Abstract

Electro-optic modulation up to 70Gbit/s has been demonstrated using a silicon Mach–Zehnder modulator with a bias voltage of 1.5V. In a wide frequency range from DC, an increasing input impedance of the modulator was designed to equalize its electro-optic frequency response. Without a bias voltage, the 3 dB bandwidth was measured as 35 GHz and it is predicted to be as high as 55 GHz at 3V bias. Frequency responses of the modulator operated with counter-propagating waves were tested to verify the proposed prediction model.

© 2014 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. M. Paniccia, Nat. Photonics 4, 498 (2010).
    [CrossRef]
  2. G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
    [CrossRef]
  3. Y. Tang, J. D. Peters, and J. E. Bowers, Opt. Express 20, 11529 (2012).
    [CrossRef]
  4. A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
    [CrossRef]
  5. D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
    [CrossRef]
  6. P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y. K. Chen, Opt. Express 20, 6163 (2012).
    [CrossRef]
  7. X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
    [CrossRef]
  8. X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
    [CrossRef]
  9. M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).
  10. P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.
  11. K. Kubota, J. Noda, and O. Mikami, IEEE J. Quantum Electron. 16, 754 (1980).
    [CrossRef]
  12. S. H. Lin and S. Y. Wang, Appl. Opt. 26, 1696 (1987).
    [CrossRef]
  13. L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
    [CrossRef]
  14. S. Hall and H. Heck, in Advanced Signal Integrity for High-Speed Digital Design (Wiley, 2009), Chap. 12.
  15. H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).
  16. R. Ludwig and P. Bretchko, RF Circuit Design: Theory and Applications (Prentice-Hall, 2000).
  17. T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
    [CrossRef]
  18. R. G. Walker, IEEE J. Quantum Electron. 27, 654 (1991).
    [CrossRef]
  19. W. R. Leeb, A. L. Scholtz, and E. Bonek, IEEE J. Quantum Electron. QE-18, 14 (1982).
    [CrossRef]
  20. H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
    [CrossRef]
  21. S. Kaneko, H. Itamoto, T. Miyahara, and T. Hatta, “Impact of package resonance on eye diagram in high-speed optical modules,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2001, paper WE.P.12.

2014 (2)

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

2013 (4)

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
[CrossRef]

2012 (3)

P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y. K. Chen, Opt. Express 20, 6163 (2012).
[CrossRef]

Y. Tang, J. D. Peters, and J. E. Bowers, Opt. Express 20, 11529 (2012).
[CrossRef]

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

2010 (3)

M. Paniccia, Nat. Photonics 4, 498 (2010).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
[CrossRef]

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

2007 (1)

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

1991 (1)

R. G. Walker, IEEE J. Quantum Electron. 27, 654 (1991).
[CrossRef]

1987 (1)

1982 (1)

W. R. Leeb, A. L. Scholtz, and E. Bonek, IEEE J. Quantum Electron. QE-18, 14 (1982).
[CrossRef]

1980 (1)

K. Kubota, J. Noda, and O. Mikami, IEEE J. Quantum Electron. 16, 754 (1980).
[CrossRef]

Alic, N.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Alloatti, L.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Ang, K.

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Baehr-Jones, T.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Basak, J.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Bonek, E.

W. R. Leeb, A. L. Scholtz, and E. Bonek, IEEE J. Quantum Electron. QE-18, 14 (1982).
[CrossRef]

Bowers, J. E.

Bretchko, P.

R. Ludwig and P. Bretchko, RF Circuit Design: Theory and Applications (Prentice-Hall, 2000).

Buhl, L. L.

P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y. K. Chen, Opt. Express 20, 6163 (2012).
[CrossRef]

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.

Chee, E.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Chen, B.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Chen, L.

P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y. K. Chen, Opt. Express 20, 6163 (2012).
[CrossRef]

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.

Chen, Y. K.

Chen, Y.-K.

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.

Chetrit, Y.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Chu, T.

Cohen, R.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Ding, R.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Dinu, R.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Dong, P.

P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y. K. Chen, Opt. Express 20, 6163 (2012).
[CrossRef]

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.

Fang, Q.

X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
[CrossRef]

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Fedeli, J.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Freude, W.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Gardes, F.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Gardes, F. Y.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
[CrossRef]

Hall, S.

