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High-speed silicon modulator with band equalization

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Abstract

Electro-optic modulation up to 70Gbit/s has been demonstrated using a silicon Mach–Zehnder modulator with a bias voltage of 1.5V. In a wide frequency range from DC, an increasing input impedance of the modulator was designed to equalize its electro-optic frequency response. Without a bias voltage, the 3 dB bandwidth was measured as 35 GHz and it is predicted to be as high as 55 GHz at 3V bias. Frequency responses of the modulator operated with counter-propagating waves were tested to verify the proposed prediction model.

© 2014 Optical Society of America

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