Abstract

We report good phase controllability and high production yield in Si-nanowire-based multistage delayed Mach–Zehnder interferometer-type optical multiplexers/demultiplexers (MUX/DeMUX) fabricated by an ArF-immersion lithography process on a 300 mm silicon-on-insulator (SOI) wafer. Three kinds of devices fabricated in this work exhibit clear 1×4Ch wavelength filtering operations for various optical frequency spacing. These results are promising for their applications in high-density wavelength division multiplexing-based optical interconnects.

© 2014 Optical Society of America

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References

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  1. D. A. B. Miller, Proc. IEEE 97, 1166 (2009).
    [CrossRef]
  2. Y. A. Vlasov, IEEE Commun. Mag. 50(2), s67 (2012).
    [CrossRef]
  3. A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
    [CrossRef]
  4. P. Dong, N. N. Feng, D. Feng, W. Qian, H. Liang, D. C. Lee, B. J. Luff, T. Banwell, A. Agarwal, P. Toliver, R. Menendez, T. K. Woodward, and M. Asghari, Opt. Express 18, 23784 (2010).
    [CrossRef]
  5. S. Park, K. J. Kim, I. G. Kim, and G. Kim, Opt. Express 19, 13531 (2011).
    [CrossRef]
  6. D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
    [CrossRef]
  7. W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
    [CrossRef]
  8. D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, Opt. Lett. 33, 530 (2008).
    [CrossRef]
  9. S. H. Jeong, S. Tanaka, T. Akiyama, S. Sekiguchi, Y. Tanaka, and K. Morito, Opt. Express 20, 26000 (2012).
    [CrossRef]
  10. F. Horst, W. M. J. Green, S. Assefa, S. M. Shank, Y. A. Vlasov, and B. J. Offrein, Opt. Express 21, 11652 (2013).
    [CrossRef]
  11. S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.
  12. T. Goh, S. Suzuki, and A. Sugita, J. Lightwave Technol. 15, 2107 (1997).
    [CrossRef]
  13. S. H. Jeong, D. Shimura, T. Simoyama, M. Seki, N. Yokoyama, M. Ohtsuka, K. Koshino, T. Horikawa, Y. Tanaka, and K. Morito, Opt. Express 21, 30163 (2013).
    [CrossRef]

2013 (2)

2012 (2)

2011 (1)

2010 (3)

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

P. Dong, N. N. Feng, D. Feng, W. Qian, H. Liang, D. C. Lee, B. J. Luff, T. Banwell, A. Agarwal, P. Toliver, R. Menendez, T. K. Woodward, and M. Asghari, Opt. Express 18, 23784 (2010).
[CrossRef]

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

2009 (1)

D. A. B. Miller, Proc. IEEE 97, 1166 (2009).
[CrossRef]

2008 (2)

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, Opt. Lett. 33, 530 (2008).
[CrossRef]

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

1997 (1)

T. Goh, S. Suzuki, and A. Sugita, J. Lightwave Technol. 15, 2107 (1997).
[CrossRef]

Agarwal, A.

Akiyama, T.

Asghari, M.

Assefa, S.

F. Horst, W. M. J. Green, S. Assefa, S. M. Shank, Y. A. Vlasov, and B. J. Offrein, Opt. Express 21, 11652 (2013).
[CrossRef]

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Baets, R.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Banwell, T.

Barkai, A.

Barwicz, T.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Basak, J.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

Bogaerts, W.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Brouckaert, J.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Chetrit, Y.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

De Vos, K.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Dong, P.

Dumon, P.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Elek, N.

Ellis-Monaghan, J.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Feng, D.

Feng, N. N.

Gill, D. M.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Goh, T.

T. Goh, S. Suzuki, and A. Sugita, J. Lightwave Technol. 15, 2107 (1997).
[CrossRef]

Green, W.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Green, W. M. J.

Gu, X.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Haensch, W.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Hofrichter, J.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Horikawa, T.

Horst, F.

F. Horst, W. M. J. Green, S. Assefa, S. M. Shank, Y. A. Vlasov, and B. J. Offrein, Opt. Express 21, 11652 (2013).
[CrossRef]

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Jeong, S. H.

Jones, R.

Kamlapurkar, S.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Khater, M.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Kiewra, E.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Kim, D. J.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

Kim, D. W.

Kim, G.

S. Park, K. J. Kim, I. G. Kim, and G. Kim, Opt. Express 19, 13531 (2011).
[CrossRef]

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

Kim, I. G.

Kim, K. J.

Koshino, K.

Lee, D. C.

Lee, J. M.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

Liang, H.

