Abstract

We demonstrate subwavelength bidirectional grating (SWG) coupled slot waveguide fabricated in silicon-on-sapphire for transverse electric polarized wave operation at 3.4 μm wavelength. Coupling efficiency of 29% for SWG coupler is experimentally achieved. Propagation loss of 11dB/cm has been experimentally obtained for slot waveguides. Two-step taper mode converters with an insertion loss of 0.13 dB are used to gradually convert the strip waveguide mode into slot waveguide mode.

© 2014 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. R. Soref, Nat. Photonics 4, 495 (2010).
    [CrossRef]
  2. R. Soref, S. J. Emelett, and A. R. Buchwald, J. Opt. A 8, 840 (2006).
    [CrossRef]
  3. Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
    [CrossRef]
  4. T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, Opt. Express 18, 12127 (2010).
    [CrossRef]
  5. R. Shankar, I. Bulu, and M. Loncar, Appl. Phys. Lett. 102, 051108 (2013).
    [CrossRef]
  6. F. Li, S. D. Jackson, C. Grillet, E. Magi, D. Hudson, S. J. Madden, Y. Moghe, C. O’Brien, A. Read, S. G. Duvall, P. Atanackovic, B. J. Eggleton, and D. J. Moss, Opt. Express 19, 15212 (2011).
    [CrossRef]
  7. A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
    [CrossRef]
  8. C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
    [CrossRef]
  9. V. R. Almeida, Q. Xu, C. A. Barrios, and M. Lipson, Opt. Lett. 29, 1209 (2004).
    [CrossRef]
  10. Q. Xu, V. R. Almeida, R. R. Panepucci, and M. Lipson, Opt. Lett. 29, 1626 (2004).
    [CrossRef]
  11. Z. Wang, N. Zhu, Y. Tang, L. Wosinski, D. Dai, and S. He, Opt. Lett. 34, 1498 (2009).
    [CrossRef]
  12. Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
    [CrossRef]
  13. N.-N. Feng, R. Sun, L. C. Kimerling, and J. Michel, Opt. Lett. 32, 1250 (2007).
    [CrossRef]
  14. C. Ma, Q. Zhang, and E. VanKeuren, J. Nanosci. Nanotechnol. 11, 2524 (2011).
    [CrossRef]
  15. R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
    [CrossRef]
  16. X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
    [CrossRef]
  17. Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
    [CrossRef]
  18. S. M. Rytov, Sov. Phys. JETP 2, 466 (1956).

2014 (1)

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

2013 (2)

R. Shankar, I. Bulu, and M. Loncar, Appl. Phys. Lett. 102, 051108 (2013).
[CrossRef]

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

2012 (3)

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

2011 (3)

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

C. Ma, Q. Zhang, and E. VanKeuren, J. Nanosci. Nanotechnol. 11, 2524 (2011).
[CrossRef]

F. Li, S. D. Jackson, C. Grillet, E. Magi, D. Hudson, S. J. Madden, Y. Moghe, C. O’Brien, A. Read, S. G. Duvall, P. Atanackovic, B. J. Eggleton, and D. J. Moss, Opt. Express 19, 15212 (2011).
[CrossRef]

2010 (3)

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
[CrossRef]

R. Soref, Nat. Photonics 4, 495 (2010).
[CrossRef]

T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, Opt. Express 18, 12127 (2010).
[CrossRef]

2009 (1)

2007 (1)

2006 (1)

R. Soref, S. J. Emelett, and A. R. Buchwald, J. Opt. A 8, 840 (2006).
[CrossRef]

2004 (2)

1956 (1)

S. M. Rytov, Sov. Phys. JETP 2, 466 (1956).

Alloatti, L.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Almeida, V. R.

Asher, W.

Atanackovic, P.

Baehr-Jones, T.

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, Opt. Express 18, 12127 (2010).
[CrossRef]

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
[CrossRef]

Barrios, C. A.

