Abstract

We report on an 800 nm center-wavelength metal/multilayer-dielectric grating (MMDG) with broadband, high diffraction efficiency. The trapezoidal grating ridge consists of an HfO2 layer sandwiched between two SiO2 films. Combining the advantages of SiO2 and HfO2, the grating ridge reduces the difficulties of grating ridge attainment. For such a configuration, high-performance MMDG can be successfully fabricated using the existing technology. Experimentally we demonstrated a 163 nm bandwidth MMDG with 1st-order diffraction efficiency greater than 90%. The fabricated MMDG achieved high performance as the design with large fabrication tolerances.

© 2013 Optical Society of America

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H. Guan, Y. Jin, S. Liu, F. Kong, Y. Du, K. He, K. Yi, and J. Shao, “Near-field optical properties of wide bandwidth metal multi-layer dielectric gratings for pulse compressor,” Appl. Phys. B, to be published (doi:10.1007/s003–40–013–5560–9).
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K. He, J. P. Wang, Y. Q. Hou, X. Li, H. Y. Guan, F. Y. Kong, S. J. Liu, Y. X. Jin, and K. Yi, Appl. Opt. 52, 653 (2013).
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[CrossRef]

Yi, K.

K. He, J. P. Wang, Y. Q. Hou, X. Li, H. Y. Guan, F. Y. Kong, S. J. Liu, Y. X. Jin, and K. Yi, Appl. Opt. 52, 653 (2013).
[CrossRef]

H. Guan, Y. Jin, S. Liu, F. Kong, Y. Du, K. He, K. Yi, and J. Shao, “Near-field optical properties of wide bandwidth metal multi-layer dielectric gratings for pulse compressor,” Appl. Phys. B, to be published (doi:10.1007/s003–40–013–5560–9).
[CrossRef]

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A. Hu, C. H. Zhou, H. C. Cao, J. Wu, J. J. Yu, and W. Jia, J. Opt. 14, 055705 (2012).
[CrossRef]

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A. Hu, C. H. Zhou, H. C. Cao, J. Wu, J. J. Yu, and W. Jia, J. Opt. 14, 055705 (2012).
[CrossRef]

Appl. Opt.

J. Lightwave Technol.

J. Opt.

A. Hu, C. H. Zhou, H. C. Cao, J. Wu, J. J. Yu, and W. Jia, J. Opt. 14, 055705 (2012).
[CrossRef]

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E. Gerstner, Nature 446, 16 (2007).
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D. Strickland and G. Mourou, Opt. Commun. 56, 219 (1985).
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F. Kong, S. Chen, Y. Jin, S. Liu, H. Guan, Y. Du, and H. He, Opt. Laser Technol. 54, 45 (2013).
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Quantum Electron.

A. S. Svakhin, V. A. Sychugov, and A. E. Tikhomirov, Quantum Electron. 24, 233 (1994).

Other

H. Guan, Y. Jin, S. Liu, F. Kong, Y. Du, K. He, K. Yi, and J. Shao, “Near-field optical properties of wide bandwidth metal multi-layer dielectric gratings for pulse compressor,” Appl. Phys. B, to be published (doi:10.1007/s003–40–013–5560–9).
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E. D. Palik and G. Ghosh, Handbook of Optical Constants of Solids (Academic, 1998).

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Figures (6)

Fig. 1.
Fig. 1.

Structure of MMDG.

Fig. 2.
Fig. 2.

1 st-order diffraction efficiencies versus (a) incident wavelength and (b) angle for the designed MMDG with f = 0.43 , t g 1 = 100 nm , t g 2 = 150 nm , t g 3 = 57 nm , t m 1 = 119 nm , t m 2 = 81 nm , Λ = 574.7 nm , and θ r = 75 ° .

Fig. 3.
Fig. 3.

Calculated fabrication tolerance analysis of the trapezoidal MMDG, (a) diffraction efficiency as a function of duty cycle and wavelength, and (b) diffraction efficiency as a function of slope angle and wavelength.

Fig. 4.
Fig. 4.

Reflectivity of MMLD under 53° TE incidence.

Fig. 5.
Fig. 5.

Cross-sectional views of MMDG.

Fig. 6.
Fig. 6.

1 st-order diffraction efficiency of an MMDG operating at 800 nm and 53°.

Equations (1)

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MF o = { 1 N λ i [ ( 100 % R 1 ( λ i ) ) 2 + ( R 0 ( λ i ) ) 2 ] } 1 / 2 ,

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