Abstract

We have developed a novel areal film thickness and topography measurement method using three-wavelength interferometry. The method simultaneously estimates the profiles of the front and back surfaces and the thickness distribution of a transparent film by model-based separation of two overlapped signals in an interferogram. The validity of the proposed method is demonstrated using computer simulations and actual experiments.

© 2014 Optical Society of America

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References

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  1. K. Kitagawa, Proc. SPIE 6375, 637507 (2006).
    [Crossref]
  2. K. Kitagawa, Proc. SPIE 6716, 671607 (2007).
    [Crossref]
  3. K. Kitagawa, in Handbook of Optical Metrology—Principles and Applications, T. Yoshizawa, ed. (CRC Press, 2009), pp. 677–691.
  4. S. W. Kim and G. H. Kim, Appl. Opt. 38, 5968 (1999).
    [Crossref]
  5. D. Mansfield, Proc. SPIE 7101, 71010U (2008).
    [Crossref]
  6. P. J. de Groot and X. C. de Lega, Proc. SPIE 7064, 70640I (2008).
    [Crossref]
  7. D. Kim, S. Kim, H. Kong, and Y. Lee, Opt. Lett. 27, 1893 (2002).
    [Crossref]
  8. H. Akiyama, O. Sasaki, and T. Suzuki, Opt. Express 13, 10066 (2005).
    [Crossref]
  9. K. Kitagawa, Int. J. Optomechatron. 4, 136 (2010).
    [Crossref]
  10. K. Kitagawa, J. Electron. Imaging 21, 021107 (2012).
    [Crossref]
  11. K. Kitagawa, Appl. Opt. 52, 1998 (2013).
    [Crossref]
  12. R. Fletcher and M. J. D. Powell, Comput. J. 6, 163 (1963).

2013 (1)

2012 (1)

K. Kitagawa, J. Electron. Imaging 21, 021107 (2012).
[Crossref]

2010 (1)

K. Kitagawa, Int. J. Optomechatron. 4, 136 (2010).
[Crossref]

2008 (2)

D. Mansfield, Proc. SPIE 7101, 71010U (2008).
[Crossref]

P. J. de Groot and X. C. de Lega, Proc. SPIE 7064, 70640I (2008).
[Crossref]

2007 (1)

K. Kitagawa, Proc. SPIE 6716, 671607 (2007).
[Crossref]

2006 (1)

K. Kitagawa, Proc. SPIE 6375, 637507 (2006).
[Crossref]

2005 (1)

2002 (1)

1999 (1)

1963 (1)

R. Fletcher and M. J. D. Powell, Comput. J. 6, 163 (1963).

Akiyama, H.

de Groot, P. J.

P. J. de Groot and X. C. de Lega, Proc. SPIE 7064, 70640I (2008).
[Crossref]

de Lega, X. C.

P. J. de Groot and X. C. de Lega, Proc. SPIE 7064, 70640I (2008).
[Crossref]

Fletcher, R.

R. Fletcher and M. J. D. Powell, Comput. J. 6, 163 (1963).

Kim, D.

Kim, G. H.

Kim, S.

Kim, S. W.

Kitagawa, K.

K. Kitagawa, Appl. Opt. 52, 1998 (2013).
[Crossref]

K. Kitagawa, J. Electron. Imaging 21, 021107 (2012).
[Crossref]

K. Kitagawa, Int. J. Optomechatron. 4, 136 (2010).
[Crossref]

K. Kitagawa, Proc. SPIE 6716, 671607 (2007).
[Crossref]

K. Kitagawa, Proc. SPIE 6375, 637507 (2006).
[Crossref]

K. Kitagawa, in Handbook of Optical Metrology—Principles and Applications, T. Yoshizawa, ed. (CRC Press, 2009), pp. 677–691.

Kong, H.

Lee, Y.

Mansfield, D.

D. Mansfield, Proc. SPIE 7101, 71010U (2008).
[Crossref]

Powell, M. J. D.

R. Fletcher and M. J. D. Powell, Comput. J. 6, 163 (1963).

Sasaki, O.

Suzuki, T.

Appl. Opt. (2)

Comput. J. (1)

R. Fletcher and M. J. D. Powell, Comput. J. 6, 163 (1963).

Int. J. Optomechatron. (1)

K. Kitagawa, Int. J. Optomechatron. 4, 136 (2010).
[Crossref]

J. Electron. Imaging (1)

K. Kitagawa, J. Electron. Imaging 21, 021107 (2012).
[Crossref]

Opt. Express (1)

Opt. Lett. (1)

Proc. SPIE (4)

D. Mansfield, Proc. SPIE 7101, 71010U (2008).
[Crossref]

P. J. de Groot and X. C. de Lega, Proc. SPIE 7064, 70640I (2008).
[Crossref]

K. Kitagawa, Proc. SPIE 6375, 637507 (2006).
[Crossref]

K. Kitagawa, Proc. SPIE 6716, 671607 (2007).
[Crossref]

Other (1)

K. Kitagawa, in Handbook of Optical Metrology—Principles and Applications, T. Yoshizawa, ed. (CRC Press, 2009), pp. 677–691.

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Figures (8)

Fig. 1.
Fig. 1.

System configuration for three-wavelength vertical scanning interferometry.

Fig. 2.
Fig. 2.

Transmittance of multibandpass filter.

Fig. 3.
Fig. 3.

Spectral sensitivity of camera for the three wavelengths used.

Fig. 4.
Fig. 4.

Waveforms in computer simulation: (a) synthesized data, (b) separated surface signals, and (c) separated back surface signals, and (d) fitted signals.

Fig. 5.
Fig. 5.

Effect of the initial value of thickness on the results of computer simulation.

Fig. 6.
Fig. 6.

Test target in the actual experiment: (a) cross section and (b) one of the captured interference images.

Fig. 7.
Fig. 7.

Waveforms at the central pixel in the actual experiment: (a) observed signals, (b) separated surface signals, (c) separated back surface signals, and (d) fitted signals.

Fig. 8.
Fig. 8.

Results of the actual experiment: (a) estimated front surface profile; (b) estimated back surface profile; and (c) estimated thickness profile.

Tables (1)

Tables Icon

Table 1. Results of Computer Simulation

Equations (7)

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g(i,j)=a(j)+b1(j)cos[4π(z(i)z1)λ(j)]+b2(j)cos[4π(z(i)z2)λ(j)],
F=j=13i=1N[g(i,j)gi,j]2,
α=(n1)(n+1)4n(n+nB)2+κB2(nnB)2+κB2,
b1(j)=αb2(j).
g(i,j)=a(j)+αb2(j)cos[4π(z(i)z1)λ(j)]+b2(j)cos[4π(z(i)z2)λ(j)].
t=(z1z2)/n,
zb=z1t.

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