevich, A. M.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Bonse, J.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

J. Bonse and J. Kruger, J. Appl. Phys. 108, 034903 (2010).
[CrossRef]

J. Bonse, A. Rosenfeld, and J. Kruger, J. Appl. Phys. 106, 104910 (2009).
[CrossRef]

J. Bonse, S. M. Wiggins, and J. Solis, J. Appl. Phys. 96, 2352 (2004).
[CrossRef]

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Chen, J. K.

J. K. Chen, D. Y. Tzou, and J. E. Beraun, Int. J. Heat Mass Transf. 48, 501 (2005).
[CrossRef]

Cheng, Y.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

Choi, T.

T. Choi and C. Grigoropoulos, J. Appl. Phys. 92, 4918 (2002).
[CrossRef]

Choi, Y. K.

S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
[CrossRef]

Costache, F.

J. Reif, O. Varlamova, and F. Costache, Appl. Phys. A 92, 1019 (2008).
[CrossRef]

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
[CrossRef]

Das, S. K.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

Erdogan, M.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Fotakis, C.

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

Golovchenko, J. A.

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Grigoropoulos, C.

T. Choi and C. Grigoropoulos, J. Appl. Phys. 92, 4918 (2002).
[CrossRef]

Grunwald, R.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

Guo, C.

Hamdorf, A.

Henyk, M.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
[CrossRef]

Hohm, S.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

Huang, M.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

Ilday, S.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Ingber, D.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Jiang, L.

Kalaycioglu, H.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Kang, K. G.

H. S. Sim, S. H. Lee, and K. G. Kang, Microsyst. Technol. 14, 1439 (2008).
[CrossRef]

Karavitis, J.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Kautek, W.

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Kruger, J.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

J. Bonse and J. Kruger, J. Appl. Phys. 108, 034903 (2010).
[CrossRef]

J. Bonse, A. Rosenfeld, and J. Kruger, J. Appl. Phys. 106, 104910 (2009).
[CrossRef]

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Lee, J. S.

S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
[CrossRef]

Lee, S. H.

H. S. Sim, S. H. Lee, and K. G. Kang, Microsyst. Technol. 14, 1439 (2008).
[CrossRef]

S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
[CrossRef]

Lenzner, M.

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Libenson, M. N.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Lin, C.

Loukakos, P. A.

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

Maeda, N.

Makin, V. S.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Mazur, E.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

S. Sundaram and E. Mazur, Nat. Mater. 1, 217 (2002).
[CrossRef]

Miyanishi, T.

Montoya, M.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Nedyalkov, N.

Obara, G.

Obara, M.

Öketem, B.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Olson, M.

Ömer Ilday, F.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Pandelov, S. V.

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
[CrossRef]

Park, S.

S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
[CrossRef]

Pavlov, I.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Pendse, J.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Polte, T.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Reif, J.

J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
[CrossRef]

J. Reif, O. Varlamova, and F. Costache, Appl. Phys. A 92, 1019 (2008).
[CrossRef]

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
[CrossRef]

Rohloff, M.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

Rosenfeld, A.

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

J. Bonse, A. Rosenfeld, and J. Kruger, J. Appl. Phys. 106, 104910 (2009).
[CrossRef]

Rybak, A.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Shen, M.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Sim, H. S.

H. S. Sim, S. H. Lee, and K. G. Kang, Microsyst. Technol. 14, 1439 (2008).
[CrossRef]

Slusher, R. E.

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Sokolowski-Tinten, K.

K. Sokolowski-Tinten and D. Von der Linde, Phys. Rev. B 61, 2643 (2000).
[CrossRef]

Solis, J.

J. Bonse, S. M. Wiggins, and J. Solis, J. Appl. Phys. 96, 2352 (2004).
[CrossRef]

Stratakis, E.

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

Sundaram, S.

S. Sundaram and E. Mazur, Nat. Mater. 1, 217 (2002).
[CrossRef]

Surko, C. M.

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Terakawa, M.

Trubaev, V. V.

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Tsai, H.

Tsibidis, G. D.

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

Tzou, D. Y.

J. K. Chen, D. Y. Tzou, and J. E. Beraun, Int. J. Heat Mass Transf. 48, 501 (2005).
[CrossRef]

Varlamov, S.

J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
[CrossRef]

Varlamova, O.

J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
[CrossRef]

J. Reif, O. Varlamova, and F. Costache, Appl. Phys. A 92, 1019 (2008).
[CrossRef]

Venkatesan, T. N. C.

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Von der Linde, D.

K. Sokolowski-Tinten and D. Von der Linde, Phys. Rev. B 61, 2643 (2000).
[CrossRef]

Vorobyev, A.

Wiggins, S. M.

J. Bonse, S. M. Wiggins, and J. Solis, J. Appl. Phys. 96, 2352 (2004).
[CrossRef]

Xia, S.

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Xiao, H.

Xu, N.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

Xu, Z.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

Yavas, S.

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Zhao, F.

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

Zhou, J.

