Abstract

High temporal and spatial coherent simultaneous long-wavelength/mid-wavelength (LW/MW) two-color focal plane array (FPA) infrared detection is the cutting-edge technique for third-generation infrared remote sensing. In this Letter, HgCdTe LW/MW two-color infrared detectors were designed and fabricated. The top long-wavelength and bottom mid-wavelength infrared planar photodiodes were processed by selective B+-implantation after etching the long-wavelength epilayer into a curvature and exposing the mid-wavelength layers for the implantation of the n region of the MW photodiode by a micro-mesa array technique. A 128×128MW/LW HgCdTe infrared FPA detector is fabricated photo-lithographically by simultaneous nonplanar B+-implantation of the LW and MW photodiodes, passivation and metallization of the sidewalls, mesa isolation, and flip-chip hybridization with a read-out integrated circuit. The inner mechanisms for suppressing the cross talk and improving photoresponse have been carried out by combining experimental work with numerical simulations.

© 2014 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009).
    [CrossRef]
  2. P. Norton, Opto-Electron. Rev. 14, 1 (2006).
    [CrossRef]
  3. J. Schuster and E. Bellotti, Opt. Express 21, 14712 (2013).
    [CrossRef]
  4. W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
    [CrossRef]
  5. W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
    [CrossRef]
  6. J. Le Perchec, Y. Desieres, and R. E. de Lamaestre, Appl. Phys. Lett. 94, 181104 (2009).
    [CrossRef]
  7. A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
    [CrossRef]
  8. A. Zemel, I. Lukomsky, and E. Weiss, J. Appl. Phys. 98, 054504 (2005).
    [CrossRef]
  9. W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
    [CrossRef]
  10. A. Rogalski, Rep. Prog. Phys. 68, 2267 (2005).
    [CrossRef]
  11. R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
    [CrossRef]
  12. A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
    [CrossRef]
  13. F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
    [CrossRef]
  14. V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
    [CrossRef]
  15. P. Martyniuk, W. Gawron, and A. Rogalski, J. Electron. Mater. 42, 3309 (2013).
    [CrossRef]
  16. P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
    [CrossRef]
  17. E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
    [CrossRef]
  18. E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
    [CrossRef]
  19. E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
    [CrossRef]
  20. Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
    [CrossRef]
  21. W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
    [CrossRef]
  22. K. Jozwikowski and A. Rogalski, J. Appl. Phys. 90, 1286 (2001).
    [CrossRef]
  23. J. Wenus, J. Rutkowski, and A. Rogalski, IEEE Trans. Electron Devices 48, 1326 (2001).
    [CrossRef]
  24. E. Bellotti and D. D. Orsogna, IEEE J. Quantum Electron. 42, 418 (2006).
    [CrossRef]
  25. J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
    [CrossRef]
  26. Sentaurus Device User Guide, Version G-2012.06 (Synopsys, 2012).
  27. H. Kocer, Y. Arslan, and C. Besikci, Infrared Phys. Technol. 55, 49 (2012).
    [CrossRef]

2013 (4)

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

P. Martyniuk, W. Gawron, and A. Rogalski, J. Electron. Mater. 42, 3309 (2013).
[CrossRef]

J. Schuster and E. Bellotti, Opt. Express 21, 14712 (2013).
[CrossRef]

2012 (5)

J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
[CrossRef]

H. Kocer, Y. Arslan, and C. Besikci, Infrared Phys. Technol. 55, 49 (2012).
[CrossRef]

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

2011 (3)

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
[CrossRef]

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

2010 (1)

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
[CrossRef]

2009 (3)

A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009).
[CrossRef]

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

J. Le Perchec, Y. Desieres, and R. E. de Lamaestre, Appl. Phys. Lett. 94, 181104 (2009).
[CrossRef]

2006 (3)

P. Norton, Opto-Electron. Rev. 14, 1 (2006).
[CrossRef]

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

E. Bellotti and D. D. Orsogna, IEEE J. Quantum Electron. 42, 418 (2006).
[CrossRef]

2005 (3)

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

A. Zemel, I. Lukomsky, and E. Weiss, J. Appl. Phys. 98, 054504 (2005).
[CrossRef]

A. Rogalski, Rep. Prog. Phys. 68, 2267 (2005).
[CrossRef]

2004 (2)

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

2001 (2)

K. Jozwikowski and A. Rogalski, J. Appl. Phys. 90, 1286 (2001).
[CrossRef]

J. Wenus, J. Rutkowski, and A. Rogalski, IEEE Trans. Electron Devices 48, 1326 (2001).
[CrossRef]

Antoszewski, J.

