Abstract

We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity and coupling angle dependence are experimentally investigated. A record ultrahigh CE of 0.58dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.

© 2014 Optical Society of America

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