Vertical triple-junction RGB optical sensor with signal processing based on the determination of the space-charge region borders

Nikša Tadić; Stefan Schidl; Horst Zimmermann

doi:10.1364/OL.39.005042

Vertical triple-junction RGB optical sensor with signal processing based on the determination of the space-charge region borders

Nikša Tadić, Stefan Schidl, and Horst Zimmermann

Optics Letters
Vol. 39,
Issue 17,
pp. 5042-5045
(2014)
•https://doi.org/10.1364/OL.39.005042

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Nikša Tadić, Stefan Schidl, and Horst Zimmermann, "Vertical triple-junction RGB optical sensor with signal processing based on the determination of the space-charge region borders," Opt. Lett. 39, 5042-5045 (2014)

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Table of Contents Category
- Optoelectronics
Optics & Photonics Topics
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The topics in this list come from the OSA Optics and Photonics Topics applied to this article.
Previously assigned OCIS codes
- Optoelectronics (230.0250)
- Photodetectors (230.5160)
- Photodiodes (230.5170)
- Integrated optoelectronic circuits (250.3140)
- Photonic integrated circuits (250.5300)
- Color (330.1690)

About this Article
History
- Original Manuscript: June 12, 2014
- Manuscript Accepted: July 12, 2014
- Published: August 20, 2014

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Abstract

A triple-junction RGB optical sensor with vertically stacked photodiodes and signal processing that provides precise values of the currents generated by blue, green, and red light is presented. The signal processing is based on the determination of the border depths of the space-charge regions of all three photodiodes. A current-mode implementation using current conveyors and variable-gain current amplifiers is introduced. The responsivities of all three photodiodes calculated using the proposed approach are in very good agreement with the measured results.

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Photodiode	Wavelengths	Absorption Coefficients	Measured Responsivities	Calculated SCR BDs
${PD}_{1}$ (depth: 0.17 μm)	$λ_{1} = 410 nm$ , $λ_{2} = 570 nm$	$α_{1} = 10.463 {μm}^{- 1}$ , $α_{2} = 0.779 {μm}^{- 1}$	$S_{1} = 0.208 A / W$ , $S_{2} = 0.111 A / W$	$a_{t} = 0.0423 μm$ , $b_{t} = 0.4175 μm$
${PD}_{1}$ (depth: 0.17 μm)	$λ_{1} = 420 nm$ , $λ_{2} = 580 nm$	$α_{1} = 7.234 {μm}^{- 1}$ , $α_{2} = 0.667 {μm}^{- 1}$	$S_{1} = 0.217 A / W$ , $S_{2} = 0.104 A / W$	$a_{t} = 0.0531 μm$ , $b_{t} = 0.4491 μm$
${PD}_{2}$ (depth: 0.8 μm)	$λ_{1} = 450 nm$ , $λ_{2} = 650 nm$	$α_{1} = 3.953 {μm}^{- 1}$ , $α_{2} = 0.347 {μm}^{- 1}$	$S_{1} = 0.085 A / W$ , $S_{2} = 0.159 A / W$	$a_{m} = 0.3652 μm$ , $b_{m} = 1.6033 μm$
${PD}_{2}$ (depth: 0.8 μm)	$λ_{1} = 470 nm$ , $λ_{2} = 770 nm$	$α_{1} = 2.893 {μm}^{- 1}$ , $α_{2} = 0.137 {μm}^{- 1}$	$S_{1} = 0.124 A / W$ , $S_{2} = 0.089 A / W$	$a_{m} = 0.373 μm$ , $b_{m} = 1.5288 μm$
${PD}_{3}$ (depth: 6.5 μm)	$λ_{1} = 580 nm$ , $λ_{2} = 830 nm$	$α_{1} = 0.667 {μm}^{- 1}$ , $α_{2} = 0.089 {μm}^{- 1}$	$S_{1} = 0.168 A / W$ , $S_{2} = 0.345 A / W$	$a_{b} = 1.5307 μm$ , $b_{b} = 11.533 μm$
${PD}_{3}$ (depth: 6.5 μm)	$λ_{1} = 600 nm$ , $λ_{2} = 850 nm$	$α_{1} = 0.502 {μm}^{- 1}$ , $α_{2} = 0.067 {μm}^{- 1}$	$S_{1} = 0.202 A / W$ , $S_{2} = 0.315 A / W$	$a_{b} = 1.736 μm$ , $b_{b} = 12.713 μm$