ACS Nano (1)

M. Huang, F. Zhao, Y. Cheng, N. Xu, and Z. Xu, ACS Nano 3, 4062 (2009).
[CrossRef]

Appl. Phys. A (3)

J. Reif, O. Varlamova, S. Varlamov, and M. Bestehorn, Appl. Phys. A 104, 969 (2011).
[CrossRef]

J. Reif, O. Varlamova, and F. Costache, Appl. Phys. A 92, 1019 (2008).
[CrossRef]

J. Bonse, S. Baudach, J. Kruger, W. Kautek, and M. Lenzner, Appl. Phys. A 74, 19 (2002).
[CrossRef]

Appl. Phys. Lett. (1)

D. H. Auston, C. M. Surko, T. N. C. Venkatesan, R. E. Slusher, and J. A. Golovchenko, Appl. Phys. Lett. 33, 437 (1978).
[CrossRef]

Appl. Surf. Sci. (1)

J. Reif, F. Costache, M. Henyk, and S. V. Pandelov, Appl. Surf. Sci. 197, 891 (2002).
[CrossRef]

Biomaterials (1)

T. Polte, M. Shen, J. Karavitis, M. Montoya, J. Pendse, S. Xia, E. Mazur, and D. Ingber, Biomaterials 28, 2783 (2007).
[CrossRef]

Int. J. Heat Mass Transf. (1)

J. K. Chen, D. Y. Tzou, and J. E. Beraun, Int. J. Heat Mass Transf. 48, 501 (2005).
[CrossRef]

J. Appl. Phys. (5)

J. Bonse, S. M. Wiggins, and J. Solis, J. Appl. Phys. 96, 2352 (2004).
[CrossRef]

M. Rohloff, S. K. Das, S. Hohm, R. Grunwald, A. Rosenfeld, J. Kruger, and J. Bonse, J. Appl. Phys. 110, 014910 (2011).
[CrossRef]

J. Bonse, A. Rosenfeld, and J. Kruger, J. Appl. Phys. 106, 104910 (2009).
[CrossRef]

J. Bonse and J. Kruger, J. Appl. Phys. 108, 034903 (2010).
[CrossRef]

T. Choi and C. Grigoropoulos, J. Appl. Phys. 92, 4918 (2002).
[CrossRef]

Microsyst. Technol. (1)

H. S. Sim, S. H. Lee, and K. G. Kang, Microsyst. Technol. 14, 1439 (2008).
[CrossRef]

Nat. Mater. (1)

S. Sundaram and E. Mazur, Nat. Mater. 1, 217 (2002).
[CrossRef]

Nat. Photonics (1)

B. Öketem, I. Pavlov, S. Ilday, H. Kalaycioğlu, A. Rybak, S. Yavas, M. Erdoğan, and F. Ömer Ilday, Nat. Photonics 7, 897 (2013).
[CrossRef]

Numer. Heat Transf., Part A Appl. (1)

S. H. Lee, J. S. Lee, S. Park, and Y. K. Choi, Numer. Heat Transf., Part A Appl. 44, 833 (2003).
[CrossRef]

Opt. Eng. (1)

A. M. Bonch-Bruevich, M. N. Libenson, V. S. Makin, and V. V. Trubaev, Opt. Eng. 31, 718 (1992).
[CrossRef]

Opt. Express (2)

Opt. Lett. (1)

Phys. Rev. B (2)

K. Sokolowski-Tinten and D. Von der Linde, Phys. Rev. B 61, 2643 (2000).
[CrossRef]

G. D. Tsibidis, M. Barberoglou, P. A. Loukakos, E. Stratakis, and C. Fotakis, Phys. Rev. B 86, 115316 (2012).
[CrossRef]

Other (1)

D. Bäuerle, Laser Processing and Chemistry (Springer, 2011).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1.
Fig. 1.

(a) SEM image of the nanoparticle-covered silicon surface irradiated (in vacuum) by a single femtosecond laser pulse where laser fluence F=1.6J/cm2. (b) Details of fs-LIPSS formed on the sample surface. (c) 2D-FFT spectrum of (b). The arrows represent laser polarization direction.

Fig. 2.
Fig. 2.

(a) SEM image of the nanoparticle-covered silicon surface irradiated (in vacuum) by a single femtosecond laser pulse where laser fluence F=6.7J/cm2. Inside the dashed circle, only some bubble-like pits are formed; out of the dashed circle, fs-LIPSS appear. (b) Bubble-like pits with similar size are observed in the central region of a damage spot irradiated by a single pulse with F=6.0J/cm2. (c) and (d) are the AFM images of the craters corresponding to (a) and (b), respectively. The arrows represent laser polarization direction.

Fig. 3.
Fig. 3.

SEM image of the nanoparticle-covered silicon surface irradiated by five pulses (in vacuum). (a) Damage spot with F=6.7J/cm2. (b) and (c) Central region and periphery of (a). (d) Damage spot with F=1.6J/cm2. The arrows represent laser polarization direction.

Fig. 4.
Fig. 4.

Evolution of carrier density Nc (green dash dot curve), carrier temperature Tc (blue solid curve), and lattice temperature Tl (red dash curve) calculated for laser fluence F=1.6J/cm2. The purple dot curve shows the laser pulse whose duration is 120 fs. The insert shows a relationship between Nc and the real part of dielectric constant Re(ε), where Ncr is critical carrier density and Npeak is the peak value of the Nc.

Tables (1)

Tables Icon

Table 1. Parameters of Two-Temperature Model

Metrics