S. Hall and H. Heck, in Advanced Signal Integrity for High-Speed Digital Design (Wiley, 2009), Chap. 12.

Hatta, T.

S. Kaneko, H. Itamoto, T. Miyahara, and T. Hatta, “Impact of package resonance on eye diagram in high-speed optical modules,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2001, paper WE.P.12.

Heck, H.

S. Hall and H. Heck, in Advanced Signal Integrity for High-Speed Digital Design (Wiley, 2009), Chap. 12.

Hillerkuss, D.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Hochberg, M.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Hu, Y.

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Itamoto, H.

S. Kaneko, H. Itamoto, T. Miyahara, and T. Hatta, “Impact of package resonance on eye diagram in high-speed optical modules,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2001, paper WE.P.12.

Izhaky, N.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Kaneko, S.

S. Kaneko, H. Itamoto, T. Miyahara, and T. Hatta, “Impact of package resonance on eye diagram in high-speed optical modules,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2001, paper WE.P.12.

Kohl, M.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Koos, C.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Korn, D.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Kubota, K.

K. Kubota, J. Noda, and O. Mikami, IEEE J. Quantum Electron. 16, 754 (1980).
[CrossRef]

Kuo, B.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Kwong, D.

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Leeb, W. R.

W. R. Leeb, A. L. Scholtz, and E. Bonek, IEEE J. Quantum Electron. QE-18, 14 (1982).
[CrossRef]

Leuthold, J.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Li, J.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Li, X.

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Li, Z.

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Liao, L.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Lim, A.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Lin, S. H.

Liow, T.

X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
[CrossRef]

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Liu, A.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Liu, Y.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Lo, G.

X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
[CrossRef]

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Lo, P.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Ludwig, R.

R. Ludwig and P. Bretchko, RF Circuit Design: Theory and Applications (Prentice-Hall, 2000).

Luo, X.

Ma, Y.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Mashanovich, G.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
[CrossRef]

Melikyan, A.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Mikami, O.

K. Kubota, J. Noda, and O. Mikami, IEEE J. Quantum Electron. 16, 754 (1980).
[CrossRef]

Miyahara, T.

S. Kaneko, H. Itamoto, T. Miyahara, and T. Hatta, “Impact of package resonance on eye diagram in high-speed optical modules,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2001, paper WE.P.12.

Muehlbrandt, S.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Muslija, A.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Myslivets, E.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Nguyen, H.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Noda, J.

K. Kubota, J. Noda, and O. Mikami, IEEE J. Quantum Electron. 16, 754 (1980).
[CrossRef]

Novack, A.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Palmer, R.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Paniccia, M.

M. Paniccia, Nat. Photonics 4, 498 (2010).
[CrossRef]

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Peters, J. D.

Reed, G.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Reed, G. T.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
[CrossRef]

Rubin, D.

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

Schindler, P. C.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Scholtz, A. L.

W. R. Leeb, A. L. Scholtz, and E. Bonek, IEEE J. Quantum Electron. QE-18, 14 (1982).
[CrossRef]

Sommer, M.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Song, J.

Song, J.-F.

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Streshinsky, M.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Tang, Y.

Thomson, D.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Thomson, D. J.

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
[CrossRef]

Tu, X.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
[CrossRef]

Van Thourhout, D.

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

Walker, R. G.

R. G. Walker, IEEE J. Quantum Electron. 27, 654 (1991).
[CrossRef]

Wang, S. Y.

Xiao, X.

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Xie, C.

P. Dong, L. Chen, C. Xie, L. L. Buhl, and Y. K. Chen, Opt. Express 20, 6163 (2012).
[CrossRef]

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.

Xiong, Y.

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Xu, H.

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Yang, Y.

M. Streshinsky, R. Ding, Y. Liu, A. Novack, Y. Yang, Y. Ma, X. Tu, E. Chee, A. Lim, P. Lo, T. Baehr-Jones, and M. Hochberg, Opt. Express 21, 30530 (2013).

Yu, J.

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Yu, M.

X. Tu, T. Liow, J. Song, X. Luo, Q. Fang, M. Yu, and G. Lo, Opt. Express 21, 12776 (2013).
[CrossRef]

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

Yu, Y.

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

X. Xiao, H. Xu, X. Li, Y. Hu, Z. Li, T. Chu, Y. Yu, and J. Yu, Opt. Express 21, 4116 (2013).
[CrossRef]

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Zlatanovic, S.