Liao, L.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

Liu, A.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, Opt. Lett. 33, 530 (2008).
[CrossRef]

Luff, B. J.

Menendez, R.

Miller, D. A. B.

D. A. B. Miller, Proc. IEEE 97, 1166 (2009).
[CrossRef]

Morito, K.

Nguyen, H.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

D. W. Kim, A. Barkai, R. Jones, N. Elek, H. Nguyen, and A. Liu, Opt. Lett. 33, 530 (2008).
[CrossRef]

Offrein, B.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Offrein, B. J.

Ohtsuka, M.

Pan, H.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Paniccia, M.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

Park, S.

Proesel, J.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Pyo, J.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

Qian, W.

Reinholm, C.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Rice, P.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Rosenberg, J.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Rubin, D.

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

Rylyakov, A.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Schow, C.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Seki, M.

Sekiguchi, S.

Selvaraja, S. K.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Shank, S.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Shank, S. M.

Shimura, D.

Simoyama, T.

Song, J. H.

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

Sugita, A.

T. Goh, S. Suzuki, and A. Sugita, J. Lightwave Technol. 15, 2107 (1997).
[CrossRef]

Suzuki, S.

T. Goh, S. Suzuki, and A. Sugita, J. Lightwave Technol. 15, 2107 (1997).
[CrossRef]

Tanaka, S.

Tanaka, Y.

Toliver, P.

Topuria, T.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Van Thourhout, D.

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

Vlasov, Y.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Vlasov, Y. A.

Woodward, T. K.

Yang, M.

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

Yokoyama, N.

IEEE Commun. Mag. (1)

Y. A. Vlasov, IEEE Commun. Mag. 50(2), s67 (2012).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (2)

A. Liu, L. Liao, Y. Chetrit, J. Basak, H. Nguyen, D. Rubin, and M. Paniccia, IEEE J. Sel. Top. Quantum Electron. 16, 23 (2010).
[CrossRef]

W. Bogaerts, S. K. Selvaraja, P. Dumon, J. Brouckaert, K. De Vos, D. Van Thourhout, and R. Baets, IEEE J. Sel. Top. Quantum Electron. 16, 33 (2010).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

D. J. Kim, J. M. Lee, J. H. Song, J. Pyo, and G. Kim, IEEE Photon. Technol. Lett. 20, 1615 (2008).
[CrossRef]

J. Lightwave Technol. (1)

T. Goh, S. Suzuki, and A. Sugita, J. Lightwave Technol. 15, 2107 (1997).
[CrossRef]

Opt. Express (5)

Opt. Lett. (1)

Proc. IEEE (1)

D. A. B. Miller, Proc. IEEE 97, 1166 (2009).
[CrossRef]

Other (1)

S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, A. Rylyakov, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, T. Barwicz, M. Yang, J. Proesel, J. Hofrichter, B. Offrein, X. Gu, W. Haensch, J. Ellis-Monaghan, and Y. Vlasov, in Proceedings of 2012 IEEE International Electron Devices Meeting (IEEE, 2012), paper 33.8.

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Figures (7)

Fig. 1.
Fig. 1.

Device structures of 1×4Ch multistage DMZI-type optical DeMUX: (a) Type-I, (b) Type-II, and (c) Type-III.

Fig. 2.
Fig. 2.

Spectral characteristics of the 800 GHz spaced Type-I device for TE-mode light: (a) measured spectra and (b) calculated spectra based on the parameters shown in Table 2.

Fig. 3.
Fig. 3.

Measured spectra for the fabricated Type-II devices with (a) Δν=1250GHz, (b) 800 GHz, and (c) 400 GHz

Fig. 4.
Fig. 4.

Partial configuration of Type-III devices and their spectral characteristics: (a), (b) characterization models; (c), (d) measured spectra; (e), (f) calculated spectra when considering κDC(λ) only.

Fig. 5.
Fig. 5.

Measured spectra for the fabricated Type-III devices with (a) Δν=1250GHz and (b) 800 GHz.

Fig. 6.
Fig. 6.

Calculated spectra for the 800 GHz spaced Type-III device when we consider (a) only κDC(λ) or (b) both of κDC(λ) and δϕ.

Fig. 7.
Fig. 7.

Measured inter-die distributions: (a) tested dies in a 300 mm SOI wafer; (b) measured spectra for the two Type-II devices with Δν=800GHz; and (c) maximum deviation of center wavelengths (Δλ0) for all fabricated lineups.

Tables (2)

Tables Icon

Table 1. Parameters for Three Types of 1×4Ch MUX/DeMUX

Tables Icon

Table 2. Synthesized Parameters of the Type-I Device for Matching with the Measured Spectra

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