Calculated SCR BDs	$a_{t} = 0.0423 μm$ , $b_{t} = 0.4175 μm$ , $a_{m} = 0.3652 μm$ , $b_{m} = 1.6033 μm$ , $a_{b} = 1.5307 μm$ , $b_{b} = 11.533 μm$		$a_{t} = 0.0531 μm$ , $b_{t} = 0.4491 μm$ , $a_{m} = 0.373 μm$ , $b_{m} = 1.5288 μm$ , $a_{b} = 1.736 μm$ , $b_{b} = 12.713 μm$
$λ_{B} = 405 nm$	$b_{21} = 0.021$ , $b_{31} \approx 0$ , $g_{21} = 1.404$ , $g_{31} = 0.416$ , $r_{21} = 2.743$ , $r_{31} = 7.067$		$b_{21} = 0.022$ , $b_{31} \approx 0$ , $g_{21} = 1.312$ , $g_{31} = 0.313$ , $r_{21} = 2.458$ , $r_{31} = 6.518$
$λ_{G} = 525 nm$	$B_{1} = 1.940$ , $B_{2} = - 0.924$ , $B_{3} = 0.155$ , $G_{1} = - 1.149$ , $G_{2} = 1.132$ , $G_{3} = - 0.315$ , $R_{1} = 0.209$ , $R_{2} = - 0.208$ , $R_{3} = 0.160$		$B_{1} = 1.979$ , $B_{2} = - 0.961$ , $B_{3} = 0.150$ , $G_{1} = - 1.189$ , $G_{2} = 1.170$ , $G_{3} = - 0.318$ , $R_{1} = 0.210$ , $R_{2} = - 0.210$ , $R_{3} = 0.169$
$λ_{R} = 685 nm$
$α_{B} = 12 {μm}^{- 1}$	(4): $I_{B} = 1.98 I_{1} - 0.94 I_{2} + 0.16 I_{3}$	[5–8]: $I_{B} = I_{PD 1} = I_{1}$	(4): $I_{B} = 2.02 I_{1} - 0.98 I_{2} + 0.15 I_{3}$	[5–8]: $I_{B} = I_{PD 1} = I_{1}$
$α_{G} = 1.25 {μm}^{- 1}$	(5): $I_{G} = - 3.24 I_{1} + 3.19 I_{2} - 0.89 I_{3}$	[5–8]: $I_{G} = I_{PD 2} = - I_{1} + I_{2}$	(5): $I_{G} = - 3.12 I_{1} + 3.07 I_{2} - 0.84 I_{3}$	[5–8]: $I_{G} = I_{PD 2} = - I_{1} + I_{2}$
$α_{R} = 0.25 {μm}^{- 1}$	(6): $I_{R} = 2.26 I_{1} - 2.25 I_{2} + 1.73 I_{3}$	[5–8]: $I_{R} = I_{PD 3} = I_{1} - I_{2} + I_{3}$	(6): $I_{R} = 2.09 I_{1} - 2.09 I_{2} + 1.69 I_{3}$	[5–8]: $I_{R} = I_{PD 3} = I_{1} - I_{2} + I_{3}$

Photodiode	Wavelengths	Absorption Coefficients	Measured Responsivities	Calculated SCR BDs
${PD}_{1}$ (depth: 0.17 μm)	$λ_{1} = 410 nm$ , $λ_{2} = 570 nm$	$α_{1} = 10.463 {μm}^{- 1}$ , $α_{2} = 0.779 {μm}^{- 1}$	$S_{1} = 0.208 A / W$ , $S_{2} = 0.111 A / W$	$a_{t} = 0.0423 μm$ , $b_{t} = 0.4175 μm$
${PD}_{1}$ (depth: 0.17 μm)	$λ_{1} = 420 nm$ , $λ_{2} = 580 nm$	$α_{1} = 7.234 {μm}^{- 1}$ , $α_{2} = 0.667 {μm}^{- 1}$	$S_{1} = 0.217 A / W$ , $S_{2} = 0.104 A / W$	$a_{t} = 0.0531 μm$ , $b_{t} = 0.4491 μm$
${PD}_{2}$ (depth: 0.8 μm)	$λ_{1} = 450 nm$ , $λ_{2} = 650 nm$	$α_{1} = 3.953 {μm}^{- 1}$ , $α_{2} = 0.347 {μm}^{- 1}$	$S_{1} = 0.085 A / W$ , $S_{2} = 0.159 A / W$	$a_{m} = 0.3652 μm$ , $b_{m} = 1.6033 μm$
${PD}_{2}$ (depth: 0.8 μm)	$λ_{1} = 470 nm$ , $λ_{2} = 770 nm$	$α_{1} = 2.893 {μm}^{- 1}$ , $α_{2} = 0.137 {μm}^{- 1}$	$S_{1} = 0.124 A / W$ , $S_{2} = 0.089 A / W$	$a_{m} = 0.373 μm$ , $b_{m} = 1.5288 μm$
${PD}_{3}$ (depth: 6.5 μm)	$λ_{1} = 580 nm$ , $λ_{2} = 830 nm$	$α_{1} = 0.667 {μm}^{- 1}$ , $α_{2} = 0.089 {μm}^{- 1}$	$S_{1} = 0.168 A / W$ , $S_{2} = 0.345 A / W$	$a_{b} = 1.5307 μm$ , $b_{b} = 11.533 μm$
${PD}_{3}$ (depth: 6.5 μm)	$λ_{1} = 600 nm$ , $λ_{2} = 850 nm$	$α_{1} = 0.502 {μm}^{- 1}$ , $α_{2} = 0.067 {μm}^{- 1}$	$S_{1} = 0.202 A / W$ , $S_{2} = 0.315 A / W$	$a_{b} = 1.736 μm$ , $b_{b} = 12.713 μm$