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Appl. Opt. (1)

Chin. Phys. B (1)

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, Chin. Phys. B 22, 114212 (2013).
[CrossRef]

Electron. Lett. (1)

L. Liao, A. Liu, J. Basak, H. Nguyen, M. Paniccia, D. Rubin, Y. Chetrit, R. Cohen, and N. Izhaky, Electron. Lett. 43, 1196 (2007).
[CrossRef]

IEEE J. Quantum Electron. (3)

R. G. Walker, IEEE J. Quantum Electron. 27, 654 (1991).
[CrossRef]

W. R. Leeb, A. L. Scholtz, and E. Bonek, IEEE J. Quantum Electron. QE-18, 14 (1982).
[CrossRef]

K. Kubota, J. Noda, and O. Mikami, IEEE J. Quantum Electron. 16, 754 (1980).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

H. Xu, X. Li, X. Xiao, Z. Li, Y. Yu, and J. Yu, IEEE J. Sel. Top. Quantum Electron. 20, 3400110 (2014).

T. Liow, K. Ang, Q. Fang, J.-F. Song, Y. Xiong, M. Yu, G. Lo, and D. Kwong, IEEE J. Sel. Top. Quantum Electron. 16, 307 (2010).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

D. Thomson, F. Gardes, J. Fedeli, S. Zlatanovic, Y. Hu, B. Kuo, E. Myslivets, N. Alic, G. Mashanovich, and G. Reed, IEEE Photon. Technol. Lett. 24, 234 (2012).
[CrossRef]

Nat. Photonics (3)

A. Melikyan, L. Alloatti, A. Muslija, D. Hillerkuss, P. C. Schindler, J. Li, R. Palmer, D. Korn, S. Muehlbrandt, D. Van Thourhout, B. Chen, R. Dinu, M. Sommer, C. Koos, M. Kohl, W. Freude, and J. Leuthold, Nat. Photonics 8, 229 (2014).
[CrossRef]

M. Paniccia, Nat. Photonics 4, 498 (2010).
[CrossRef]

G. T. Reed, G. Mashanovich, F. Y. Gardes, and D. J. Thomson, Nat. Photonics 4, 518 (2010).
[CrossRef]

Opt. Express (5)

Other (4)

P. Dong, C. Xie, L. Chen, L. L. Buhl, and Y.-K. Chen, “112-Gb/s monolithic PDM-QPSK modulator in silicon,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2012, paper Th.3.B.1.

R. Ludwig and P. Bretchko, RF Circuit Design: Theory and Applications (Prentice-Hall, 2000).

S. Hall and H. Heck, in Advanced Signal Integrity for High-Speed Digital Design (Wiley, 2009), Chap. 12.

S. Kaneko, H. Itamoto, T. Miyahara, and T. Hatta, “Impact of package resonance on eye diagram in high-speed optical modules,” presented at the European Conference on Optical Communication, Amsterdam, The Netherlands, 2001, paper WE.P.12.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (6)

Fig. 1.
Fig. 1.

(a) Microscope image of the MZM. (b) Equivalent circuit.

Fig. 2.
Fig. 2.

Calculated properties of the MZM with different bias voltages: (a) characteristic impedance Z0 and effective index of microwave ne, (b) input impedance Zin, and (c) E/O modulation response.

Fig. 3.
Fig. 3.

Measured and calculated (a) reflection coefficient and (b) input impedance.

Fig. 4.
Fig. 4.

E/O modulation responses of the MZM operated when optical and modulating waves were propagating: (a) in the same direction and (b) in opposite directions.

Fig. 5.
Fig. 5.

Modulation efficiencies (VπLπ) at different bias voltages.

Fig. 6.
Fig. 6.

Eye diagrams for driving signals with 30 dB attenuation at (a) 60Gbit/s and (b) 70Gbit/s. Modulated optical signals at (c) 60Gbit/s, ER=7.4dB and (d) 70Gbit/s, ER=6.1dB.

Equations (3)

Equations on this page are rendered with MathJax. Learn more.

Vin=VG×ZinZG+Zin,
Zin=Z0×ZL+Z0×tanh(γ×l)Z0+ZL×tanh(γ×l)
γ=α+jβ=a+jω×nec.

Metrics