Abstract

In this Letter, we present a new approach to processing data from a standard spectral domain optical coherence tomography (OCT) system using depth filtered digital holography (DFDH). Intensity-based OCT processing has an axial resolution of the order of a few micrometers. When the phase information is used to obtain optical path length differences, subwavelength accuracy can be achieved, but this limits the resolvable step heights to half of the wavelength of the system. Thus there is a metrology gap between phase- and intensity-based methods. Our concept addresses this metrology gap by combining DFHD with multiwavelength phase unwrapping. Additionally, the measurements are corrected for aberrations. Here, we present proof of concept measurements of a structured semiconductor sample.

© 2014 Optical Society of America

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References

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V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

2012 (1)

2011 (1)

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

2010 (1)

M. K. Kim, SPIE Rev. 1, 018005 (2010).

2009 (1)

2006 (1)

2005 (1)

2000 (1)

C. Wagner, W. Osten, and S. Seebacher, Opt. Eng. 39, 79 (2000).
[CrossRef]

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1977 (1)

Adinda-Ougba, A.

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Agcaer, S.

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

Aspert, N.

Burkhardt, A.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Charrière, F.

Choma, M.

Cimalla, P.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Colomb, T.

Creazzo, T. L.

Cuche, E.

Depeursinge, C.

Ellerbee, A. K.

Gaertner, M.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Gerhardt, N. C.

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Ghiglia, D. C.

D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software (Wiley, 1998).

Go Alves, A. A.

Goebel, S.

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Hendargo, H. C.

Hofmann, M. R.

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Höpfner, H.

Izatt, J. A.

Jaedicke, V.

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Jones, D. B.

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

Kim, M. K.

M. K. Kim, SPIE Rev. 1, 018005 (2010).

Kirsten, L.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Koch, E.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Koukourakis, N.

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Kühn, J.

Marquet, P.

Meissner, S.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Montfort, F.

Osten, W.

C. Wagner, W. Osten, and S. Seebacher, Opt. Eng. 39, 79 (2000).
[CrossRef]

Pritt, M. D.

D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software (Wiley, 1998).

Robles, F. E.

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

Seara, R.

Seebacher, S.

C. Wagner, W. Osten, and S. Seebacher, Opt. Eng. 39, 79 (2000).
[CrossRef]

Shepherd, N.

Steinert, M.

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

Tilford, C. R.

Uliana, P. B.

Wagner, C.

C. Wagner, W. Osten, and S. Seebacher, Opt. Eng. 39, 79 (2000).
[CrossRef]

Walther, J.

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Welp, H.

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

Wiethoff, H.

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

N. Koukourakis, V. Jaedicke, A. Adinda-Ougba, S. Goebel, H. Wiethoff, H. Höpfner, N. C. Gerhardt, and M. R. Hofmann, Opt. Express 20, 22636 (2012).
[CrossRef]

Yang, C.

Zhao, M.

Anal. Bioanal. Chem. (1)

J. Walther, M. Gaertner, P. Cimalla, A. Burkhardt, L. Kirsten, S. Meissner, and E. Koch, Anal. Bioanal. Chem. 400, 2721 (2011).
[CrossRef]

Appl. Opt. (3)

Biomed. Opt. Express (1)

V. Jaedicke, S. Agcaer, F. E. Robles, M. Steinert, D. B. Jones, S. Goebel, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Biomed. Opt. Express 406, 35 (2013).

Opt. Eng. (1)

C. Wagner, W. Osten, and S. Seebacher, Opt. Eng. 39, 79 (2000).
[CrossRef]

Opt. Express (2)

Opt. Lett. (1)

Proc. SPIE (1)

S. Goebel, V. Jaedicke, N. Koukourakis, H. Wiethoff, A. Adinda-Ougba, N. C. Gerhardt, H. Welp, and M. R. Hofmann, Proc. SPIE 8589, 85891J (2013).
[CrossRef]

SPIE Rev. (1)

M. K. Kim, SPIE Rev. 1, 018005 (2010).

Other (1)

D. C. Ghiglia and M. D. Pritt, Two-Dimensional Phase Unwrapping: Theory, Algorithms, and Software (Wiley, 1998).

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Figures (4)

Fig. 1.
Fig. 1.

DFDH signal processing.

Fig. 2.
Fig. 2.

Top: microscope image of the GaAs semiconductor sample. Bottom: profilometer scans obtained with stylus device.

Fig. 3.
Fig. 3.

Numerically unwrapped height profiles of the semiconductor sample.

Fig. 4.
Fig. 4.

Height map and profiles of the hierarchically unwrapped semiconductor sample measurement.

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

I(k)x,y=IS(k)x,y+IR(k)x,y+2IS(k)x,yIR(k)x,ycos(k·Δzx,y),
z(x,y)|λ=λ·φ(x,y)|λ4π.
Φn={φ0φnifφ0φnφ0φn+2πifφ0<φn.
Λn=λ0λn|λ0λn|.
zn=zn+Λn2floor(2zn1znΛn+0.5).
zu(ρ,ϑ)=i=0i=NaiZi(ρ,ϑ).
ΓZ(ρ,ϑ)=exp((ii=0NaiZi)4πλ).

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