Bolten, J.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Buchwald, A. R.

R. Soref, S. J. Emelett, and A. R. Buchwald, J. Opt. A 8, 840 (2006).
[CrossRef]

Bulu, I.

R. Shankar, I. Bulu, and M. Loncar, Appl. Phys. Lett. 102, 051108 (2013).
[CrossRef]

Chakravarty, S.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

Chen, R. T.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Chen, X.

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

Chen, Y.

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

Chen, Y. M.

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

Cheng, Z.

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

Covey, J.

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Dai, D.

Duvall, S. G.

Eggleton, B. J.

Emelett, S. J.

R. Soref, S. J. Emelett, and A. R. Buchwald, J. Opt. A 8, 840 (2006).
[CrossRef]

Feng, N.-N.

Freude, W.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Fung, C.

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

Fung, C. K. Y.

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

Grillet, C.

He, S.

Heni, W.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Hochberg, M.

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, Opt. Express 18, 12127 (2010).
[CrossRef]

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
[CrossRef]

Hosseini, A.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Hudson, D.

Ilic, R.

T. Baehr-Jones, A. Spott, R. Ilic, A. Spott, B. Penkov, W. Asher, and M. Hochberg, Opt. Express 18, 12127 (2010).
[CrossRef]

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
[CrossRef]

Jackson, S. D.

Karl, M.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Kimerling, L. C.

Koos, C.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Korn, D.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Kwong, D.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Lai, W.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

Leuthold, J.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Li, F.

Li, J.

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

Lin, X.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

Lipson, M.

Liu, Y.

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
[CrossRef]

Loncar, M.

R. Shankar, I. Bulu, and M. Loncar, Appl. Phys. Lett. 102, 051108 (2013).
[CrossRef]

Ma, C.

C. Ma, Q. Zhang, and E. VanKeuren, J. Nanosci. Nanotechnol. 11, 2524 (2011).
[CrossRef]

Madden, S. J.

Magi, E.

Michel, J.

Moghe, Y.

Moss, D. J.

O’Brien, C.

Palmer, R.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Panepucci, R. R.

Penkov, B.

Pomerene, A.

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

Read, A.

Rytov, S. M.

S. M. Rytov, Sov. Phys. JETP 2, 466 (1956).

Schindler, P. C.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Shankar, R.

R. Shankar, I. Bulu, and M. Loncar, Appl. Phys. Lett. 102, 051108 (2013).
[CrossRef]

Soref, R.

R. Soref, Nat. Photonics 4, 495 (2010).
[CrossRef]

R. Soref, S. J. Emelett, and A. R. Buchwald, J. Opt. A 8, 840 (2006).
[CrossRef]

Spott, A.

Subbaraman, H.

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Sun, R.

Tang, Y.

Tsang, H. K.

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

VanKeuren, E.

C. Ma, Q. Zhang, and E. VanKeuren, J. Nanosci. Nanotechnol. 11, 2524 (2011).
[CrossRef]

Wahlbrink, T.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Waldow, M.

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

Wang, Z.

Wong, C. Y.

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

Wosinski, L.

Xu, K.

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

Xu, Q.

Xu, X.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

Zhang, Q.

C. Ma, Q. Zhang, and E. VanKeuren, J. Nanosci. Nanotechnol. 11, 2524 (2011).
[CrossRef]

Zhu, N.

Zou, Y.