A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009).
[CrossRef]

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Aqariden, F.

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

Arslan, Y.

H. Kocer, Y. Arslan, and C. Besikci, Infrared Phys. Technol. 55, 49 (2012).
[CrossRef]

Ballet, P.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Baylet, J.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Bellotti, E.

J. Schuster and E. Bellotti, Opt. Express 21, 14712 (2013).
[CrossRef]

E. Bellotti and D. D. Orsogna, IEEE J. Quantum Electron. 42, 418 (2006).
[CrossRef]

Besikci, C.

H. Kocer, Y. Arslan, and C. Besikci, Infrared Phys. Technol. 55, 49 (2012).
[CrossRef]

Bhan, R. K.

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

Breiter, R.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Brellier, D.

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Chen, X. S.

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
[CrossRef]

Chen, Y. G.

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

de Lamaestre, R. E.

J. Le Perchec, Y. Desieres, and R. E. de Lamaestre, Appl. Phys. Lett. 94, 181104 (2009).
[CrossRef]

Dell, J. M.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Desieres, Y.

J. Le Perchec, Y. Desieres, and R. E. de Lamaestre, Appl. Phys. Lett. 94, 181104 (2009).
[CrossRef]

Dhar, V.

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

Ding, R.

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Elsworth, J.

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

Faraone, L.

A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009).
[CrossRef]

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Gallagher, A. M.

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

Gawron, W.

P. Martyniuk, W. Gawron, and A. Rogalski, J. Electron. Mater. 42, 3309 (2013).
[CrossRef]

Goetz, P. M.

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

Gravrand, O.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Grein, C. H.

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

He, L.

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Hofmann, K. C.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Hu, W.

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Hu, W. D.

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
[CrossRef]

Hu, X.

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Ihle, T.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Jozwikowska, A.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Jozwikowski, K.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

K. Jozwikowski and A. Rogalski, J. Appl. Phys. 90, 1286 (2001).
[CrossRef]

Kerlain, A.

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Kocer, H.

H. Kocer, Y. Arslan, and C. Besikci, Infrared Phys. Technol. 55, 49 (2012).
[CrossRef]

Le Perchec, J.

J. Le Perchec, Y. Desieres, and R. E. de Lamaestre, Appl. Phys. Lett. 94, 181104 (2009).
[CrossRef]

Liao, L.

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

Lofgreen, D. D.

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

Lu, W.

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
[CrossRef]

Lukomsky, I.

A. Zemel, I. Lukomsky, and E. Weiss, J. Appl. Phys. 98, 054504 (2005).
[CrossRef]

Lutz, H.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Manissadjian, A.

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Martyniuk, P.

P. Martyniuk, W. Gawron, and A. Rogalski, J. Electron. Mater. 42, 3309 (2013).
[CrossRef]

Mears, C. L.

J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
[CrossRef]

Mollard, L.

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Musca, C. A.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Newton, M. D.

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

Nguyen, T.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Noël, F.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Norton, E. M.

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

Norton, P.

P. Norton, Opto-Electron. Rev. 14, 1 (2006).
[CrossRef]

Nosho, B. Z.

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

Orman, Z.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Orsogna, D. D.

E. Bellotti and D. D. Orsogna, IEEE J. Quantum Electron. 42, 418 (2006).
[CrossRef]

Pal, R.

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

Patten, E. A.

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

Peterson, J. M.

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

Pham, L. T.

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

Plissard, S.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Pottier, F.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Radford, W.

J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
[CrossRef]

Randolph, J. E.

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

Rebeil, Y.

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Reddy, M.

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

Rogalski, A.

