Abstract

A fiber-optic acoustic pressure sensor based on a large-area nanolayer silver diaphragm is demonstrated with a high dynamic pressure sensitivity of 160nm/Pa at 4 kHz frequency. The sensor exhibits a noise limited detectable pressure level of 14.5μPa/Hz1/2. Its high dynamic pressure sensitivity and simple fabrication process make it an attractive tool for acoustic sensing and photo-acoustic spectroscopy.

© 2014 Optical Society of America

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References

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    [CrossRef]
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    [CrossRef]

2013 (1)

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

2012 (2)

2010 (2)

W. Wang, N. Wu, Y. Tian, C. Niezrecki, and X. Wang, Opt. Express 18, 9006 (2010).
[CrossRef]

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

2006 (1)

Y. Rao, Opt. Fiber Technol. 12, 227 (2006).
[CrossRef]

2003 (1)

1982 (1)

A. Dandridge, A. B. Tveten, and T. G. Giallorenzi, IEEE Trans. Microwave Theory Tech. 30, 1635 (1982).
[CrossRef]

Chan, C. C.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Chen, L. H.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Dai, J. Y.

Dandridge, A.

A. Dandridge, A. B. Tveten, and T. G. Giallorenzi, IEEE Trans. Microwave Theory Tech. 30, 1635 (1982).
[CrossRef]

Deng, J.

Fan, S.

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

Giallorenzi, T. G.

A. Dandridge, A. B. Tveten, and T. G. Giallorenzi, IEEE Trans. Microwave Theory Tech. 30, 1635 (1982).
[CrossRef]

Goh, S. K.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Ho, H. L.

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

J. Ma, W. Jin, H. L. Ho, and J. Y. Dai, Opt. Lett. 37, 2493 (2012).
[CrossRef]

Jin, W.

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

J. Ma, W. Jin, H. L. Ho, and J. Y. Dai, Opt. Lett. 37, 2493 (2012).
[CrossRef]

Kim, D. W.

Li, C.

Lu, L.

Lu, W.

Ma, J.

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

J. Ma, W. Jin, H. L. Ho, and J. Y. Dai, Opt. Lett. 37, 2493 (2012).
[CrossRef]

Niezrecki, C.

Rao, Y.

Y. Rao, Opt. Fiber Technol. 12, 227 (2006).
[CrossRef]

Ren, D.

Shi, X.

Sun, J.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Tian, Y.

Tveten, A. B.

A. Dandridge, A. B. Tveten, and T. G. Giallorenzi, IEEE Trans. Microwave Theory Tech. 30, 1635 (1982).
[CrossRef]

Wang, A.

Wang, W.

Wang, X.

Wu, N.

Xiao, H.

Xu, F.

Xuan, H.

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

Yang, Y.

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

Yu, B.

Yuan, W.

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

Appl. Opt. (1)

IEEE Photon. Technol. Lett. (1)

J. Ma, H. Xuan, H. L. Ho, W. Jin, Y. Yang, and S. Fan, IEEE Photon. Technol. Lett. 25, 932 (2013).
[CrossRef]

IEEE Trans. Microwave Theory Tech. (1)

A. Dandridge, A. B. Tveten, and T. G. Giallorenzi, IEEE Trans. Microwave Theory Tech. 30, 1635 (1982).
[CrossRef]

Opt. Express (1)

Opt. Fiber Technol. (1)

Y. Rao, Opt. Fiber Technol. 12, 227 (2006).
[CrossRef]

Opt. Lett. (2)

Sens. Actuators A (1)

L. H. Chen, C. C. Chan, W. Yuan, S. K. Goh, and J. Sun, Sens. Actuators A 163, 42 (2010).
[CrossRef]

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Figures (6)

Fig. 1.
Fig. 1.

(a) Schematic and (b) image of the sensing head.

Fig. 2.
Fig. 2.

Experimental setup of the calibration and acoustic pressure test.

Fig. 3.
Fig. 3.

Dependence of output voltage signal on the vibration amplitude.

Fig. 4.
Fig. 4.

Vibration amplitude of the silver diaphragm for varying applied acoustic pressure level at 4 kHz.

Fig. 5.
Fig. 5.

Power spectrum of the sensing head when 3 mPa acoustic pressure was applied at 4 kHz frequency.

Fig. 6.
Fig. 6.

Dependence of the output signal voltage on frequency when 2 mPa acoustic pressure was applied on the sensing head.

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