Calculated SCR BDs	$a_{t} = 0.0423 μm$ , $b_{t} = 0.4175 μm$ , $a_{m} = 0.3652 μm$ , $b_{m} = 1.6033 μm$ , $a_{b} = 1.5307 μm$ , $b_{b} = 11.533 μm$		$a_{t} = 0.0531 μm$ , $b_{t} = 0.4491 μm$ , $a_{m} = 0.373 μm$ , $b_{m} = 1.5288 μm$ , $a_{b} = 1.736 μm$ , $b_{b} = 12.713 μm$
$λ_{B} = 405 nm$	$b_{21} = 0.021$ , $b_{31} \approx 0$ , $g_{21} = 1.404$ , $g_{31} = 0.416$ , $r_{21} = 2.743$ , $r_{31} = 7.067$		$b_{21} = 0.022$ , $b_{31} \approx 0$ , $g_{21} = 1.312$ , $g_{31} = 0.313$ , $r_{21} = 2.458$ , $r_{31} = 6.518$
$λ_{G} = 525 nm$	$B_{1} = 1.940$ , $B_{2} = - 0.924$ , $B_{3} = 0.155$ , $G_{1} = - 1.149$ , $G_{2} = 1.132$ , $G_{3} = - 0.315$ , $R_{1} = 0.209$ , $R_{2} = - 0.208$ , $R_{3} = 0.160$		$B_{1} = 1.979$ , $B_{2} = - 0.961$ , $B_{3} = 0.150$ , $G_{1} = - 1.189$ , $G_{2} = 1.170$ , $G_{3} = - 0.318$ , $R_{1} = 0.210$ , $R_{2} = - 0.210$ , $R_{3} = 0.169$
$λ_{R} = 685 nm$
$α_{B} = 12 {μm}^{- 1}$	(4): $I_{B} = 1.98 I_{1} - 0.94 I_{2} + 0.16 I_{3}$	[5–8]: $I_{B} = I_{PD 1} = I_{1}$	(4): $I_{B} = 2.02 I_{1} - 0.98 I_{2} + 0.15 I_{3}$	[5–8]: $I_{B} = I_{PD 1} = I_{1}$
$α_{G} = 1.25 {μm}^{- 1}$	(5): $I_{G} = - 3.24 I_{1} + 3.19 I_{2} - 0.89 I_{3}$	[5–8]: $I_{G} = I_{PD 2} = - I_{1} + I_{2}$	(5): $I_{G} = - 3.12 I_{1} + 3.07 I_{2} - 0.84 I_{3}$	[5–8]: $I_{G} = I_{PD 2} = - I_{1} + I_{2}$
$α_{R} = 0.25 {μm}^{- 1}$	(6): $I_{R} = 2.26 I_{1} - 2.25 I_{2} + 1.73 I_{3}$	[5–8]: $I_{R} = I_{PD 3} = I_{1} - I_{2} + I_{3}$	(6): $I_{R} = 2.09 I_{1} - 2.09 I_{2} + 1.69 I_{3}$	[5–8]: $I_{R} = I_{PD 3} = I_{1} - I_{2} + I_{3}$

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