Abstract

We report on fabrication of whispering-gallery-mode microlasers in a Nd:glass chip by femtosecond laser three-dimensional micromachining. The main fabrication procedures include the fabrication of freestanding microdisks supported by thin pillars by femtosecond laser ablation of the glass substrate immersed in water, followed by CO2 laser annealing for surface smoothing. The quality (Q) factor of the fabricated microcavity is measured to be 1.065×106. Lasing is observed at a pump threshold as low as ∼69  μW at room temperature with a continuous-wave laser diode operating at 780 nm. This technique allows for fabrication of microcavities of high Q factors in various dielectric materials, such as glasses and crystals.

© 2013 Optical Society of America

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L. He, Ş. K. Özdemir, and L. Yang, Laser Photon. Rev. 7, 60 (2013).

2012 (2)

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Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

2009 (1)

2006 (2)

M. C. M. Lee and M. C. Wu, J. Microelectromech. Syst. 15, 338 (2006).
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V. S. Ilchenko and A. B. Matsko, IEEE J. Sel. Top. Quantum Electron. 12, 15 (2006).
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Dong, C.-H.

Ell, C.

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Feng, X.-B.

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[CrossRef]

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Grot, A.

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He, L.

L. He, Ş. K. Özdemir, and L. Yang, Laser Photon. Rev. 7, 60 (2013).

Hendrickson, J.

T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

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[CrossRef]

Itoh, K.

Jiang, X.-F.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

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Kalt, H.

Khitrova, G.

T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

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K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, IEEE Photon. Technol. Lett. 25, 430 (2013).
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Ku, J. F.

Kuroda, D.

Lee, M. C. M.

M. C. M. Lee and M. C. Wu, J. Microelectromech. Syst. 15, 338 (2006).
[CrossRef]

Li, B.-B.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

Li, Y.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

Y. Li, K. Itoh, W. Watanabe, K. Yamada, D. Kuroda, J. Nishii, and Y. Jiang, Opt. Lett. 26, 1912 (2001).
[CrossRef]

Lin, J.

Liu, Z.-P.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

Ma, Y.

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V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, Phys. Rev. Lett. 92, 043903 (2004).
[CrossRef]

Mansuripur, M.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, IEEE Photon. Technol. Lett. 25, 430 (2013).
[CrossRef]

Mappes, T.

Matsko, A. B.

V. S. Ilchenko and A. B. Matsko, IEEE J. Sel. Top. Quantum Electron. 12, 15 (2006).
[CrossRef]

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, Phys. Rev. Lett. 92, 043903 (2004).
[CrossRef]

Mirkarimi, L. W.

Nishii, J.

Norwood, R. A.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, IEEE Photon. Technol. Lett. 25, 430 (2013).
[CrossRef]

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L. He, Ş. K. Özdemir, and L. Yang, Laser Photon. Rev. 7, 60 (2013).

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Qin, Y.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

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T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

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V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, Phys. Rev. Lett. 92, 043903 (2004).
[CrossRef]

Scherer, A.

T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

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Shchekin, O. B.

T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

Sigalas, M.

Spillane, S. M.

D. K. Armani, T. I. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 925 (2003).
[CrossRef]

Sugioka, K.

K. Sugioka and Y. Cheng, Lab Chip 12, 3576 (2012).
[CrossRef]

Sun, H. B.

Tada, K.

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, IEEE Photon. Technol. Lett. 25, 430 (2013).
[CrossRef]

Thiel, M.

Tong, L.

Vahala, K. J.

D. K. Armani, T. I. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 925 (2003).
[CrossRef]

K. J. Vahala, Nature 424, 839 (2003).
[CrossRef]

Watanabe, W.

Wu, M. C.

M. C. M. Lee and M. C. Wu, J. Microelectromech. Syst. 15, 338 (2006).
[CrossRef]

Xiao, Y.-F.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

Y.-F. Xiao, C.-H. Dong, C.-L. Zou, Z.-F. Han, L. Yang, and G.-C. Guo, Opt. Lett. 34, 509 (2009).
[CrossRef]

Xu, Z.

Yamada, K.

Yang, H.

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

Yang, L.

L. He, Ş. K. Özdemir, and L. Yang, Laser Photon. Rev. 7, 60 (2013).

Y.-F. Xiao, C.-H. Dong, C.-L. Zou, Z.-F. Han, L. Yang, and G.-C. Guo, Opt. Lett. 34, 509 (2009).
[CrossRef]

Yoshie, T.

T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

Yu, S.

Zhang, R.

Zou, C.-L.

Appl. Phys. Lett. (1)

Z.-P. Liu, Y. Li, Y.-F. Xiao, B.-B. Li, X.-F. Jiang, Y. Qin, X.-B. Feng, H. Yang, and Q. Gong, Appl. Phys. Lett. 97, 211105 (2010).
[CrossRef]

IEEE J. Sel. Top. Quantum Electron. (1)

V. S. Ilchenko and A. B. Matsko, IEEE J. Sel. Top. Quantum Electron. 12, 15 (2006).
[CrossRef]

IEEE Photon. Technol. Lett. (1)

K. Tada, G. A. Cohoon, K. Kieu, M. Mansuripur, and R. A. Norwood, IEEE Photon. Technol. Lett. 25, 430 (2013).
[CrossRef]

J. Microelectromech. Syst. (1)

M. C. M. Lee and M. C. Wu, J. Microelectromech. Syst. 15, 338 (2006).
[CrossRef]

Lab Chip (1)

K. Sugioka and Y. Cheng, Lab Chip 12, 3576 (2012).
[CrossRef]

Laser Photon. Rev. (1)

L. He, Ş. K. Özdemir, and L. Yang, Laser Photon. Rev. 7, 60 (2013).

Nature (3)

D. K. Armani, T. I. Kippenberg, S. M. Spillane, and K. J. Vahala, Nature 421, 925 (2003).
[CrossRef]

T. Yoshie, A. Scherer, J. Hendrickson, G. Khitrova, H. M. Gibbs, G. Rupper, C. Ell, O. B. Shchekin, and D. G. Deppe, Nature 432, 200 (2004).
[CrossRef]

K. J. Vahala, Nature 424, 839 (2003).
[CrossRef]

Opt. Express (2)

Opt. Lett. (4)

Phys. Rev. Lett. (1)

V. S. Ilchenko, A. A. Savchenkov, A. B. Matsko, and L. Maleki, Phys. Rev. Lett. 92, 043903 (2004).
[CrossRef]

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