P. Martyniuk, W. Gawron, and A. Rogalski, J. Electron. Mater. 42, 3309 (2013).
[CrossRef]

A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009).
[CrossRef]

A. Rogalski, Rep. Prog. Phys. 68, 2267 (2005).
[CrossRef]

K. Jozwikowski and A. Rogalski, J. Appl. Phys. 90, 1286 (2001).
[CrossRef]

J. Wenus, J. Rutkowski, and A. Rogalski, IEEE Trans. Electron Devices 48, 1326 (2001).
[CrossRef]

Roth, J. A.

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

Rubaldo, L.

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Rutkowski, J.

J. Wenus, J. Rutkowski, and A. Rogalski, IEEE Trans. Electron Devices 48, 1326 (2001).
[CrossRef]

Rutzinger, S.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Schallenberg, T.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Schuster, J.

Sewell, R. H.

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

Sivananthan, S.

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

Smith, E. P. G.

J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
[CrossRef]

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

Srivastav, V.

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

Venkataraman, V.

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

Venzor, G. M.

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

Wehner, J. G. A.

J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
[CrossRef]

Weiss, E.

A. Zemel, I. Lukomsky, and E. Weiss, J. Appl. Phys. 98, 054504 (2005).
[CrossRef]

Wendler, J. C.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Wenus, J.

J. Wenus, J. Rutkowski, and A. Rogalski, IEEE Trans. Electron Devices 48, 1326 (2001).
[CrossRef]

Ye, Z.

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Ye, Z. H.

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
[CrossRef]

Yin, F.

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

Zanatta, J. P.

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

Zemel, A.

A. Zemel, I. Lukomsky, and E. Weiss, J. Appl. Phys. 98, 054504 (2005).
[CrossRef]

Zhang, B.

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

Zhao, J.

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

Zhou, W.

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Ziegler, J.

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Appl. Phys. Lett. (3)

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Appl. Phys. Lett. 99, 091101 (2011).
[CrossRef]

W. D. Hu, X. S. Chen, Z. H. Ye, Y. G. Chen, F. Yin, B. Zhang, and W. Lu, Appl. Phys. Lett. 101, 181108 (2012).
[CrossRef]

J. Le Perchec, Y. Desieres, and R. E. de Lamaestre, Appl. Phys. Lett. 94, 181104 (2009).
[CrossRef]

IEEE J. Quantum Electron. (1)

E. Bellotti and D. D. Orsogna, IEEE J. Quantum Electron. 42, 418 (2006).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

W. D. Hu, X. S. Chen, Z. H. Ye, L. Liao, and W. Lu, IEEE J. Sel. Top. Quantum Electron. 19, 4100107 (2013).
[CrossRef]

IEEE Trans. Electron Devices (1)

J. Wenus, J. Rutkowski, and A. Rogalski, IEEE Trans. Electron Devices 48, 1326 (2001).
[CrossRef]

Infrared Phys. Technol. (2)

H. Kocer, Y. Arslan, and C. Besikci, Infrared Phys. Technol. 55, 49 (2012).
[CrossRef]

V. Srivastav, R. Pal, R. K. Bhan, V. Dhar, and V. Venkataraman, Infrared Phys. Technol. 61, 290 (2013).
[CrossRef]

J. Appl. Phys. (4)

A. Jozwikowska, K. Jozwikowski, J. Antoszewski, C. A. Musca, T. Nguyen, R. H. Sewell, J. M. Dell, L. Faraone, and Z. Orman, J. Appl. Phys. 98, 014504 (2005).
[CrossRef]

A. Zemel, I. Lukomsky, and E. Weiss, J. Appl. Phys. 98, 054504 (2005).
[CrossRef]

A. Rogalski, J. Antoszewski, and L. Faraone, J. Appl. Phys. 105, 091101 (2009).
[CrossRef]

K. Jozwikowski and A. Rogalski, J. Appl. Phys. 90, 1286 (2001).
[CrossRef]

J. Electron. Mater. (7)

F. Aqariden, J. Elsworth, J. Zhao, C. H. Grein, and S. Sivananthan, J. Electron. Mater. 41, 2700 (2012).
[CrossRef]

J. G. A. Wehner, E. P. G. Smith, W. Radford, and C. L. Mears, J. Electron. Mater. 41, 2925 (2012).
[CrossRef]

P. Martyniuk, W. Gawron, and A. Rogalski, J. Electron. Mater. 42, 3309 (2013).
[CrossRef]

P. Ballet, F. Noël, F. Pottier, S. Plissard, J. P. Zanatta, J. Baylet, and O. Gravrand, J. Electron. Mater. 33, 667 (2004).
[CrossRef]