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

Appl. Phys. Lett. (3)

A. Spott, Y. Liu, T. Baehr-Jones, R. Ilic, and M. Hochberg, Appl. Phys. Lett. 97, 213501 (2010).
[CrossRef]

R. Shankar, I. Bulu, and M. Loncar, Appl. Phys. Lett. 102, 051108 (2013).
[CrossRef]

X. Xu, H. Subbaraman, J. Covey, D. Kwong, A. Hosseini, and R. T. Chen, Appl. Phys. Lett. 101, 031109 (2012).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

Y. Zou, S. Chakravarty, D. Kwong, W. Lai, X. Xu, X. Lin, A. Hosseini, and R. T. Chen, IEEE J. Sel. Top. Quantum Electron. 20, 1 (2014).
[CrossRef]

IEEE Photon. J. (3)

Z. Cheng, X. Chen, C. Y. Wong, K. Xu, C. Fung, Y. Chen, and H. K. Tsang, IEEE Photon. J. 4, 104 (2012).
[CrossRef]

R. Palmer, L. Alloatti, D. Korn, W. Heni, P. C. Schindler, J. Bolten, M. Karl, M. Waldow, T. Wahlbrink, W. Freude, C. Koos, and J. Leuthold, IEEE Photon. J. 5, 2200409 (2013).
[CrossRef]

C. Y. Wong, Z. Cheng, X. Chen, K. Xu, C. K. Y. Fung, Y. M. Chen, and H. K. Tsang, IEEE Photon. J. 4, 1095 (2012).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

Y. Liu, T. Baehr-Jones, J. Li, A. Pomerene, and M. Hochberg, IEEE Photon. Technol. Lett. 23, 1496 (2011).
[CrossRef]

J. Nanosci. Nanotechnol. (1)

C. Ma, Q. Zhang, and E. VanKeuren, J. Nanosci. Nanotechnol. 11, 2524 (2011).
[CrossRef]

J. Opt. A (1)

R. Soref, S. J. Emelett, and A. R. Buchwald, J. Opt. A 8, 840 (2006).
[CrossRef]

Nat. Photonics (1)

R. Soref, Nat. Photonics 4, 495 (2010).
[CrossRef]

Opt. Express (2)

Opt. Lett. (4)

Sov. Phys. JETP (1)

S. M. Rytov, Sov. Phys. JETP 2, 466 (1956).

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (8)

Fig. 1.
Fig. 1.

(a) 2D plot showing simulated confinement factor as a function of slot width S and rail width W. The scale bar on the right indicates confinement factor. (b) Simulated electric field for a slot waveguide with W=0.6μm and S=0.13μm. A high confinement in the slot is obtained.

Fig. 2.
Fig. 2.

(a) Simulated electric field for the mode converter. The simulation data show 98% conversion efficiency from strip waveguide mode to slot waveguide mode when Ltaper1=4μm and Ltaper2=10μm. (b) 2D plot showing simulated conversion efficiency as a function of Ltaper1 and Ltaper2. The scale bar on the right indicates conversion efficiency.

Fig. 3.
Fig. 3.

(a) Simulated coupling efficiency from fiber (red curve) shows the peak is located around 3.4 μm, and the reflection (black curve) and (b) simulated output optical field from grating coupler to fiber.

Fig. 4.
Fig. 4.

(a) Schematic of the fabricated device, (b) SEM image of fabricated slot waveguide, (c) SEM image of SWG coupler, (d) magnified view of air holes, (e) close-up of strip waveguide to slot waveguide mode converter, and (f) SEM image of single mode strip waveguide with 1 μm width.

Fig. 5.
Fig. 5.

Schematic of the experimental setup used to characterize our devices.

Fig. 6.
Fig. 6.

Experimental measured and simulated coupling efficiency with different incident angles.

Fig. 7.
Fig. 7.

(a) Measured loss of eight single mode waveguides fabricated on SOS operating at 3.4 μm wavelength. The waveguides are 0.6 μm in height and 1 μm in width. 2.1dB/cm propagation loss is achieved by linear fitting. (b) Measured loss of eight slot waveguides fabricated on SOS operating at 3.4 μm wavelength. An 11dB/cm propagation loss is achieved by linear fitting.

Fig. 8.
Fig. 8.

Measured loss versus number of strip-to-slot waveguide mode converters at an operating wavelength of 3.4 μm. Approximately 0.13 dB loss per mode converter is measured, corresponding to 97% conversion efficiency.

Metrics