Abstract

We have experimentally demonstrated a compact, integrated optical hydrogen sensor on a silicon-on-insulator platform. The sensor consists of silicon waveguide coated with a thin palladium film. The sensitivity and response time of the sensor was tested for volumetric hydrogen concentrations ranging from 0% to 4%. The proposed hydrogen sensor shows great potential as a building block for an optical nose capable of simultaneous detection of multiple gases as well as environmental effects such as temperature and humidity.

© 2013 Optical Society of America

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  1. T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
    [CrossRef]
  2. N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
    [CrossRef]
  3. P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
    [CrossRef]
  4. http://hdl.handle.net/1854/LU-547471 .
  5. F. Lewis, The Palladium Hydrogen System (Academic, 1967).
  6. P. Berini, N. Lahoud, and R. Charbonneau, J. Vac. Sci. Technol. A 26, 1383 (2008).
    [CrossRef]
  7. M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
    [CrossRef]
  8. S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
    [CrossRef]
  9. J. Vilatoro and D. Monzón-Hernández, Opt. Express 13, 5087 (2005).
    [CrossRef]

2012 (1)

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

2011 (2)

T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
[CrossRef]

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

2009 (1)

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

2008 (1)

P. Berini, N. Lahoud, and R. Charbonneau, J. Vac. Sci. Technol. A 26, 1383 (2008).
[CrossRef]

2007 (1)

M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
[CrossRef]

2005 (1)

Baets, R.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

Banach, U.

T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
[CrossRef]

Berini, P.

P. Berini, N. Lahoud, and R. Charbonneau, J. Vac. Sci. Technol. A 26, 1383 (2008).
[CrossRef]

Black, G.

T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
[CrossRef]

Boon-Brett, L.

T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
[CrossRef]

Charbonneau, R.

P. Berini, N. Lahoud, and R. Charbonneau, J. Vac. Sci. Technol. A 26, 1383 (2008).
[CrossRef]

Coelho, L.

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

Covington, J. A.

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

Debliquy, M.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

Frazao, O.

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

Gardner, J. W.

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

Guha, P. K.

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

Hubert, T.

T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
[CrossRef]

Koch, T. L.

M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
[CrossRef]

Lahem, D.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

Lahoud, N.

P. Berini, N. Lahoud, and R. Charbonneau, J. Vac. Sci. Technol. A 26, 1383 (2008).
[CrossRef]

Lewis, F.

F. Lewis, The Palladium Hydrogen System (Academic, 1967).

Malcata, F. X.

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

Mitchell, A.

M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
[CrossRef]

Monzón-Hernández, D.

Pafchek, R. M.

M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
[CrossRef]

Roels, J.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

Santos, J. L.

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

Santra, S.

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

Silva, S. F.

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

Taillaert, D.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

Udrea, F.

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

Van Thourhout, D.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

Vilatoro, J.

Webster, M. A.

M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
[CrossRef]

Yebo, N. A.

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

IEEE Photon. Technol. Lett. (2)

N. A. Yebo, D. Taillaert, J. Roels, D. Lahem, M. Debliquy, D. Van Thourhout, and R. Baets, IEEE Photon. Technol. Lett. 21, 960 (2009).
[CrossRef]

M. A. Webster, R. M. Pafchek, A. Mitchell, and T. L. Koch, IEEE Photon. Technol. Lett. 19, 429 (2007).
[CrossRef]

IEEE Sens. J. (1)

S. F. Silva, L. Coelho, O. Frazao, J. L. Santos, and F. X. Malcata, IEEE Sens. J. 12, 93 (2012).
[CrossRef]

J. Vac. Sci. Technol. A (1)

P. Berini, N. Lahoud, and R. Charbonneau, J. Vac. Sci. Technol. A 26, 1383 (2008).
[CrossRef]

Opt. Express (1)

Procedia Eng. (1)

P. K. Guha, S. Santra, J. A. Covington, F. Udrea, and J. W. Gardner, Procedia Eng. 25, 1473 (2011).
[CrossRef]

Sens. Actuators B (1)

T. Hubert, L. Boon-Brett, G. Black, and U. Banach, Sens. Actuators B 157, 329 (2011).
[CrossRef]

Other (2)

http://hdl.handle.net/1854/LU-547471 .

F. Lewis, The Palladium Hydrogen System (Academic, 1967).

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Figures (5)

Fig. 1.
Fig. 1.

(a) Schematic of the proposed hydrogen sensor. (b) SEM image of the fabricated sample showing a number of silicon waveguides with Pd overlays.

Fig. 2.
Fig. 2.

Optical setup for testing the hydrogen sensor.

Fig. 3.
Fig. 3.

Response of the hydrogen sensor to cycles of nitrogen and 4% hydrogen.

Fig. 4.
Fig. 4.

Sensitivity of the sensor for increasing hydrogen concentrations.

Fig. 5.
Fig. 5.

Response time for the sensor for hydrogen concentrations ranging from 1% to 4%.

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