E. P. G. Smith, L. T. Pham, G. M. Venzor, E. M. Norton, and M. D. Newton, J. Electron. Mater. 33, 509 (2004).
[CrossRef]

E. P. G. Smith, E. A. Patten, P. M. Goetz, G. M. Venzor, J. A. Roth, and B. Z. Nosho, J. Electron. Mater. 35, 1145 (2006).
[CrossRef]

E. P. G. Smith, G. M. Venzor, A. M. Gallagher, M. Reddy, J. M. Peterson, D. D. Lofgreen, and J. E. Randolph, J. Electron. Mater. 40, 1630 (2011).
[CrossRef]

J. Infrared Millim. Waves (1)

Z. Ye, W. Zhou, W. Hu, X. Hu, R. Ding, and L. He, J. Infrared Millim. Waves 28, 4 (2009).
[CrossRef]

Opt. Eng. (1)

R. Breiter, T. Ihle, J. C. Wendler, H. Lutz, S. Rutzinger, T. Schallenberg, K. C. Hofmann, and J. Ziegler, Opt. Eng. 50, 061010 (2011).
[CrossRef]

Opt. Express (1)

Opto-Electron. Rev. (1)

P. Norton, Opto-Electron. Rev. 14, 1 (2006).
[CrossRef]

Proc. SPIE (1)

A. Manissadjian, L. Rubaldo, Y. Rebeil, A. Kerlain, D. Brellier, and L. Mollard, Proc. SPIE 8353, 835334 (2012).
[CrossRef]

Rep. Prog. Phys. (1)

A. Rogalski, Rep. Prog. Phys. 68, 2267 (2005).
[CrossRef]

Semicond. Sci. Technol. (1)

W. D. Hu, X. S. Chen, Z. H. Ye, and W. Lu, Semicond. Sci. Technol. 25, 045028 (2010).
[CrossRef]

Other (1)

Sentaurus Device User Guide, Version G-2012.06 (Synopsys, 2012).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1.
Fig. 1.

(a) Schematic of grooved HgCdTe two-color infrared detector. (b) Equilibrium energy band diagram cut at AA. (c) Equilibrium energy band diagram cut at BB.

Fig. 2.
Fig. 2.

(a) LW QE and MW-to-LW cross talk and (b) MW QE and LW-to-MW cross talk as a function of the thickness of the MW layer for the infrared detector. The QE is calculated at the cutoff wavelength.

Fig. 3.
Fig. 3.

LW QE as functions of (LtopLbot) and Lbot at a LW cutoff wavelength of 9.7 μm.

Fig. 4.
Fig. 4.

(a) Designed Cd mole fraction of p1, P, and p2 layers during the HgCdTe material epitaxial growth. (b) SEM image of the 128×128LW/MW HgCdTe two-color infrared FPA detector.

Fig. 5.
Fig. 5.

(a) Dark current characteristics of LW and MW junctions. (b) Experimental (dotted) and simulated (solid) spectral photoresponse of the LW/MW HgCdTe two-color infrared detector with cutoff wavelengths of λ1cutoff=4.8μm and λ2cutoff=9.7μm for the LW and MW diodes, respectively. A voltage of 0.01 V is used in the simulation and experiment.

Fig. 6.
Fig. 6.

Infrared image from the 128×128LW/MW HgCdTe two-color infrared FPA detector at 77 K. A MW optical filter is used to stop MW infrared radiation. The heated electric soldering iron behind the filter is invisible for the MWIR detector (middle) while visible for the LWIR detector (left).

Tables (1)

Tables Icon

Table 1. Material and Structural Parameters of the Two-Color HgCdTe Photodetector at 77 K

Equations (2)

Equations on this page are rendered with MathJax. Learn more.

CMWtoLW=λCλeMWtoLW+CλoMWtoLW=λCλeMWtoLW,
CLWtoMW=λCλeLWtoMW+CλoLWtoMW.

Metrics